KR101306917B1 - 노광 장치 - Google Patents
노광 장치 Download PDFInfo
- Publication number
- KR101306917B1 KR101306917B1 KR1020087001979A KR20087001979A KR101306917B1 KR 101306917 B1 KR101306917 B1 KR 101306917B1 KR 1020087001979 A KR1020087001979 A KR 1020087001979A KR 20087001979 A KR20087001979 A KR 20087001979A KR 101306917 B1 KR101306917 B1 KR 101306917B1
- Authority
- KR
- South Korea
- Prior art keywords
- exposure
- photomask
- light
- exposed
- mask
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/7035—Proximity or contact printers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005309205A JP5382899B2 (ja) | 2005-10-25 | 2005-10-25 | 露光装置 |
JPJP-P-2005-00309205 | 2005-10-25 | ||
PCT/JP2006/319853 WO2007049436A1 (ja) | 2005-10-25 | 2006-10-04 | 露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080059546A KR20080059546A (ko) | 2008-06-30 |
KR101306917B1 true KR101306917B1 (ko) | 2013-09-10 |
Family
ID=37967554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020087001979A KR101306917B1 (ko) | 2005-10-25 | 2006-10-04 | 노광 장치 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5382899B2 (zh) |
KR (1) | KR101306917B1 (zh) |
CN (1) | CN101268420B (zh) |
TW (1) | TWI446124B (zh) |
WO (1) | WO2007049436A1 (zh) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5235061B2 (ja) * | 2007-08-30 | 2013-07-10 | 株式会社ブイ・テクノロジー | 露光装置 |
JP5098041B2 (ja) * | 2007-08-31 | 2012-12-12 | 株式会社ブイ・テクノロジー | 露光方法 |
JP5256434B2 (ja) * | 2008-06-11 | 2013-08-07 | 株式会社ブイ・テクノロジー | 近接露光装置 |
WO2010070988A1 (ja) * | 2008-12-16 | 2010-06-24 | 株式会社ブイ・テクノロジー | 凸状パターン形成方法、露光装置及びフォトマスク |
KR101254442B1 (ko) * | 2009-02-26 | 2013-04-12 | 도판 인사츠 가부시키가이샤 | 컬러 필터 및 컬러 필터의 제조 방법 |
JP5258051B2 (ja) * | 2009-04-03 | 2013-08-07 | 株式会社ブイ・テクノロジー | 露光方法及び露光装置 |
JP5622052B2 (ja) * | 2009-04-28 | 2014-11-12 | 凸版印刷株式会社 | カラーフィルタ、液晶表示装置、カラーフィルタの製造方法 |
KR20120022908A (ko) | 2009-04-30 | 2012-03-12 | 도판 인사츠 가부시키가이샤 | 액정 표시 장치 |
US8605237B2 (en) | 2009-04-30 | 2013-12-10 | Toppan Printing Co., Ltd. | Color filter and liquid crystal display device, and exposure mask |
JP5633021B2 (ja) * | 2009-06-29 | 2014-12-03 | 株式会社ブイ・テクノロジー | アライメント方法、アライメント装置及び露光装置 |
TWI421546B (zh) * | 2009-10-02 | 2014-01-01 | Unique Instr Co Ltd | A Method for Copying Production of 3D Parallax Gratings |
US8778576B2 (en) | 2009-12-24 | 2014-07-15 | Toppan Printing Co., Ltd. | Exposure method and exposure device |
JP5542456B2 (ja) | 2010-01-18 | 2014-07-09 | 凸版印刷株式会社 | カラーフィルタ基板の露光方法 |
JP5549233B2 (ja) * | 2010-01-18 | 2014-07-16 | 凸版印刷株式会社 | カラーフィルタ基板の露光方法 |
JPWO2011105461A1 (ja) * | 2010-02-24 | 2013-06-20 | Nskテクノロジー株式会社 | 露光装置用光照射装置、露光装置、露光方法、基板の製造方法、マスク、及び被露光基板 |
JP5382456B2 (ja) * | 2010-04-08 | 2014-01-08 | 株式会社ブイ・テクノロジー | 露光方法及び露光装置 |
