KR101240367B1 - 광조사 장치의 광조사 방법 및 광조사 장치 - Google Patents
광조사 장치의 광조사 방법 및 광조사 장치 Download PDFInfo
- Publication number
- KR101240367B1 KR101240367B1 KR1020107022207A KR20107022207A KR101240367B1 KR 101240367 B1 KR101240367 B1 KR 101240367B1 KR 1020107022207 A KR1020107022207 A KR 1020107022207A KR 20107022207 A KR20107022207 A KR 20107022207A KR 101240367 B1 KR101240367 B1 KR 101240367B1
- Authority
- KR
- South Korea
- Prior art keywords
- light
- linear beam
- illuminance
- along
- light irradiation
- Prior art date
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009110136 | 2009-04-28 | ||
JP2009110135 | 2009-04-28 | ||
JPJP-P-2009-110135 | 2009-04-28 | ||
JPJP-P-2009-110136 | 2009-04-28 | ||
PCT/JP2010/051013 WO2010125836A1 (ja) | 2009-04-28 | 2010-01-27 | 光照射装置の光照射方法及び光照射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20100132024A KR20100132024A (ko) | 2010-12-16 |
KR101240367B1 true KR101240367B1 (ko) | 2013-03-11 |
Family
ID=43031992
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020107022207A KR101240367B1 (ko) | 2009-04-28 | 2010-01-27 | 광조사 장치의 광조사 방법 및 광조사 장치 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5230875B2 (ja) |
KR (1) | KR101240367B1 (ja) |
CN (1) | CN101978308B (ja) |
TW (1) | TWI402152B (ja) |
WO (1) | WO2010125836A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5771776B2 (ja) * | 2010-12-21 | 2015-09-02 | パナソニックIpマネジメント株式会社 | 紫外線照射装置 |
JP5732971B2 (ja) * | 2011-03-31 | 2015-06-10 | 東芝ライテック株式会社 | 紫外線照射装置 |
CN102435307B (zh) * | 2011-11-09 | 2013-09-18 | 深圳市华星光电技术有限公司 | Tft-lcd制程中多层uv烘烤炉的uv照度的检测方法及用于实施该方法的取片组合装置 |
JP2013219205A (ja) * | 2012-04-10 | 2013-10-24 | Hoya Candeo Optronics株式会社 | 光照射装置 |
JP6206945B2 (ja) * | 2013-03-07 | 2017-10-04 | 株式会社ブイ・テクノロジー | 走査露光装置及び走査露光方法 |
JP5884776B2 (ja) * | 2013-06-22 | 2016-03-15 | ウシオ電機株式会社 | 光配向用偏光光照射装置 |
JP2015165546A (ja) * | 2014-02-07 | 2015-09-17 | 株式会社ミマキエンジニアリング | 紫外線発光ダイオードユニット、紫外線発光ダイオードユニットのセット、インクジェット装置および三次元造形物製造装置 |
JP6394317B2 (ja) * | 2014-11-21 | 2018-09-26 | 東芝ライテック株式会社 | 光照射装置 |
JP6984228B2 (ja) * | 2016-11-17 | 2021-12-17 | 東京エレクトロン株式会社 | 露光装置、露光装置の調整方法及び記憶媒体 |
JP6809188B2 (ja) * | 2016-12-13 | 2021-01-06 | 東京エレクトロン株式会社 | 光照射装置 |
CN108681211A (zh) * | 2018-04-20 | 2018-10-19 | 佛山市鑫东陶陶瓷有限公司 | 一种点光源曝光装置 |
WO2020217288A1 (ja) * | 2019-04-22 | 2020-10-29 | カンタム・ウシカタ株式会社 | 光学系装置 |
DE102022128497A1 (de) | 2022-10-27 | 2024-05-02 | Forschungszentrum Jülich GmbH | Vorrichtung und verfahren zur thermischen behandlung von werkstücken |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006235617A (ja) * | 2005-01-28 | 2006-09-07 | Shibaura Mechatronics Corp | 紫外光照射装置及び照射方法、基板製造装置及び基板製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4694803B2 (ja) * | 2003-08-28 | 2011-06-08 | 芝浦メカトロニクス株式会社 | 紫外光照射装置及び照射方法、基板製造装置及び基板製造方法 |
JP2006030933A (ja) * | 2004-06-18 | 2006-02-02 | Shin Etsu Chem Co Ltd | 液晶表示セル基板の基板面シール方法及び紫外線照射装置 |
JP2007057861A (ja) * | 2005-08-25 | 2007-03-08 | Harison Toshiba Lighting Corp | 角形状集光用光学系および液晶パネル用紫外線照射装置 |
JP2007334039A (ja) * | 2006-06-15 | 2007-12-27 | Ulvac Japan Ltd | 光源装置及びこれを用いた基板の貼り合わせ方法 |
JP5060748B2 (ja) * | 2006-07-28 | 2012-10-31 | 芝浦メカトロニクス株式会社 | シール剤硬化装置及び基板製造装置 |
-
2010
- 2010-01-27 WO PCT/JP2010/051013 patent/WO2010125836A1/ja active Application Filing
- 2010-01-27 JP JP2010523222A patent/JP5230875B2/ja not_active Expired - Fee Related
- 2010-01-27 CN CN2010800012812A patent/CN101978308B/zh not_active Expired - Fee Related
- 2010-01-27 KR KR1020107022207A patent/KR101240367B1/ko active IP Right Grant
- 2010-02-23 TW TW099105211A patent/TWI402152B/zh not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006235617A (ja) * | 2005-01-28 | 2006-09-07 | Shibaura Mechatronics Corp | 紫外光照射装置及び照射方法、基板製造装置及び基板製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI402152B (zh) | 2013-07-21 |
WO2010125836A1 (ja) | 2010-11-04 |
JPWO2010125836A1 (ja) | 2012-10-25 |
CN101978308A (zh) | 2011-02-16 |
JP5230875B2 (ja) | 2013-07-10 |
CN101978308B (zh) | 2012-09-19 |
KR20100132024A (ko) | 2010-12-16 |
TW201038384A (en) | 2010-11-01 |
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