KR101052059B1 - 태양전지용 결정계 실리콘 기판의 표면처리방법 및 태양전지 제조방법 - Google Patents

태양전지용 결정계 실리콘 기판의 표면처리방법 및 태양전지 제조방법 Download PDF

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KR101052059B1
KR101052059B1 KR1020100092130A KR20100092130A KR101052059B1 KR 101052059 B1 KR101052059 B1 KR 101052059B1 KR 1020100092130 A KR1020100092130 A KR 1020100092130A KR 20100092130 A KR20100092130 A KR 20100092130A KR 101052059 B1 KR101052059 B1 KR 101052059B1
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South Korea
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surface treatment
treatment step
substrate
unevenness
etching
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KR1020100092130A
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English (en)
Korean (ko)
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김병준
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김병준
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0236—Special surface textures
    • H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photovoltaic Devices (AREA)
  • Weting (AREA)
KR1020100092130A 2010-04-14 2010-09-17 태양전지용 결정계 실리콘 기판의 표면처리방법 및 태양전지 제조방법 KR101052059B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20100034501 2010-04-14
KR1020100034501 2010-04-14

Related Child Applications (1)

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KR1020100114477A Division KR20110115068A (ko) 2010-04-14 2010-11-17 태양전지용 결정계 실리콘 기판의 표면처리방법 및 태양전지 제조방법

Publications (1)

Publication Number Publication Date
KR101052059B1 true KR101052059B1 (ko) 2011-07-27

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Application Number Title Priority Date Filing Date
KR1020100092130A KR101052059B1 (ko) 2010-04-14 2010-09-17 태양전지용 결정계 실리콘 기판의 표면처리방법 및 태양전지 제조방법
KR1020100114477A KR20110115068A (ko) 2010-04-14 2010-11-17 태양전지용 결정계 실리콘 기판의 표면처리방법 및 태양전지 제조방법
KR1020100130429A KR101630802B1 (ko) 2010-04-14 2010-12-20 태양전지소자의 제조방법 및 그 방법에 의하여 제조된 태양전지소자

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KR1020100114477A KR20110115068A (ko) 2010-04-14 2010-11-17 태양전지용 결정계 실리콘 기판의 표면처리방법 및 태양전지 제조방법
KR1020100130429A KR101630802B1 (ko) 2010-04-14 2010-12-20 태양전지소자의 제조방법 및 그 방법에 의하여 제조된 태양전지소자

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KR (3) KR101052059B1 (zh)
CN (3) CN102222719B (zh)
TW (1) TWI451586B (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101145472B1 (ko) * 2010-11-29 2012-05-15 현대중공업 주식회사 태양전지의 제조방법
CN106960882A (zh) * 2017-03-20 2017-07-18 河北盛平电子科技有限公司 一种表面金属化陶瓷立方体和制作方法
CN108091557A (zh) * 2017-11-29 2018-05-29 江苏彩虹永能新能源有限公司 一种太阳能电池背面刻蚀工艺

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012213793B3 (de) * 2012-08-03 2013-10-24 Solarworld Innovations Gmbh Untersuchung eines Siliziumsubstrats für eine Solarzelle
KR101976420B1 (ko) * 2013-03-06 2019-05-09 엘지전자 주식회사 태양 전지 및 이의 제조 방법
KR102027138B1 (ko) * 2013-07-02 2019-10-01 성균관대학교산학협력단 멀티 스케일의 요철이 형성된 태양 전지 기판의 제조방법 및 이를 이용한 태양 전지
CN105161575A (zh) * 2015-09-30 2015-12-16 江苏盎华光伏工程技术研究中心有限公司 一种硅片的预处理方法、硅片和太阳能电池片
CN105405931A (zh) * 2015-12-23 2016-03-16 浙江晶科能源有限公司 一种太阳能电池及其制作方法
KR20190068352A (ko) * 2017-12-08 2019-06-18 삼성에스디아이 주식회사 태양전지 셀

Citations (4)

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KR20050086223A (ko) * 2004-02-25 2005-08-30 삼성에스디아이 주식회사 태양전지용 실리콘 기판 및 실리콘 기판 텍스처링 방법과그 장치
JP2006202831A (ja) 2005-01-18 2006-08-03 Sharp Corp 結晶シリコンウエハ、結晶シリコン太陽電池、結晶シリコンウエハの製造方法および結晶シリコン太陽電池の製造方法
KR20100013649A (ko) * 2008-07-31 2010-02-10 삼성전자주식회사 광전소자 및 이의 제조 방법
KR20100030090A (ko) * 2008-09-09 2010-03-18 주성엔지니어링(주) 태양전지와 그의 제조 방법 및 제조 장치

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Publication number Priority date Publication date Assignee Title
JP3772456B2 (ja) * 1997-04-23 2006-05-10 三菱電機株式会社 太陽電池及びその製造方法、半導体製造装置
JP2000101111A (ja) * 1998-09-17 2000-04-07 Sharp Corp 太陽電池の製造方法
DE10150040A1 (de) * 2001-10-10 2003-04-17 Merck Patent Gmbh Kombinierte Ätz- und Dotiermedien
JP5226255B2 (ja) * 2007-07-13 2013-07-03 シャープ株式会社 太陽電池の製造方法
KR101088280B1 (ko) * 2007-10-24 2011-11-30 미쓰비시덴키 가부시키가이샤 태양전지의 제조 방법
CN101613884B (zh) * 2009-04-02 2011-09-07 常州天合光能有限公司 多晶硅酸法制绒工艺

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050086223A (ko) * 2004-02-25 2005-08-30 삼성에스디아이 주식회사 태양전지용 실리콘 기판 및 실리콘 기판 텍스처링 방법과그 장치
JP2006202831A (ja) 2005-01-18 2006-08-03 Sharp Corp 結晶シリコンウエハ、結晶シリコン太陽電池、結晶シリコンウエハの製造方法および結晶シリコン太陽電池の製造方法
KR20100013649A (ko) * 2008-07-31 2010-02-10 삼성전자주식회사 광전소자 및 이의 제조 방법
KR20100030090A (ko) * 2008-09-09 2010-03-18 주성엔지니어링(주) 태양전지와 그의 제조 방법 및 제조 장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101145472B1 (ko) * 2010-11-29 2012-05-15 현대중공업 주식회사 태양전지의 제조방법
CN106960882A (zh) * 2017-03-20 2017-07-18 河北盛平电子科技有限公司 一种表面金属化陶瓷立方体和制作方法
CN108091557A (zh) * 2017-11-29 2018-05-29 江苏彩虹永能新能源有限公司 一种太阳能电池背面刻蚀工艺

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Publication number Publication date
CN102222723B (zh) 2014-04-30
TW201135956A (en) 2011-10-16
KR101630802B1 (ko) 2016-06-15
TWI451586B (zh) 2014-09-01
KR20110115068A (ko) 2011-10-20
CN102222719B (zh) 2013-10-16
CN102222723A (zh) 2011-10-19
KR20110115071A (ko) 2011-10-20
CN102222721B (zh) 2013-12-25
CN102222721A (zh) 2011-10-19
CN102222719A (zh) 2011-10-19

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