KR101681143B1 (ko) | 2010-07-19 | 2016-12-02 | 삼성디스플레이 주식회사 | 노광 장치 및 이를 이용한 노광 방법 |
KR101104367B1 (ko) * | 2011-07-27 | 2012-01-16 | 주식회사 필옵틱스 | Led 광원 노광 장치 |
US9081297B2 (en) | 2012-05-01 | 2015-07-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lithography apparatus having dual reticle edge masking assemblies and method of use |
CN103955088B (zh) * | 2014-05-12 | 2017-02-22 | 青岛斯博锐意电子技术有限公司 | 一种液晶光掩膜及其应用 |
CN103955087B (zh) * | 2014-05-12 | 2017-01-04 | 青岛斯博锐意电子技术有限公司 | 一种液晶光掩膜、其应用及制版装置 |
CN106324892B (zh) * | 2016-10-11 | 2019-08-02 | 武汉华星光电技术有限公司 | 一种用于制备显示基板的曝光系统及曝光控制方法 |
CN114252014A (zh) * | 2021-12-24 | 2022-03-29 | 长飞光纤光缆股份有限公司 | 一种光掩膜基板标记尺寸测试系统及方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0757985A (ja) * | 1993-08-09 | 1995-03-03 | Nikon Corp | 走査型露光装置 |
JPH1010745A (ja) * | 1996-06-19 | 1998-01-16 | Toppan Printing Co Ltd | パターン露光方法 |
JP2001305747A (ja) * | 2000-02-18 | 2001-11-02 | Nikon Corp | 露光装置及び露光方法 |
JP2002222761A (ja) * | 2000-11-22 | 2002-08-09 | Nikon Corp | 照明光学装置および該照明光学装置を備えた露光装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02177317A (ja) * | 1988-12-28 | 1990-07-10 | Canon Inc | 露光装置 |
JPH09199402A (ja) * | 1996-01-12 | 1997-07-31 | Canon Inc | 走査型露光装置 |
JPH09274323A (ja) * | 1996-04-04 | 1997-10-21 | Toppan Printing Co Ltd | パターン露光方法 |
JPH1197343A (ja) * | 1997-09-24 | 1999-04-09 | Canon Inc | 露光装置 |
JP4346320B2 (ja) * | 2003-02-05 | 2009-10-21 | 大日本印刷株式会社 | 露光方法及び露光装置 |
JP2005221596A (ja) * | 2004-02-04 | 2005-08-18 | Dainippon Screen Mfg Co Ltd | パターン描画装置 |
-
2005
- 2005-10-25 JP JP2005309205A patent/JP5382899B2/ja active Active
-
2006
- 2006-10-04 WO PCT/JP2006/319853 patent/WO2007049436A1/ja active Application Filing
- 2006-10-04 KR KR1020087001979A patent/KR101306917B1/ko active IP Right Grant
- 2006-10-04 CN CN2006800349340A patent/CN101268420B/zh not_active Expired - Fee Related
- 2006-10-24 TW TW95139074A patent/TWI446124B/zh not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0757985A (ja) * | 1993-08-09 | 1995-03-03 | Nikon Corp | 走査型露光装置 |
JPH1010745A (ja) * | 1996-06-19 | 1998-01-16 | Toppan Printing Co Ltd | パターン露光方法 |
JP2001305747A (ja) * | 2000-02-18 | 2001-11-02 | Nikon Corp | 露光装置及び露光方法 |
JP2002222761A (ja) * | 2000-11-22 | 2002-08-09 | Nikon Corp | 照明光学装置および該照明光学装置を備えた露光装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI446124B (zh) | 2014-07-21 |
CN101268420A (zh) | 2008-09-17 |
KR20080059546A (ko) | 2008-06-30 |
JP5382899B2 (ja) | 2014-01-08 |
WO2007049436A1 (ja) | 2007-05-03 |
JP2007121344A (ja) | 2007-05-17 |
TW200731033A (en) | 2007-08-16 |
CN101268420B (zh) | 2010-10-27 |
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