KR101273008B1 - 유체 압력 제어방법 - Google Patents
유체 압력 제어방법 Download PDFInfo
- Publication number
- KR101273008B1 KR101273008B1 KR1020077020104A KR20077020104A KR101273008B1 KR 101273008 B1 KR101273008 B1 KR 101273008B1 KR 1020077020104 A KR1020077020104 A KR 1020077020104A KR 20077020104 A KR20077020104 A KR 20077020104A KR 101273008 B1 KR101273008 B1 KR 101273008B1
- Authority
- KR
- South Korea
- Prior art keywords
- fluid
- vessel
- pressure
- supply line
- dispensing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/06—Details or accessories
- B67D7/08—Arrangements of devices for controlling, indicating, metering or registering quantity or price of liquid transferred
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F1/00—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped
- F04F1/02—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped using both positively and negatively pressurised fluid medium, e.g. alternating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
- B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
- B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
- B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/06—Details or accessories
- B67D7/72—Devices for applying air or other gas pressure for forcing liquid to delivery point
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2496—Self-proportioning or correlating systems
- Y10T137/2559—Self-controlled branched flow systems
- Y10T137/2564—Plural inflows
- Y10T137/2567—Alternate or successive inflows
- Y10T137/2569—Control by depletion of source
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2496—Self-proportioning or correlating systems
- Y10T137/27—Liquid level responsive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2931—Diverse fluid containing pressure systems
- Y10T137/3115—Gas pressure storage over or displacement of liquid
- Y10T137/3127—With gas maintenance or application
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
- Weting (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US65904705P | 2005-03-04 | 2005-03-04 | |
| US60/659,047 | 2005-03-04 | ||
| US11/367,140 US7810516B2 (en) | 2005-03-04 | 2006-03-03 | Control of fluid conditions in bulk fluid distribution systems |
| US11/367,140 | 2006-03-03 | ||
| PCT/US2006/007928 WO2006096646A2 (en) | 2005-03-04 | 2006-03-06 | Control of fluid conditions in bulk fluid delivery systems |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20070116805A KR20070116805A (ko) | 2007-12-11 |
| KR101273008B1 true KR101273008B1 (ko) | 2013-06-10 |
Family
ID=36943151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020077020104A Expired - Lifetime KR101273008B1 (ko) | 2005-03-04 | 2006-03-06 | 유체 압력 제어방법 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7810516B2 (https=) |
| EP (1) | EP1858795B1 (https=) |
| JP (1) | JP5024882B2 (https=) |
| KR (1) | KR101273008B1 (https=) |
| IL (1) | IL185291A (https=) |
| TW (1) | TWI356805B (https=) |
| WO (1) | WO2006096646A2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015199346A1 (ko) * | 2014-06-26 | 2015-12-30 | 한국생명공학연구원 | 다채널 유량 제어장치 |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7640876B2 (en) * | 2007-12-03 | 2010-01-05 | Cnh Canada, Ltd. | Bin level sensor for use with a product dispensing agricultural implement |
| US8037894B1 (en) * | 2007-12-27 | 2011-10-18 | Intermolecular, Inc. | Maintaining flow rate of a fluid |
| US8220502B1 (en) | 2007-12-28 | 2012-07-17 | Intermolecular, Inc. | Measuring volume of a liquid dispensed into a vessel |
