KR101186348B1 - 기판 반송 장치 - Google Patents

기판 반송 장치 Download PDF

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Publication number
KR101186348B1
KR101186348B1 KR1020107010965A KR20107010965A KR101186348B1 KR 101186348 B1 KR101186348 B1 KR 101186348B1 KR 1020107010965 A KR1020107010965 A KR 1020107010965A KR 20107010965 A KR20107010965 A KR 20107010965A KR 101186348 B1 KR101186348 B1 KR 101186348B1
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KR
South Korea
Prior art keywords
unit
substrate
conveyance
conveying
glass substrate
Prior art date
Application number
KR1020107010965A
Other languages
English (en)
Korean (ko)
Other versions
KR20100069712A (ko
Inventor
마코토 후지요시
Original Assignee
히라따기꼬오 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 히라따기꼬오 가부시키가이샤 filed Critical 히라따기꼬오 가부시키가이샤
Publication of KR20100069712A publication Critical patent/KR20100069712A/ko
Application granted granted Critical
Publication of KR101186348B1 publication Critical patent/KR101186348B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B65G47/54—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another at least one of which is a roller-way
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Relays Between Conveyors (AREA)
KR1020107010965A 2008-01-17 2008-01-17 기판 반송 장치 KR101186348B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2008/050539 WO2009090743A1 (ja) 2008-01-17 2008-01-17 基板搬送装置

Publications (2)

Publication Number Publication Date
KR20100069712A KR20100069712A (ko) 2010-06-24
KR101186348B1 true KR101186348B1 (ko) 2012-09-26

Family

ID=40885153

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107010965A KR101186348B1 (ko) 2008-01-17 2008-01-17 기판 반송 장치

Country Status (5)

Country Link
JP (1) JP5006411B2 (zh)
KR (1) KR101186348B1 (zh)
CN (1) CN101842302B (zh)
TW (1) TWI484581B (zh)
WO (1) WO2009090743A1 (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009040555B4 (de) * 2009-09-08 2013-11-21 Grenzebach Maschinenbau Gmbh Verfahren und Vorrichtung zum Archivieren und /oder Zwischenlagern von Glasscheiben in Reinräumen
CN102280397A (zh) * 2010-06-10 2011-12-14 致茂电子(苏州)有限公司 一种晶圆输送分配装置及其方法
CN102807095B (zh) * 2011-05-31 2016-01-20 上海福耀客车玻璃有限公司 一种汽车玻璃包边流水线装置
CN105731044B (zh) * 2016-03-31 2018-08-17 苏州康博特液压升降机械有限公司 一种用于型材转送的接驳装置及接驳机
CN106185340A (zh) * 2016-08-29 2016-12-07 天能电池(芜湖)有限公司 蓄电池极板负压收片装置
JP6887616B2 (ja) * 2017-05-09 2021-06-16 日本電気硝子株式会社 ガラス板の搬送装置及びガラス板の製造方法
CN109279305A (zh) * 2018-08-27 2019-01-29 河北卓达建材研究院有限公司 一种用于墙板生产线模具输送的转弯机
US11673749B2 (en) * 2019-09-06 2023-06-13 Billco Manufacturing Incorporated Glass cutting line with automatic remnant storage and retrieval including cutting table with integrated squaring stop and Y-break breaking bar facilitating sub-plate cutting
CN112758387B (zh) * 2020-12-28 2021-10-29 广东鑫光智能系统有限公司 玻璃出库分拣装置及其方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100522664B1 (ko) 2003-03-24 2005-10-19 미쓰비시덴키 가부시키가이샤 기판반송 시스템

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4334190B2 (ja) * 2002-08-09 2009-09-30 大日本印刷株式会社 バッファ装置およびカラーフィルター製造ライン
JP2004155569A (ja) * 2002-11-08 2004-06-03 Daifuku Co Ltd 板状体の取り扱い設備
KR100618918B1 (ko) * 2005-04-12 2006-09-01 주식회사 디엠에스 적층형 기판 이송장치
WO2007029401A1 (ja) * 2005-09-02 2007-03-15 Hirata Corporation ワーク搬入出システム及び搬送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100522664B1 (ko) 2003-03-24 2005-10-19 미쓰비시덴키 가부시키가이샤 기판반송 시스템

Also Published As

Publication number Publication date
CN101842302B (zh) 2013-03-13
CN101842302A (zh) 2010-09-22
WO2009090743A1 (ja) 2009-07-23
JP5006411B2 (ja) 2012-08-22
TW200933800A (en) 2009-08-01
JPWO2009090743A1 (ja) 2011-05-26
TWI484581B (zh) 2015-05-11
KR20100069712A (ko) 2010-06-24

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