KR101345563B1 - 반도체 제조용 석영유리 부재의 제조방법 및 그 방법에의해 제조된 부재 - Google Patents

반도체 제조용 석영유리 부재의 제조방법 및 그 방법에의해 제조된 부재 Download PDF

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Publication number
KR101345563B1
KR101345563B1 KR1020077017871A KR20077017871A KR101345563B1 KR 101345563 B1 KR101345563 B1 KR 101345563B1 KR 1020077017871 A KR1020077017871 A KR 1020077017871A KR 20077017871 A KR20077017871 A KR 20077017871A KR 101345563 B1 KR101345563 B1 KR 101345563B1
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KR
South Korea
Prior art keywords
etching
quartz glass
surface roughness
average surface
machining
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020077017871A
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English (en)
Korean (ko)
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KR20070102700A (ko
Inventor
주에겐 웨버
율리히 컬스트
Original Assignee
헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지
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Publication of KR20070102700A publication Critical patent/KR20070102700A/ko
Application granted granted Critical
Publication of KR101345563B1 publication Critical patent/KR101345563B1/ko
Assigned to 신에쯔 세끼에이 가부시키가이샤 reassignment 신에쯔 세끼에이 가부시키가이샤 권리의 전부이전등록 Assignors: 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2204/00—Glasses, glazes or enamels with special properties
    • C03C2204/08—Glass having a rough surface
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Surface Treatment Of Glass (AREA)
KR1020077017871A 2005-02-03 2006-01-18 반도체 제조용 석영유리 부재의 제조방법 및 그 방법에의해 제조된 부재 Expired - Fee Related KR101345563B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005005196A DE102005005196B4 (de) 2005-02-03 2005-02-03 Verfahren zur Herstellung eines Bauteils aus Quarzglas für den Einsatz in der Halbleiterfertigung und nach dem Verfahren erhaltenes Bauteil
DE102005005196.0 2005-02-03
PCT/EP2006/000381 WO2006081940A1 (de) 2005-02-03 2006-01-18 Verfahren zur herstellung eines bauteils aus quarzglas für den einsatz in der halbleiterfertigung und nach dem verfahren erhaltenes bauteil

Publications (2)

Publication Number Publication Date
KR20070102700A KR20070102700A (ko) 2007-10-19
KR101345563B1 true KR101345563B1 (ko) 2014-01-02

Family

ID=36480954

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077017871A Expired - Fee Related KR101345563B1 (ko) 2005-02-03 2006-01-18 반도체 제조용 석영유리 부재의 제조방법 및 그 방법에의해 제조된 부재

Country Status (8)

Country Link
US (1) US20080193715A1 (https=)
EP (1) EP1843984B1 (https=)
JP (1) JP5274022B2 (https=)
KR (1) KR101345563B1 (https=)
CN (1) CN101115691B (https=)
DE (1) DE102005005196B4 (https=)
IL (1) IL184622A (https=)
WO (1) WO2006081940A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170036985A (ko) 2015-09-25 2017-04-04 한국세라믹기술원 석영 유리의 표면 엠보싱화 방법

