IT1392742B1 - Trasduttore acustico integrato in tecnologia mems e relativo processo di fabbricazione - Google Patents

Trasduttore acustico integrato in tecnologia mems e relativo processo di fabbricazione

Info

Publication number
IT1392742B1
IT1392742B1 ITTO2008A000983A ITTO20080983A IT1392742B1 IT 1392742 B1 IT1392742 B1 IT 1392742B1 IT TO2008A000983 A ITTO2008A000983 A IT TO2008A000983A IT TO20080983 A ITTO20080983 A IT TO20080983A IT 1392742 B1 IT1392742 B1 IT 1392742B1
Authority
IT
Italy
Prior art keywords
processing
acoustic transducer
mems technology
integrated acoustic
relative process
Prior art date
Application number
ITTO2008A000983A
Other languages
English (en)
Inventor
Sebastiano Conti
Matteo Perletti
Original Assignee
St Microelectronics Rousset
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Rousset filed Critical St Microelectronics Rousset
Priority to ITTO2008A000983A priority Critical patent/IT1392742B1/it
Priority to US12/644,602 priority patent/US8942394B2/en
Publication of ITTO20080983A1 publication Critical patent/ITTO20080983A1/it
Application granted granted Critical
Publication of IT1392742B1 publication Critical patent/IT1392742B1/it

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/16—Mounting or tensioning of diaphragms or cones
    • H04R7/24—Tensioning by means acting directly on free portions of diaphragm or cone
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
ITTO2008A000983A 2008-12-23 2008-12-23 Trasduttore acustico integrato in tecnologia mems e relativo processo di fabbricazione IT1392742B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITTO2008A000983A IT1392742B1 (it) 2008-12-23 2008-12-23 Trasduttore acustico integrato in tecnologia mems e relativo processo di fabbricazione
US12/644,602 US8942394B2 (en) 2008-12-23 2009-12-22 Integrated acoustic transducer obtained using MEMS technology, and corresponding manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2008A000983A IT1392742B1 (it) 2008-12-23 2008-12-23 Trasduttore acustico integrato in tecnologia mems e relativo processo di fabbricazione

Publications (2)

Publication Number Publication Date
ITTO20080983A1 ITTO20080983A1 (it) 2010-06-24
IT1392742B1 true IT1392742B1 (it) 2012-03-16

Family

ID=41210373

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2008A000983A IT1392742B1 (it) 2008-12-23 2008-12-23 Trasduttore acustico integrato in tecnologia mems e relativo processo di fabbricazione

Country Status (2)

Country Link
US (1) US8942394B2 (it)
IT (1) IT1392742B1 (it)

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Also Published As

Publication number Publication date
US20100158279A1 (en) 2010-06-24
US8942394B2 (en) 2015-01-27
ITTO20080983A1 (it) 2010-06-24

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