KR101231184B1 - 기판 성막 검사장치 - Google Patents

기판 성막 검사장치 Download PDF

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Publication number
KR101231184B1
KR101231184B1 KR1020110128434A KR20110128434A KR101231184B1 KR 101231184 B1 KR101231184 B1 KR 101231184B1 KR 1020110128434 A KR1020110128434 A KR 1020110128434A KR 20110128434 A KR20110128434 A KR 20110128434A KR 101231184 B1 KR101231184 B1 KR 101231184B1
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KR
South Korea
Prior art keywords
substrate
film
horizontal
distance
inspection
Prior art date
Application number
KR1020110128434A
Other languages
English (en)
Korean (ko)
Inventor
이순종
우봉주
박병찬
Original Assignee
(주)쎄미시스코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)쎄미시스코 filed Critical (주)쎄미시스코
Priority to KR1020110128434A priority Critical patent/KR101231184B1/ko
Priority to CN201610515785.5A priority patent/CN106226312A/zh
Priority to CN2012100133625A priority patent/CN103134806A/zh
Priority to CN201510667059.0A priority patent/CN105388160A/zh
Application granted granted Critical
Publication of KR101231184B1 publication Critical patent/KR101231184B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mathematical Physics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electroluminescent Light Sources (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020110128434A 2011-12-02 2011-12-02 기판 성막 검사장치 KR101231184B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020110128434A KR101231184B1 (ko) 2011-12-02 2011-12-02 기판 성막 검사장치
CN201610515785.5A CN106226312A (zh) 2011-12-02 2012-01-13 基板成膜检查装置
CN2012100133625A CN103134806A (zh) 2011-12-02 2012-01-13 基板成膜检查装置
CN201510667059.0A CN105388160A (zh) 2011-12-02 2012-01-13 基板检查方法及检查单元

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110128434A KR101231184B1 (ko) 2011-12-02 2011-12-02 기판 성막 검사장치

Publications (1)

Publication Number Publication Date
KR101231184B1 true KR101231184B1 (ko) 2013-02-07

Family

ID=47899155

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110128434A KR101231184B1 (ko) 2011-12-02 2011-12-02 기판 성막 검사장치

Country Status (2)

Country Link
KR (1) KR101231184B1 (zh)
CN (3) CN105388160A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010067653A (ko) * 2001-03-02 2001-07-13 김찬호 알레르기성 비염 및 천식 치료제와 그 제조방법
CN104112687A (zh) * 2014-06-24 2014-10-22 京东方科技集团股份有限公司 膜边检测方法和膜边检测装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105091843B (zh) * 2015-06-25 2018-01-23 深圳市华星光电技术有限公司 一种测量膜缩的方法
US10784134B2 (en) * 2017-05-03 2020-09-22 Applied Materials, Inc. Image based substrate mapper
CN107727654B (zh) * 2017-09-29 2019-12-24 绵阳京东方光电科技有限公司 膜层检测方法、装置及膜层检测系统
CN108120726A (zh) * 2017-12-30 2018-06-05 苏州宁林光电科技有限公司 用于软板贴补强片的自动检测装置
CN108896708A (zh) * 2018-05-31 2018-11-27 武汉华星光电技术有限公司 膜检测装置及膜检测方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100093215A (ko) * 2009-02-16 2010-08-25 (주)위시스 실러 도포 상태 검사 시스템 및 그 방법
KR20100094295A (ko) * 2009-02-17 2010-08-26 (주)글로벌 텍 글라스 에지 검사장치 및 그를 이용한 글라스 에지 검사방법
KR20110084703A (ko) * 2010-01-18 2011-07-26 주식회사 고영테크놀러지 기판 검사장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1260800C (zh) * 2001-09-19 2006-06-21 奥林巴斯光学工业株式会社 半导体晶片检查设备
JP3948522B2 (ja) * 2003-01-30 2007-07-25 株式会社タカトリ 液晶パネルの偏光板貼付け精度検査方法
KR100642500B1 (ko) * 2005-03-02 2006-11-06 (주)쎄미시스코 유리기판의 에지 결함 및 디스컬러 검사장치
KR20070099398A (ko) * 2006-04-03 2007-10-09 삼성전자주식회사 기판검사장치와 이를 이용한 기판검사방법
WO2009016732A1 (ja) * 2007-07-31 2009-02-05 Raytex Corporation 基盤検査装置、及び、基盤検査方法
KR101023949B1 (ko) * 2008-08-08 2011-03-28 주식회사 탑 엔지니어링 기판검사정보를 이용한 디스펜서의 페이스트 도포 방법
KR20110008665A (ko) * 2009-07-21 2011-01-27 주식회사 넥스트아이 엘시디 패널의 검사장치 및 검사방법
CN201503605U (zh) * 2009-10-12 2010-06-09 华南理工大学 一种用于图像系统像素当量标定的装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100093215A (ko) * 2009-02-16 2010-08-25 (주)위시스 실러 도포 상태 검사 시스템 및 그 방법
KR20100094295A (ko) * 2009-02-17 2010-08-26 (주)글로벌 텍 글라스 에지 검사장치 및 그를 이용한 글라스 에지 검사방법
KR20110084703A (ko) * 2010-01-18 2011-07-26 주식회사 고영테크놀러지 기판 검사장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010067653A (ko) * 2001-03-02 2001-07-13 김찬호 알레르기성 비염 및 천식 치료제와 그 제조방법
CN104112687A (zh) * 2014-06-24 2014-10-22 京东方科技集团股份有限公司 膜边检测方法和膜边检测装置
US9410897B2 (en) 2014-06-24 2016-08-09 Boe Technology Group Co., Ltd. Film edge detecting method and film edge detecting device

Also Published As

Publication number Publication date
CN105388160A (zh) 2016-03-09
CN106226312A (zh) 2016-12-14
CN103134806A (zh) 2013-06-05

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