CN101321408B - 内旋转梁振膜及其组成的传声器芯片 - Google Patents
内旋转梁振膜及其组成的传声器芯片 Download PDFInfo
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- CN101321408B CN101321408B CN 200710100243 CN200710100243A CN101321408B CN 101321408 B CN101321408 B CN 101321408B CN 200710100243 CN200710100243 CN 200710100243 CN 200710100243 A CN200710100243 A CN 200710100243A CN 101321408 B CN101321408 B CN 101321408B
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- internal rotation
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- rotation beam
- vibrating diaphragm
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- 239000000758 substrate Substances 0.000 claims abstract description 29
- 230000004888 barrier function Effects 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 239000012528 membrane Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000004411 aluminium Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 239000011574 phosphorus Substances 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 239000002210 silicon-based material Substances 0.000 claims description 3
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 238000005516 engineering process Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 239000003990 capacitor Substances 0.000 abstract description 3
- 239000011148 porous material Substances 0.000 abstract 1
- 238000010276 construction Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000005411 Van der Waals force Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Description
Claims (9)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200710100243 CN101321408B (zh) | 2007-06-06 | 2007-06-06 | 内旋转梁振膜及其组成的传声器芯片 |
US11/929,242 US8121315B2 (en) | 2007-03-21 | 2007-10-30 | Condenser microphone chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200710100243 CN101321408B (zh) | 2007-06-06 | 2007-06-06 | 内旋转梁振膜及其组成的传声器芯片 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101321408A CN101321408A (zh) | 2008-12-10 |
CN101321408B true CN101321408B (zh) | 2012-12-12 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200710100243 Active CN101321408B (zh) | 2007-03-21 | 2007-06-06 | 内旋转梁振膜及其组成的传声器芯片 |
Country Status (1)
Country | Link |
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CN (1) | CN101321408B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9107008B2 (en) | 2009-04-15 | 2015-08-11 | Knowles IPC(M) SDN BHD | Microphone with adjustable characteristics |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6465097B2 (ja) * | 2016-11-21 | 2019-02-06 | 横河電機株式会社 | 振動式トランスデューサ |
CN109788403B (zh) * | 2018-12-24 | 2020-07-24 | 歌尔股份有限公司 | 检测膜体、传感器及电子设备 |
CN117459868B (zh) * | 2023-12-11 | 2024-02-23 | 瑞声光电科技(常州)有限公司 | 麦克风芯片、微机电麦克风及终端设备 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5870482A (en) * | 1997-02-25 | 1999-02-09 | Knowles Electronics, Inc. | Miniature silicon condenser microphone |
CN1352515A (zh) * | 2001-12-07 | 2002-06-05 | 清华大学 | 单片集成电容式硅基微传声器及其制作工艺 |
US20060093170A1 (en) * | 2004-10-29 | 2006-05-04 | Altus Technologies Pte. Ltd. | Backplateless silicon microphone |
CN1968547A (zh) * | 2005-11-18 | 2007-05-23 | 青岛歌尔电子有限公司 | 硅传声器 |
CN201063850Y (zh) * | 2007-06-06 | 2008-05-21 | 歌尔声学股份有限公司 | 内旋转梁振膜及其组成的传声器芯片 |
-
2007
- 2007-06-06 CN CN 200710100243 patent/CN101321408B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5870482A (en) * | 1997-02-25 | 1999-02-09 | Knowles Electronics, Inc. | Miniature silicon condenser microphone |
CN1352515A (zh) * | 2001-12-07 | 2002-06-05 | 清华大学 | 单片集成电容式硅基微传声器及其制作工艺 |
US20060093170A1 (en) * | 2004-10-29 | 2006-05-04 | Altus Technologies Pte. Ltd. | Backplateless silicon microphone |
CN1968547A (zh) * | 2005-11-18 | 2007-05-23 | 青岛歌尔电子有限公司 | 硅传声器 |
CN201063850Y (zh) * | 2007-06-06 | 2008-05-21 | 歌尔声学股份有限公司 | 内旋转梁振膜及其组成的传声器芯片 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9107008B2 (en) | 2009-04-15 | 2015-08-11 | Knowles IPC(M) SDN BHD | Microphone with adjustable characteristics |
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Publication number | Publication date |
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CN101321408A (zh) | 2008-12-10 |
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Address after: 261031 Weifang Shandong high tech Zone East North Road head Patentee after: Goertek Inc. Address before: 261031 Weifang Shandong high tech Zone East North Road head Patentee before: Goertek Inc. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200615 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Weifang Shandong high tech Zone East North Road head Patentee before: GOERTEK Inc. |