KR101109916B1 - 마이크로폰 감지 소자 및 그 형성 방법 - Google Patents

마이크로폰 감지 소자 및 그 형성 방법 Download PDF

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Publication number
KR101109916B1
KR101109916B1 KR1020077011994A KR20077011994A KR101109916B1 KR 101109916 B1 KR101109916 B1 KR 101109916B1 KR 1020077011994 A KR1020077011994 A KR 1020077011994A KR 20077011994 A KR20077011994 A KR 20077011994A KR 101109916 B1 KR101109916 B1 KR 101109916B1
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KR
South Korea
Prior art keywords
diaphragm
substrate
delete delete
sensing element
microphone sensing
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KR1020077011994A
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English (en)
Korean (ko)
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KR20070104522A (ko
Inventor
제 왕
유보 미아오
Original Assignee
산동 겟탑 어쿠스틱 캄파니 리미티드
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Publication of KR20070104522A publication Critical patent/KR20070104522A/ko
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R25/00—Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Pressure Sensors (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
KR1020077011994A 2004-10-29 2004-11-29 마이크로폰 감지 소자 및 그 형성 방법 KR101109916B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/977,692 2004-10-29
US10/977,692 US7346178B2 (en) 2004-10-29 2004-10-29 Backplateless silicon microphone
PCT/SG2004/000385 WO2006046927A2 (fr) 2004-10-29 2004-11-29 Microphone silicium sans plaque arriere

Publications (2)

Publication Number Publication Date
KR20070104522A KR20070104522A (ko) 2007-10-26
KR101109916B1 true KR101109916B1 (ko) 2012-03-13

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ID=36228181

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Application Number Title Priority Date Filing Date
KR1020077011994A KR101109916B1 (ko) 2004-10-29 2004-11-29 마이크로폰 감지 소자 및 그 형성 방법

Country Status (6)

Country Link
US (2) US7346178B2 (fr)
JP (1) JP2008518549A (fr)
KR (1) KR101109916B1 (fr)
CN (2) CN101453682B (fr)
TW (1) TWI295543B (fr)
WO (1) WO2006046927A2 (fr)

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Also Published As

Publication number Publication date
US20080123878A1 (en) 2008-05-29
WO2006046927A3 (fr) 2006-10-19
JP2008518549A (ja) 2008-05-29
KR20070104522A (ko) 2007-10-26
CN101107879B (zh) 2012-01-25
US8045734B2 (en) 2011-10-25
CN101453682B (zh) 2013-09-11
CN101107879A (zh) 2008-01-16
TWI295543B (en) 2008-04-01
WO2006046927A2 (fr) 2006-05-04
TW200633561A (en) 2006-09-16
US20060093170A1 (en) 2006-05-04
CN101453682A (zh) 2009-06-10
US7346178B2 (en) 2008-03-18

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