| JP5231028B2 (ja) * | 2008-01-21 | 2013-07-10 | 東京エレクトロン株式会社 | 塗布液供給装置 |
| US8215329B2 (en) * | 2008-02-01 | 2012-07-10 | Woodward, Inc. | Digital closed loop proportional hydraulic pressure controller |
| US8646493B2 (en) * | 2009-03-02 | 2014-02-11 | Envirotower Inc. | Method and apparatus for changeover of container in a fluid dispenser |
| TW201117888A (en) * | 2009-11-25 | 2011-06-01 | Hon Hai Prec Ind Co Ltd | Continuous paint supply system and method for continuous paint |
| KR101138403B1 (ko) * | 2010-09-02 | 2012-04-26 | 씨앤지하이테크 주식회사 | 배관 막힘 방지 수단이 마련된 반도체용 슬러리 공급장치 |
| FR2972504B1 (fr) * | 2011-03-09 | 2014-06-27 | Olaer Ind Sa | Installation comportant au moins un accumulateur hydropneumatique a entretien automatise |
| US9623165B2 (en) | 2012-12-13 | 2017-04-18 | Gambro Lundia Ab | Cassette for pumping a treatment solution through a dialyzer |
| US9223319B2 (en) * | 2012-12-21 | 2015-12-29 | Intermolecular, Inc. | High dilution ratio by successively preparing and diluting chemicals |
| US9770804B2 (en) | 2013-03-18 | 2017-09-26 | Versum Materials Us, Llc | Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture |
| ES2527968B1 (es) * | 2013-08-02 | 2016-02-26 | Eulen, S.A. | Equipo de trasvase de lodos, de ciclo continuo de trabajo. |
| US9765769B2 (en) * | 2015-04-22 | 2017-09-19 | C. Anthony Cox | Sterile liquid pump with single use elements |
| US10030674B2 (en) * | 2015-04-22 | 2018-07-24 | C. Anthony Cox | Sterile liquid pump with single use elements |
| US20170016458A1 (en) * | 2015-07-15 | 2017-01-19 | Materials and Technologies, Corp. | Simple Positive Displacement Pump Suitable for Pharmaceutical, Chemical, Biological, Viscous, Dense, Particulate Laden Fluids and Other Demanding Applications |
| US10184496B2 (en) * | 2016-12-06 | 2019-01-22 | Airgas, Inc. | Automatic pressure and vacuum clearing skid method |
| JP2019129243A (ja) * | 2018-01-25 | 2019-08-01 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
| US11761582B2 (en) * | 2019-09-05 | 2023-09-19 | Dhf America, Llc | Pressure regulation system and method for a fluidic product having particles |
| AU2020210306B2 (en) * | 2020-07-31 | 2023-04-06 | Solidsvac Pty Ltd | Constant flow solids pump |
| TWI809498B (zh) * | 2020-09-18 | 2023-07-21 | 美商慧盛材料美國責任有限公司 | 材料供應系統及使從氣體供應和分配系統分配的氣體的壓力變化實質上降低之方法 |
| GB202104739D0 (en) * | 2021-04-01 | 2021-05-19 | Medincell | Device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990037056A (ko) * | 1997-10-14 | 1999-05-25 | 페이스 살바토르 피 | 액체 분배 장치 및 방법 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61164998A (ja) * | 1985-01-14 | 1986-07-25 | 日本電信電話株式会社 | 薬品の自動供給装置 |
| US4859375A (en) * | 1986-12-29 | 1989-08-22 | Air Products And Chemicals, Inc. | Chemical refill system |
| US5417346A (en) * | 1990-09-17 | 1995-05-23 | Applied Chemical Solutions | Process and apparatus for electronic control of the transfer and delivery of high purity chemicals |
| US5370269A (en) * | 1990-09-17 | 1994-12-06 | Applied Chemical Solutions | Process and apparatus for precise volumetric diluting/mixing of chemicals |
| US5148945B1 (en) * | 1990-09-17 | 1996-07-02 | Applied Chemical Solutions | Apparatus and method for the transfer and delivery of high purity chemicals |
| US5803599A (en) * | 1990-09-17 | 1998-09-08 | Applied Chemical Solutions | Apparatus and method for mixing chemicals to be used in chemical-mechanical polishing procedures |
