CN101613884B - 多晶硅酸法制绒工艺 - Google Patents
多晶硅酸法制绒工艺 Download PDFInfo
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- CN101613884B CN101613884B CN2009100297144A CN200910029714A CN101613884B CN 101613884 B CN101613884 B CN 101613884B CN 2009100297144 A CN2009100297144 A CN 2009100297144A CN 200910029714 A CN200910029714 A CN 200910029714A CN 101613884 B CN101613884 B CN 101613884B
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- silicon
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- 238000000034 method Methods 0.000 title claims abstract description 18
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 11
- 239000002253 acid Substances 0.000 title claims abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 22
- 239000010703 silicon Substances 0.000 claims abstract description 22
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000005507 spraying Methods 0.000 claims abstract description 8
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000011259 mixed solution Substances 0.000 claims abstract description 6
- 229910017604 nitric acid Inorganic materials 0.000 claims abstract description 6
- 238000005530 etching Methods 0.000 claims abstract description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 5
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 5
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 5
- 239000002245 particle Substances 0.000 claims description 10
- 235000008216 herbs Nutrition 0.000 claims description 9
- 210000002268 wool Anatomy 0.000 claims description 9
- 238000005516 engineering process Methods 0.000 claims description 4
- 229960001866 silicon dioxide Drugs 0.000 claims description 4
- 239000011241 protective layer Substances 0.000 claims description 3
- 238000002310 reflectometry Methods 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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CN2009100297144A CN101613884B (zh) | 2009-04-02 | 2009-04-02 | 多晶硅酸法制绒工艺 |
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CN2009100297144A CN101613884B (zh) | 2009-04-02 | 2009-04-02 | 多晶硅酸法制绒工艺 |
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CN101613884A CN101613884A (zh) | 2009-12-30 |
CN101613884B true CN101613884B (zh) | 2011-09-07 |
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CN2009100297144A Active CN101613884B (zh) | 2009-04-02 | 2009-04-02 | 多晶硅酸法制绒工艺 |
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Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102222719B (zh) * | 2010-04-14 | 2013-10-16 | 圆益Ips股份有限公司 | 太阳能电池用结晶系硅基板的表面处理方法及太阳能电池的制造方法 |
CN101976704B (zh) * | 2010-07-28 | 2013-05-15 | 常州天合光能有限公司 | 一种激光与酸刻蚀结合的制绒工艺 |
CN102400226B (zh) * | 2010-09-16 | 2014-12-17 | 上海神舟新能源发展有限公司 | 一种多晶硅太阳能电池的制绒液 |
CN102181940B (zh) * | 2011-04-08 | 2012-07-18 | 光为绿色新能源股份有限公司 | 一种多晶硅绒面的制备方法 |
CN104009125B (zh) * | 2014-06-08 | 2016-07-06 | 邬时伟 | 多晶硅片的制绒工艺 |
CN104073883A (zh) * | 2014-06-11 | 2014-10-01 | 邬时伟 | 多晶硅太阳能电池片的制绒工艺 |
CN104485386B (zh) * | 2014-11-21 | 2017-05-31 | 广东爱康太阳能科技有限公司 | 一种多晶硅太阳能电池的制绒方法 |
CN106920864A (zh) * | 2017-03-30 | 2017-07-04 | 朱胜利 | 一种多晶硅片的遮蔽式表面制绒处理方法 |
CN111139076B (zh) * | 2018-11-06 | 2021-04-16 | 中国科学院电工研究所 | 一种化学腐蚀液在硅片表面制绒中的应用 |
CN109888030B (zh) * | 2019-03-04 | 2020-12-29 | 常州时创能源股份有限公司 | 晶体硅表面类倒金字塔绒面结构的制备方法 |
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2009
- 2009-04-02 CN CN2009100297144A patent/CN101613884B/zh active Active
Non-Patent Citations (1)
Title |
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安静.硅片在HF/HNO3/H2O体系中酸腐蚀的研究.《中国优秀硕士学位论文全文数据库 工程科技I辑》.2008,(第6期),16. * |
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Address after: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Patentee after: TRINASOLAR Co.,Ltd. Address before: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Patentee before: trina solar Ltd. |
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Address after: Solar photovoltaic industry park Tianhe Road 213031 north of Jiangsu Province, Changzhou City, No. 2 Patentee after: trina solar Ltd. Address before: 213031, No. 2, Tianhe Road, Xinbei Industrial Park, Jiangsu, Changzhou Patentee before: CHANGZHOU TRINA SOLAR ENERGY Co.,Ltd. |
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