KR101151686B1 - 번인 테스터 - Google Patents

번인 테스터 Download PDF

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Publication number
KR101151686B1
KR101151686B1 KR1020120020854A KR20120020854A KR101151686B1 KR 101151686 B1 KR101151686 B1 KR 101151686B1 KR 1020120020854 A KR1020120020854 A KR 1020120020854A KR 20120020854 A KR20120020854 A KR 20120020854A KR 101151686 B1 KR101151686 B1 KR 101151686B1
Authority
KR
South Korea
Prior art keywords
test
tester
semiconductor device
board
signal
Prior art date
Application number
KR1020120020854A
Other languages
English (en)
Korean (ko)
Inventor
이의원
최영배
Original Assignee
주식회사 유니테스트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 유니테스트 filed Critical 주식회사 유니테스트
Priority to KR1020120020854A priority Critical patent/KR101151686B1/ko
Application granted granted Critical
Publication of KR101151686B1 publication Critical patent/KR101151686B1/ko
Priority to TW102107005A priority patent/TWI485413B/zh
Priority to CN201310061443.7A priority patent/CN103293456B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2896—Testing of IC packages; Test features related to IC packages

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020120020854A 2012-02-29 2012-02-29 번인 테스터 KR101151686B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020120020854A KR101151686B1 (ko) 2012-02-29 2012-02-29 번인 테스터
TW102107005A TWI485413B (zh) 2012-02-29 2013-02-27 老化測試設備
CN201310061443.7A CN103293456B (zh) 2012-02-29 2013-02-27 老化测试设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120020854A KR101151686B1 (ko) 2012-02-29 2012-02-29 번인 테스터

Publications (1)

Publication Number Publication Date
KR101151686B1 true KR101151686B1 (ko) 2012-06-14

Family

ID=46607214

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120020854A KR101151686B1 (ko) 2012-02-29 2012-02-29 번인 테스터

Country Status (3)

Country Link
KR (1) KR101151686B1 (zh)
CN (1) CN103293456B (zh)
TW (1) TWI485413B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101403907B1 (ko) 2014-04-11 2014-06-10 주식회사 큐펌 반도체 소자의 고속주파수 번인검사 시스템
KR101498523B1 (ko) * 2014-03-28 2015-03-05 주식회사 유니테스트 번인 테스트용 테스트 보드

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108535556B (zh) 2017-03-02 2021-01-22 台达电子工业股份有限公司 复合式产品测试系统及其测试方法
TWI631441B (zh) * 2017-03-02 2018-08-01 台達電子工業股份有限公司 複合式產品測試系統及其測試方法
CN111051902B (zh) * 2017-07-25 2022-05-27 皇虎科技(加拿大)有限公司 集成电路装置上自动老化测试的系统和方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001013203A (ja) 1999-06-29 2001-01-19 Mitsubishi Electric Corp 半導体記憶装置のテスト方法、テスト制御装置および半導体記憶装置
JP2003035750A (ja) 2001-07-25 2003-02-07 Ando Electric Co Ltd 半導体集積回路試験装置及び試験用ボード並びに半導体集積回路試験方法
KR20050007448A (ko) * 2002-06-13 2005-01-18 가부시키가이샤 무라타 세이사쿠쇼 모듈 테스팅 장치
KR20080109265A (ko) * 2007-06-12 2008-12-17 주식회사 유니테스트 반도체 소자 테스트 장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW369692B (en) * 1997-12-26 1999-09-11 Samsung Electronics Co Ltd Test and burn-in apparatus, in-line system using the apparatus, and test method using the system
JP4263810B2 (ja) * 1998-06-24 2009-05-13 株式会社アドバンテスト 半導体メモリ試験装置及び試験方法
EP1355443A1 (en) * 2002-08-02 2003-10-22 Agilent Technologies Inc. a Delaware Corporation Oversampling bit stream recovery
WO2007018020A1 (ja) * 2005-08-09 2007-02-15 Advantest Corporation 半導体試験装置
US8886987B2 (en) * 2008-09-19 2014-11-11 Advantest (Singapore) Pte Ltd Data processing unit and a method of processing data
TWI384237B (zh) * 2009-04-02 2013-02-01 King Yuan Electronics Co Ltd 可群組化測試之晶片預燒機台
CN201392373Y (zh) * 2009-04-30 2010-01-27 中国振华集团云科电子有限公司 贴片式电子元件老化测试设备

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001013203A (ja) 1999-06-29 2001-01-19 Mitsubishi Electric Corp 半導体記憶装置のテスト方法、テスト制御装置および半導体記憶装置
JP2003035750A (ja) 2001-07-25 2003-02-07 Ando Electric Co Ltd 半導体集積回路試験装置及び試験用ボード並びに半導体集積回路試験方法
KR20050007448A (ko) * 2002-06-13 2005-01-18 가부시키가이샤 무라타 세이사쿠쇼 모듈 테스팅 장치
KR20080109265A (ko) * 2007-06-12 2008-12-17 주식회사 유니테스트 반도체 소자 테스트 장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101498523B1 (ko) * 2014-03-28 2015-03-05 주식회사 유니테스트 번인 테스트용 테스트 보드
KR101403907B1 (ko) 2014-04-11 2014-06-10 주식회사 큐펌 반도체 소자의 고속주파수 번인검사 시스템

Also Published As

Publication number Publication date
TW201344211A (zh) 2013-11-01
CN103293456A (zh) 2013-09-11
CN103293456B (zh) 2016-03-09
TWI485413B (zh) 2015-05-21

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