| US6260588B1 (en) * | 1993-04-28 | 2001-07-17 | Advanced Technology Materials, Inc. | Bulk chemical delivery system |
| US5383574A (en) * | 1993-07-19 | 1995-01-24 | Microbar Sytems, Inc. | System and method for dispensing liquid from storage containers |
| US5632866A (en) * | 1994-01-12 | 1997-05-27 | Fsi International, Inc. | Point-of-use recycling of wafer cleaning substances |
| US5522660A (en) * | 1994-12-14 | 1996-06-04 | Fsi International, Inc. | Apparatus for blending and controlling the concentration of a liquid chemical in a diluent liquid |
| US5924794A (en) * | 1995-02-21 | 1999-07-20 | Fsi International, Inc. | Chemical blending system with titrator control |
| US5632960A (en) * | 1995-11-07 | 1997-05-27 | Applied Chemical Solutions, Inc. | Two-stage chemical mixing system |
| US5653533A (en) * | 1995-11-13 | 1997-08-05 | Abc Techcorp. | Apparatus and method for introducing liquid additives into a concrete mix |
| US5871028A (en) * | 1996-08-06 | 1999-02-16 | United Microelectronics Corporation | Photoresist solution storage and supply device |
| US6006777A (en) * | 1997-10-23 | 1999-12-28 | Hanson Research Corporation | Media dispensing apparatus |
| WO1999056189A1 (en) * | 1998-04-30 | 1999-11-04 | The Boc Group, Inc. | Conductivity feedback control system for slurry blending |
| US6170703B1 (en) * | 1998-10-09 | 2001-01-09 | Scp Global Technologies, Inc | Chemical Dispensing system and method |
| US6098843A (en) * | 1998-12-31 | 2000-08-08 | Silicon Valley Group, Inc. | Chemical delivery systems and methods of delivery |
| DE69912323T2 (de) * | 1998-12-30 | 2004-07-29 | The Boc Group, Inc. | Anlage und Verfahren zur Abgabe von Chemikalien |
| US6604555B2 (en) * | 2000-08-04 | 2003-08-12 | Arch Specialty Chemicals, Inc. | Automatic refill system for ultra pure or contamination sensitive chemicals |
| US6953047B2 (en) * | 2002-01-14 | 2005-10-11 | Air Products And Chemicals, Inc. | Cabinet for chemical delivery with solvent purging |
| JP3621690B2 (ja) * | 2002-04-16 | 2005-02-16 | 株式会社イワキ | コントロールシステム |
| US20060196541A1 (en) * | 2005-03-04 | 2006-09-07 | David Gerken | Control of fluid conditions in bulk fluid distribution systems |
| US20070244437A1 (en) | 2006-03-31 | 2007-10-18 | Luis Castillo | Fluid delivery system with bulk container and pump assembly |
-
2006
- 2006-03-03 US US11/367,140 patent/US7810516B2/en not_active Expired - Fee Related
- 2006-03-06 WO PCT/US2006/007928 patent/WO2006096646A2/en not_active Ceased
- 2006-03-06 EP EP20060737143 patent/EP1858795B1/en not_active Expired - Lifetime
- 2006-03-06 JP JP2007558324A patent/JP5024882B2/ja not_active Expired - Lifetime
- 2006-03-06 TW TW95107470A patent/TWI356805B/zh active
- 2006-03-06 KR KR1020077020104A patent/KR101273008B1/ko not_active Expired - Lifetime
-
2007
- 2007-08-15 IL IL185291A patent/IL185291A/en active IP Right Grant
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990037056A (ko) * | 1997-10-14 | 1999-05-25 | 페이스 살바토르 피 | 액체 분배 장치 및 방법 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015199346A1 (ko) * | 2014-06-26 | 2015-12-30 | 한국생명공학연구원 | 다채널 유량 제어장치 |
| KR101610646B1 (ko) * | 2014-06-26 | 2016-04-11 | 한국생명공학연구원 | 다채널 유량 제어장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200710016A (en) | 2007-03-16 |
| WO2006096646A3 (en) | 2007-10-04 |
| US7810516B2 (en) | 2010-10-12 |
| IL185291A (en) | 2011-05-31 |
| JP2008531426A (ja) | 2008-08-14 |
| TWI356805B (en) | 2012-01-21 |
| KR20070116805A (ko) | 2007-12-11 |
| WO2006096646A2 (en) | 2006-09-14 |
| EP1858795A2 (en) | 2007-11-28 |
| JP5024882B2 (ja) | 2012-09-12 |
| IL185291A0 (en) | 2008-02-09 |
| EP1858795B1 (en) | 2013-05-08 |
| EP1858795A4 (en) | 2012-02-01 |
| US20060196884A1 (en) | 2006-09-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101273008B1 (ko) | 유체 압력 제어방법 | |
| US6764378B2 (en) | Point-of-use fluid regulating system for use in the chemical-mechanical planarization of semiconductor wafers | |
| KR100949029B1 (ko) | 화학물질 혼합 및 이송 시스템과 그 방법 | |
| US7172096B2 (en) | Liquid dispensing system | |
| US4662799A (en) | Apparatus and process for pneumatically conveying particulate material | |
| US9778571B2 (en) | Processing liquid supplying apparatus, processing liquid supplying method and storage medium | |
| JP2002519685A (ja) | ライン内の流体の流れが停止した時を確認する方法及び装置 | |
| JP2001192893A (ja) | 二倍圧力ベッセル化学物質ディスペンサーユニット | |
| CN101193815B (zh) | 容积流体输送系统中的流体状态的控制 | |
| JP2008531426A5 (https=) | ||
| KR20000017362A (ko) | 기판의 기계적 연마용 연마제 현탁액 송출 장치 | |
| KR20070116804A (ko) | 벌크 유체 분배 시스템 내의 유체 상태 제어 방법 | |
| CN113805619B (zh) | 压力控制系统及控制方法 | |
| EP0854756A1 (en) | Liquid control for spray painting applications | |
| KR100258443B1 (ko) | 슬러리 자동공급 시스템 | |
| KR20090072419A (ko) | 케미컬 공급장치 | |
| JP2656014B2 (ja) | 自動調節式ダイコータ塗料供給装置 | |
| KR100893109B1 (ko) | 슬러리 연속 공급장치 및 그 방법 | |
| WO2007072081A1 (en) | Adjusting flow properties of bulk particulates | |
| JPH1182397A (ja) | 薬液供給装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20070903 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| N231 | Notification of change of applicant | ||
| PN2301 | Change of applicant |
Patent event date: 20080827 Comment text: Notification of Change of Applicant Patent event code: PN23011R01D |
|
| N231 | Notification of change of applicant | ||
| PN2301 | Change of applicant |
Patent event date: 20090415 Comment text: Notification of Change of Applicant Patent event code: PN23011R01D |
|
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20110217 Comment text: Request for Examination of Application |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20130115 Patent event code: PE09021S01D |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20130524 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20130603 Patent event code: PR07011E01D |
|
| PR1002 | Payment of registration fee |
Payment date: 20130603 End annual number: 3 Start annual number: 1 |
|
| PG1601 | Publication of registration | ||
| FPAY | Annual fee payment |
Payment date: 20160526 Year of fee payment: 4 |
|
| PR1001 | Payment of annual fee |
Payment date: 20160526 Start annual number: 4 End annual number: 4 |
|
| FPAY | Annual fee payment |
Payment date: 20170525 Year of fee payment: 5 |
|
| PR1001 | Payment of annual fee |
Payment date: 20170525 Start annual number: 5 End annual number: 5 |
|
| FPAY | Annual fee payment |
Payment date: 20180525 Year of fee payment: 6 |
|
| PR1001 | Payment of annual fee |
Payment date: 20180525 Start annual number: 6 End annual number: 6 |
|
| FPAY | Annual fee payment |
Payment date: 20190523 Year of fee payment: 7 |
|
| PR1001 | Payment of annual fee |
Payment date: 20190523 Start annual number: 7 End annual number: 7 |
|
| PR1001 | Payment of annual fee |
Payment date: 20200521 Start annual number: 8 End annual number: 8 |
|
| PR1001 | Payment of annual fee |
Payment date: 20210520 Start annual number: 9 End annual number: 9 |
|
| PR1001 | Payment of annual fee |
Payment date: 20220530 Start annual number: 10 End annual number: 10 |