KR101174143B1 - 피연마물 유지용 캐리어 - Google Patents

피연마물 유지용 캐리어 Download PDF

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Publication number
KR101174143B1
KR101174143B1 KR1020050018955A KR20050018955A KR101174143B1 KR 101174143 B1 KR101174143 B1 KR 101174143B1 KR 1020050018955 A KR1020050018955 A KR 1020050018955A KR 20050018955 A KR20050018955 A KR 20050018955A KR 101174143 B1 KR101174143 B1 KR 101174143B1
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KR
South Korea
Prior art keywords
carrier
polishing
double
diamond
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020050018955A
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English (en)
Korean (ko)
Other versions
KR20060043488A (ko
Inventor
아키라 요시다
도시쿠니 시미즈
Original Assignee
스피드팜 가부시키가이샤
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Application filed by 스피드팜 가부시키가이샤 filed Critical 스피드팜 가부시키가이샤
Publication of KR20060043488A publication Critical patent/KR20060043488A/ko
Application granted granted Critical
Publication of KR101174143B1 publication Critical patent/KR101174143B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B24B41/067—Work supports, e.g. adjustable steadies radially supporting workpieces
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F7/00—Heating or cooling appliances for medical or therapeutic treatment of the human body
    • A61F7/007—Heating or cooling appliances for medical or therapeutic treatment of the human body characterised by electric heating
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/44—Detecting, measuring or recording for evaluating the integumentary system, e.g. skin, hair or nails
    • A61B5/441—Skin evaluation, e.g. for skin disorder diagnosis
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H23/00—Percussion or vibration massage, e.g. using supersonic vibration; Suction-vibration massage; Massage with moving diaphragms
    • A61H23/02—Percussion or vibration massage, e.g. using supersonic vibration; Suction-vibration massage; Massage with moving diaphragms with electric or magnetic drive
    • A61H23/0218—Percussion or vibration massage, e.g. using supersonic vibration; Suction-vibration massage; Massage with moving diaphragms with electric or magnetic drive with alternating magnetic fields producing a translating or oscillating movement
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F7/00—Heating or cooling appliances for medical or therapeutic treatment of the human body
    • A61F7/007—Heating or cooling appliances for medical or therapeutic treatment of the human body characterised by electric heating
    • A61F2007/0075—Heating or cooling appliances for medical or therapeutic treatment of the human body characterised by electric heating using a Peltier element, e.g. near the spot to be heated or cooled
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F7/00—Heating or cooling appliances for medical or therapeutic treatment of the human body
    • A61F2007/0086—Heating or cooling appliances for medical or therapeutic treatment of the human body with a thermostat
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F7/00—Heating or cooling appliances for medical or therapeutic treatment of the human body
    • A61F2007/0095—Heating or cooling appliances for medical or therapeutic treatment of the human body with a temperature indicator
    • A61F2007/0096—Heating or cooling appliances for medical or therapeutic treatment of the human body with a temperature indicator with a thermometer
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
    • A61H2201/01—Constructive details
    • A61H2201/0157—Constructive details portable
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
    • A61H2201/10—Characteristics of apparatus not provided for in the preceding codes with further special therapeutic means, e.g. electrotherapy, magneto therapy or radiation therapy, chromo therapy, infrared or ultraviolet therapy
    • A61H2201/105—Characteristics of apparatus not provided for in the preceding codes with further special therapeutic means, e.g. electrotherapy, magneto therapy or radiation therapy, chromo therapy, infrared or ultraviolet therapy with means for delivering media, e.g. drugs or cosmetics
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
    • A61H2201/16—Physical interface with patient
    • A61H2201/1683—Surface of interface
    • A61H2201/1685—Surface of interface interchangeable
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
    • A61H2201/50—Control means thereof
    • A61H2201/5007—Control means thereof computer controlled
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
    • A61H2201/50—Control means thereof
    • A61H2201/5023—Interfaces to the user
    • A61H2201/5043—Displays
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
    • A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
    • A61H2201/50—Control means thereof
    • A61H2201/5058—Sensors or detectors
    • A61H2201/5082—Temperature sensors

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • Mechanical Engineering (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Pain & Pain Management (AREA)
  • Dermatology (AREA)
  • Molecular Biology (AREA)
  • Biophysics (AREA)
  • Physics & Mathematics (AREA)
  • Epidemiology (AREA)
  • Surgery (AREA)
  • Physical Education & Sports Medicine (AREA)
  • Rehabilitation Therapy (AREA)
  • Vascular Medicine (AREA)
  • Pathology (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020050018955A 2004-03-09 2005-03-08 피연마물 유지용 캐리어 Expired - Lifetime KR101174143B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00066013 2004-03-09
JP2004066013A JP4113509B2 (ja) 2004-03-09 2004-03-09 被研磨物保持用キャリア

Publications (2)

Publication Number Publication Date
KR20060043488A KR20060043488A (ko) 2006-05-15
KR101174143B1 true KR101174143B1 (ko) 2012-08-14

Family

ID=34824559

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050018955A Expired - Lifetime KR101174143B1 (ko) 2004-03-09 2005-03-08 피연마물 유지용 캐리어

Country Status (4)

Country Link
US (2) US20050202758A1 (enExample)
EP (1) EP1574289B2 (enExample)
JP (1) JP4113509B2 (enExample)
KR (1) KR101174143B1 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006001340A1 (ja) * 2004-06-23 2006-01-05 Komatsu Denshi Kinzoku Kabushiki Kaisha 両面研磨用キャリアおよびその製造方法
JP2006303136A (ja) * 2005-04-20 2006-11-02 Shin Etsu Handotai Co Ltd 両面研磨装置用キャリア及びこれを用いた両面研磨装置並びに両面研磨方法
JP2008238287A (ja) * 2007-03-26 2008-10-09 Naoetsu Electronics Co Ltd 両面研磨装置用キャリア
KR100761446B1 (ko) 2007-06-04 2007-09-27 에스엠엘씨디(주) 웨이퍼 캐리어의 디엘씨코팅장치 및 웨이퍼 캐리어의 디엘씨코팅방법
DE102007049811B4 (de) 2007-10-17 2016-07-28 Peter Wolters Gmbh Läuferscheibe, Verfahren zur Beschichtung einer Läuferscheibe sowie Verfahren zur gleichzeitigen beidseitigen Material abtragenden Bearbeitung von Halbleiterscheiben
KR100898821B1 (ko) * 2007-11-29 2009-05-22 주식회사 실트론 웨이퍼 캐리어의 제조방법
JP4605233B2 (ja) * 2008-02-27 2011-01-05 信越半導体株式会社 両面研磨装置用キャリア及びこれを用いた両面研磨装置並びに両面研磨方法
JP5082113B2 (ja) * 2008-07-31 2012-11-28 トーカロ株式会社 被研磨物保持用キャリアおよびその製造方法
JP4858507B2 (ja) * 2008-07-31 2012-01-18 トーカロ株式会社 被研磨物保持用キャリア
JP5082116B2 (ja) * 2008-07-31 2012-11-28 トーカロ株式会社 被研磨物保持用非金属製キャリアの製造方法
JP5082114B2 (ja) * 2008-07-31 2012-11-28 トーカロ株式会社 被研磨物保持用キャリアの製造方法
JP5082115B2 (ja) * 2008-07-31 2012-11-28 トーカロ株式会社 被研磨物保持用キャリアおよびその製造方法
JP2010036288A (ja) * 2008-08-01 2010-02-18 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 研磨用治具
KR101534357B1 (ko) 2009-03-31 2015-07-06 도쿄엘렉트론가부시키가이샤 기판 지지 장치 및 기판 지지 방법
JP5452984B2 (ja) 2009-06-03 2014-03-26 不二越機械工業株式会社 ウェーハの両面研磨方法
JP5719833B2 (ja) 2010-03-29 2015-05-20 Hoya株式会社 情報記録媒体用ガラス基板の製造方法
JP6104668B2 (ja) * 2013-03-28 2017-03-29 Hoya株式会社 情報記録媒体用ガラス基板の製造方法、及びキャリア
JP2015181082A (ja) * 2015-04-28 2015-10-15 旭硝子株式会社 磁気記録媒体用ガラス基板
DE102017102887A1 (de) * 2016-12-22 2018-06-28 Euromicron Werkzeuge Gmbh Polierplatte, Poliervorrichtung und Verfahren zum Polieren von Lichtwellenleitern
DE102020101313B3 (de) 2020-01-21 2021-07-01 Lapmaster Wolters Gmbh Läuferscheibe, Doppelseitenbearbeitungsmaschine und Verfahren zum Bearbeiten mindestens eines Werkstücks in einer Doppelseitenbearbeitungsmaschine