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005017739B4 (de) 2005-04-15 2009-11-05 Heraeus Quarzglas Gmbh & Co. Kg Halter aus Quarzglas für die Prozessierung von Halbleiterwafern und Verfahren zur Herstellung des Halters
CN103247551A (zh) * 2012-02-01 2013-08-14 上海科秉电子科技有限公司 一种用于半导体制程中钟罩零件的粗糙度再生方法
CN108698880B (zh) 2015-12-18 2023-05-02 贺利氏石英玻璃有限两合公司 不透明石英玻璃体的制备
US11339076B2 (en) 2015-12-18 2022-05-24 Heraeus Quarzglas Gmbh & Co. Kg Preparation of carbon-doped silicon dioxide granulate as an intermediate in the preparation of quartz glass
CN109153593A (zh) 2015-12-18 2019-01-04 贺利氏石英玻璃有限两合公司 合成石英玻璃粉粒的制备
KR20180095618A (ko) 2015-12-18 2018-08-27 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 다중-챔버 가열로에서 실리카 유리체의 제조
JP6940235B2 (ja) 2015-12-18 2021-09-22 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 高融点金属の溶融坩堝内での石英ガラス体の調製
EP3390303B1 (de) 2015-12-18 2024-02-07 Heraeus Quarzglas GmbH & Co. KG Herstellung von quarzglaskörpern mit taupunktkontrolle im schmelzofen
JP6981710B2 (ja) 2015-12-18 2021-12-17 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 二酸化ケイ素造粒体からの石英ガラス体の調製
EP3390304B1 (de) 2015-12-18 2023-09-13 Heraeus Quarzglas GmbH & Co. KG Sprühgranulieren von siliziumdioxid bei der herstellung von quarzglas
WO2017103153A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Glasfasern und vorformen aus quarzglas mit geringem oh-, cl- und al-gehalt
TWI840318B (zh) 2015-12-18 2024-05-01 德商何瑞斯廓格拉斯公司 石英玻璃體、光導、施照體、成型體及製備彼等之方法及矽組分之用途
KR102275790B1 (ko) * 2019-11-15 2021-07-09 세메스 주식회사 석영 부재의 표면 처리 방법 및 석영 부재
CN114102440A (zh) * 2020-08-28 2022-03-01 长鑫存储技术有限公司 用于石英部件的表面处理方法
KR20240036521A (ko) * 2021-06-25 2024-03-20 신에쯔 세끼에이 가부시키가이샤 석영 유리 지그의 제조 방법 및 석영 유리 지그
KR20230036331A (ko) 2021-09-07 2023-03-14 임재영 나노 보호코팅층을 가지는 반도체 공정용 글래스
CN115008027B (zh) * 2022-06-16 2023-04-28 江苏富乐华半导体科技股份有限公司 一种覆铜陶瓷基板产品的追溯方式
KR102825674B1 (ko) * 2024-05-31 2025-06-26 신에쯔 세끼에이 가부시키가이샤 성막 처리 가스 노출용 석영 유리 부재 및 이의 제조 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040238487A1 (en) * 2003-05-30 2004-12-02 Kiehlbauch Mark W. Methods of finishing quartz glass surfaces and components made by the methods

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19713014C2 (de) * 1997-03-27 1999-01-21 Heraeus Quarzglas Bauteil aus Quarzglas für die Verwendung bei der Halbleiterherstellung
US6368410B1 (en) 1999-06-28 2002-04-09 General Electric Company Semiconductor processing article
JP4294176B2 (ja) * 1999-09-13 2009-07-08 株式会社山形信越石英 表面が砂目加工された石英物品の洗浄方法
DE10018857C1 (de) * 2000-04-14 2001-11-29 Heraeus Quarzglas Vorrichtung zur Herstellung eines Quarzglaskörpers
JP2002047034A (ja) * 2000-07-31 2002-02-12 Shinetsu Quartz Prod Co Ltd プラズマを利用したプロセス装置用の石英ガラス治具
KR100547743B1 (ko) * 2000-09-28 2006-01-31 신에쯔 세끼에이 가부시키가이샤 반도체공업용 실리카유리지그 및 그 제조방법
US7045072B2 (en) * 2003-07-24 2006-05-16 Tan Samantha S H Cleaning process and apparatus for silicate materials

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040238487A1 (en) * 2003-05-30 2004-12-02 Kiehlbauch Mark W. Methods of finishing quartz glass surfaces and components made by the methods
WO2004108617A2 (en) * 2003-05-30 2004-12-16 Lam Research Corporation Methods of finishing quartz glass surfaces and components made by the methods

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170036985A (ko) 2015-09-25 2017-04-04 한국세라믹기술원 석영 유리의 표면 엠보싱화 방법

Also Published As

Publication number Publication date
WO2006081940A1 (de) 2006-08-10
EP1843984B1 (de) 2017-06-14
JP5274022B2 (ja) 2013-08-28
DE102005005196B4 (de) 2009-04-23
IL184622A (en) 2012-01-31
CN101115691A (zh) 2008-01-30
CN101115691B (zh) 2012-06-13
EP1843984A1 (de) 2007-10-17
IL184622A0 (en) 2007-12-03
KR20070102700A (ko) 2007-10-19
JP2008528432A (ja) 2008-07-31
US20080193715A1 (en) 2008-08-14
DE102005005196A1 (de) 2006-08-17

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