KR101214888B1 - 부상 반송 장치 - Google Patents

부상 반송 장치 Download PDF

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Publication number
KR101214888B1
KR101214888B1 KR1020107000549A KR20107000549A KR101214888B1 KR 101214888 B1 KR101214888 B1 KR 101214888B1 KR 1020107000549 A KR1020107000549 A KR 1020107000549A KR 20107000549 A KR20107000549 A KR 20107000549A KR 101214888 B1 KR101214888 B1 KR 101214888B1
Authority
KR
South Korea
Prior art keywords
floating
conveying
island member
chamber
island
Prior art date
Application number
KR1020107000549A
Other languages
English (en)
Korean (ko)
Other versions
KR20100018615A (ko
Inventor
겐스케 히라타
가이 다나카
Original Assignee
가부시키가이샤 아이에이치아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 아이에이치아이 filed Critical 가부시키가이샤 아이에이치아이
Publication of KR20100018615A publication Critical patent/KR20100018615A/ko
Application granted granted Critical
Publication of KR101214888B1 publication Critical patent/KR101214888B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
KR1020107000549A 2007-06-29 2008-06-03 부상 반송 장치 KR101214888B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-173425 2007-06-29
JP2007173425A JP5332142B2 (ja) 2007-06-29 2007-06-29 浮上搬送装置

Publications (2)

Publication Number Publication Date
KR20100018615A KR20100018615A (ko) 2010-02-17
KR101214888B1 true KR101214888B1 (ko) 2012-12-24

Family

ID=40225939

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107000549A KR101214888B1 (ko) 2007-06-29 2008-06-03 부상 반송 장치

Country Status (5)

Country Link
JP (1) JP5332142B2 (zh)
KR (1) KR101214888B1 (zh)
CN (1) CN101711219B (zh)
TW (1) TWI445654B (zh)
WO (1) WO2009004883A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5540496B2 (ja) * 2008-11-20 2014-07-02 株式会社Ｉｈｉ 浮上搬送装置及び浮上ユニット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181714A (ja) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd 薄板検査装置
JP2004244186A (ja) * 2003-02-14 2004-09-02 Ckd Corp 薄板の搬送用支持装置
JP2006258727A (ja) * 2005-03-18 2006-09-28 Olympus Corp 基板検査装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3901265B2 (ja) * 1996-11-26 2007-04-04 大陽日酸株式会社 薄板状基体の搬送方法及び搬送装置
JP4732716B2 (ja) * 2004-06-29 2011-07-27 株式会社アルバック 搬送装置及びその制御方法並びに真空処理装置
JP4626205B2 (ja) * 2004-07-28 2011-02-02 シンフォニアテクノロジー株式会社 基板の受渡し方法、及びその装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ｉｈｉ 浮上装置および搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181714A (ja) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd 薄板検査装置
JP2004244186A (ja) * 2003-02-14 2004-09-02 Ckd Corp 薄板の搬送用支持装置
JP2006258727A (ja) * 2005-03-18 2006-09-28 Olympus Corp 基板検査装置

Also Published As

Publication number Publication date
CN101711219A (zh) 2010-05-19
JP5332142B2 (ja) 2013-11-06
CN101711219B (zh) 2013-02-13
TW200920674A (en) 2009-05-16
JP2009012873A (ja) 2009-01-22
WO2009004883A1 (ja) 2009-01-08
KR20100018615A (ko) 2010-02-17
TWI445654B (zh) 2014-07-21

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