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1110530A (ja) * 1997-06-25 1999-01-19 Shin Etsu Handotai Co Ltd 両面研磨用キャリア
JP2003025218A (ja) * 2001-07-13 2003-01-29 Tokyo Seimitsu Co Ltd ウエーハ研磨装置

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US5081421A (en) * 1990-05-01 1992-01-14 At&T Bell Laboratories In situ monitoring technique and apparatus for chemical/mechanical planarization endpoint detection
US5397428A (en) * 1991-12-20 1995-03-14 The University Of North Carolina At Chapel Hill Nucleation enhancement for chemical vapor deposition of diamond
US5308661A (en) * 1993-03-03 1994-05-03 The Regents Of The University Of California Pretreatment process for forming a smooth surface diamond film on a carbon-coated substrate
US5731046A (en) * 1994-01-18 1998-03-24 Qqc, Inc. Fabrication of diamond and diamond-like carbon coatings
US5707492A (en) * 1995-12-18 1998-01-13 Motorola, Inc. Metallized pad polishing process
JP2000246512A (ja) * 1998-12-28 2000-09-12 Ngk Spark Plug Co Ltd ダイヤモンド類被覆切削工具
DE19905737C2 (de) † 1999-02-11 2000-12-14 Wacker Siltronic Halbleitermat Verfahren zur Herstellung einer Halbleiterscheibe mit verbesserter Ebenheit
US6290584B1 (en) * 1999-08-13 2001-09-18 Speedfam-Ipec Corporation Workpiece carrier with segmented and floating retaining elements
US6203417B1 (en) † 1999-11-05 2001-03-20 Speedfam-Ipec Corporation Chemical mechanical polishing tool components with improved corrosion resistance
JP2001332609A (ja) * 2000-03-13 2001-11-30 Nikon Corp 基板保持装置及び露光装置
JP2001345297A (ja) * 2000-05-30 2001-12-14 Hitachi Ltd 半導体集積回路装置の製造方法及び研磨装置
TW458853B (en) * 2000-07-14 2001-10-11 Applied Materials Inc Diaphragm for a CMP machine
US6632127B1 (en) * 2001-03-07 2003-10-14 Jerry W. Zimmer Fixed abrasive planarization pad conditioner incorporating chemical vapor deposited polycrystalline diamond and method for making same
US6939206B2 (en) * 2001-03-12 2005-09-06 Asm Nutool, Inc. Method and apparatus of sealing wafer backside for full-face electrochemical plating
US6769973B2 (en) * 2001-05-31 2004-08-03 Samsung Electronics Co., Ltd. Polishing head of chemical mechanical polishing apparatus and polishing method using the same
DE10247200A1 (de) † 2002-10-10 2004-04-29 Wacker Siltronic Ag Verfahren zur gleichzeitig beidseitigen Material abtragenden Bearbeitung von Halbleiterscheiben
US6918824B2 (en) * 2003-09-25 2005-07-19 Novellus Systems, Inc. Uniform fluid distribution and exhaust system for a chemical-mechanical planarization device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1110530A (ja) * 1997-06-25 1999-01-19 Shin Etsu Handotai Co Ltd 両面研磨用キャリア
JP2003025218A (ja) * 2001-07-13 2003-01-29 Tokyo Seimitsu Co Ltd ウエーハ研磨装置

Also Published As

Publication number Publication date
EP1574289B2 (en) 2019-11-06
US20090203300A1 (en) 2009-08-13
EP1574289A3 (en) 2006-06-07
EP1574289B1 (en) 2012-10-17
EP1574289A2 (en) 2005-09-14
US20050202758A1 (en) 2005-09-15
KR20060043488A (ko) 2006-05-15
JP4113509B2 (ja) 2008-07-09
JP2005254351A (ja) 2005-09-22

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