JP6699854B2 - Mems素子 - Google Patents
Mems素子 Download PDFInfo
- Publication number
- JP6699854B2 JP6699854B2 JP2016050378A JP2016050378A JP6699854B2 JP 6699854 B2 JP6699854 B2 JP 6699854B2 JP 2016050378 A JP2016050378 A JP 2016050378A JP 2016050378 A JP2016050378 A JP 2016050378A JP 6699854 B2 JP6699854 B2 JP 6699854B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- film
- movable electrode
- fixed
- vibrating portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 125000006850 spacer group Chemical group 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 241000219793 Trifolium Species 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Images
Landscapes
- Micromachines (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Description
Claims (1)
- バックチャンバーを備えた基板と、該基板上に、スペーサーを挟んで固定電極を含む固定電極膜と可動電極を含む可動電極膜とが対向配置しているMEMS素子において、
前記可動電極膜は、前記スペーサーに固定された固定部と、該固定部に連続する振動部と、該振動部の振動を制御するスリットとを備え、
前記振動部は、前記固定部に連続する第1の振動部と、前記固定部側と反対側で前記第1の振動部に連続する第2の振動部とを備え、
前記第2の振動部は、前記固定電極膜側に突出する厚膜部を備え、該第2の振動部の前記可動電極により前記厚膜部の前記固定電極膜側の表面を被覆し、側面で前記第1の振動部に連続する前記第1の振動部より厚く、かつ一定の厚さの膜とし、
前記第2の振動部表面の前記可動電極が、前記第1の振動部表面より前記固定電極膜に近接して配置されていることを特徴とするMEMS素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016050378A JP6699854B2 (ja) | 2016-03-15 | 2016-03-15 | Mems素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016050378A JP6699854B2 (ja) | 2016-03-15 | 2016-03-15 | Mems素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017168945A JP2017168945A (ja) | 2017-09-21 |
JP6699854B2 true JP6699854B2 (ja) | 2020-05-27 |
Family
ID=59914149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016050378A Active JP6699854B2 (ja) | 2016-03-15 | 2016-03-15 | Mems素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6699854B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11765509B1 (en) | 2022-05-27 | 2023-09-19 | Aac Acoustic Technologies (Shenzhen) Co., Ltd. | MEMS device and electro-acoustic transducer |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005337774A (ja) * | 2004-05-25 | 2005-12-08 | Noritake Co Ltd | 静電容量式センサ |
JP2006242684A (ja) * | 2005-03-02 | 2006-09-14 | Toyota Central Res & Dev Lab Inc | 力検出センサと変換装置とその製造方法 |
JP2007210083A (ja) * | 2006-02-13 | 2007-08-23 | Hitachi Ltd | Mems素子及びその製造方法 |
JP4776691B2 (ja) * | 2006-09-28 | 2011-09-21 | 株式会社日立製作所 | 超音波探触子及び超音波撮像装置 |
JP5987572B2 (ja) * | 2012-09-11 | 2016-09-07 | オムロン株式会社 | 音響トランスデューサ |
-
2016
- 2016-03-15 JP JP2016050378A patent/JP6699854B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2017168945A (ja) | 2017-09-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10506345B2 (en) | System and method for a microphone | |
KR101578542B1 (ko) | 마이크로폰 제조 방법 | |
JP2009060600A (ja) | コンデンサマイクロホン | |
JP2019140638A (ja) | 圧電素子 | |
KR101550633B1 (ko) | 마이크로폰 및 그 제조 방법 | |
CN110149582A (zh) | 一种mems结构的制备方法 | |
JP6405276B2 (ja) | Mems素子およびその製造方法 | |
JP4737535B2 (ja) | コンデンサマイクロホン | |
JP6540160B2 (ja) | Mems素子 | |
JP6699854B2 (ja) | Mems素子 | |
US9961450B2 (en) | Piezoresistive microphone and method of fabricating the same | |
JP2021097302A (ja) | Mems素子 | |
US12069455B2 (en) | Process of fabricating lateral mode capacitive microphone including a capacitor plate with sandwich structure | |
JP2008244752A (ja) | 静電型圧力変換器 | |
EP3783915A1 (en) | Membrane support for dual backplate transducers | |
JP2008252854A (ja) | 静電型トランスデューサおよびその製造方法 | |
JP2015188947A (ja) | Mems素子 | |
JP6382032B2 (ja) | Mems素子 | |
KR101893486B1 (ko) | 강성 백플레이트 구조의 마이크로폰 및 그 마이크로폰 제조 방법 | |
JP6679044B2 (ja) | Mems素子 | |
JP6662509B2 (ja) | Mems素子 | |
JP2017073581A (ja) | Mems素子 | |
JP2008167277A (ja) | 音響トランスデューサ | |
JP2008259062A (ja) | 静電型トランスデューサ | |
JP6639042B2 (ja) | Mems素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190128 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20191118 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20191126 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200116 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200331 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200422 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6699854 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |