WO2009004883A1 - 浮上搬送装置 - Google Patents

浮上搬送装置 Download PDF

Info

Publication number
WO2009004883A1
WO2009004883A1 PCT/JP2008/060183 JP2008060183W WO2009004883A1 WO 2009004883 A1 WO2009004883 A1 WO 2009004883A1 JP 2008060183 W JP2008060183 W JP 2008060183W WO 2009004883 A1 WO2009004883 A1 WO 2009004883A1
Authority
WO
WIPO (PCT)
Prior art keywords
transportation device
levitation
chamber
fluid
island member
Prior art date
Application number
PCT/JP2008/060183
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Kensuke Hirata
Kai Tanaka
Original Assignee
Ihi Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corporation filed Critical Ihi Corporation
Priority to CN200880021799.5A priority Critical patent/CN101711219B/zh
Publication of WO2009004883A1 publication Critical patent/WO2009004883A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Non-Mechanical Conveyors (AREA)
PCT/JP2008/060183 2007-06-29 2008-06-03 浮上搬送装置 WO2009004883A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200880021799.5A CN101711219B (zh) 2007-06-29 2008-06-03 浮起传送系统

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-173425 2007-06-29
JP2007173425A JP5332142B2 (ja) 2007-06-29 2007-06-29 浮上搬送装置

Publications (1)

Publication Number Publication Date
WO2009004883A1 true WO2009004883A1 (ja) 2009-01-08

Family

ID=40225939

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060183 WO2009004883A1 (ja) 2007-06-29 2008-06-03 浮上搬送装置

Country Status (5)

Country Link
JP (1) JP5332142B2 (zh)
KR (1) KR101214888B1 (zh)
CN (1) CN101711219B (zh)
TW (1) TWI445654B (zh)
WO (1) WO2009004883A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010120759A (ja) * 2008-11-20 2010-06-03 Ihi Corp 浮上搬送装置及び浮上ユニット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006036471A (ja) * 2004-07-28 2006-02-09 Shinko Electric Co Ltd 基板の受渡し方法、及びその装置
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置
JP2006258727A (ja) * 2005-03-18 2006-09-28 Olympus Corp 基板検査装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3901265B2 (ja) * 1996-11-26 2007-04-04 大陽日酸株式会社 薄板状基体の搬送方法及び搬送装置
JP2002181714A (ja) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd 薄板検査装置
JP4183525B2 (ja) * 2003-02-14 2008-11-19 シーケーディ株式会社 薄板の搬送用支持装置
JP4732716B2 (ja) * 2004-06-29 2011-07-27 株式会社アルバック 搬送装置及びその制御方法並びに真空処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006036471A (ja) * 2004-07-28 2006-02-09 Shinko Electric Co Ltd 基板の受渡し方法、及びその装置
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置
JP2006258727A (ja) * 2005-03-18 2006-09-28 Olympus Corp 基板検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010120759A (ja) * 2008-11-20 2010-06-03 Ihi Corp 浮上搬送装置及び浮上ユニット

Also Published As

Publication number Publication date
CN101711219A (zh) 2010-05-19
JP5332142B2 (ja) 2013-11-06
JP2009012873A (ja) 2009-01-22
KR20100018615A (ko) 2010-02-17
TWI445654B (zh) 2014-07-21
KR101214888B1 (ko) 2012-12-24
CN101711219B (zh) 2013-02-13
TW200920674A (en) 2009-05-16

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