KR101042652B1 - 전자부품 시험장치 - Google Patents

전자부품 시험장치 Download PDF

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Publication number
KR101042652B1
KR101042652B1 KR1020087028998A KR20087028998A KR101042652B1 KR 101042652 B1 KR101042652 B1 KR 101042652B1 KR 1020087028998 A KR1020087028998 A KR 1020087028998A KR 20087028998 A KR20087028998 A KR 20087028998A KR 101042652 B1 KR101042652 B1 KR 101042652B1
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KR
South Korea
Prior art keywords
test
tray
electronic component
rows
trays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020087028998A
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English (en)
Korean (ko)
Other versions
KR20090015938A (ko
Inventor
코야 카리노
요시히토 고바야시
카즈유키 야마시타
아키히코 이또
Original Assignee
가부시키가이샤 아드반테스트
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Application filed by 가부시키가이샤 아드반테스트 filed Critical 가부시키가이샤 아드반테스트
Publication of KR20090015938A publication Critical patent/KR20090015938A/ko
Application granted granted Critical
Publication of KR101042652B1 publication Critical patent/KR101042652B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020087028998A 2006-05-18 2006-05-18 전자부품 시험장치 Expired - Fee Related KR101042652B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/309955 WO2007135710A1 (ja) 2006-05-18 2006-05-18 電子部品試験装置

Publications (2)

Publication Number Publication Date
KR20090015938A KR20090015938A (ko) 2009-02-12
KR101042652B1 true KR101042652B1 (ko) 2011-06-20

Family

ID=38723025

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087028998A Expired - Fee Related KR101042652B1 (ko) 2006-05-18 2006-05-18 전자부품 시험장치

Country Status (3)

Country Link
KR (1) KR101042652B1 (https=)
TW (1) TW200804839A (https=)
WO (1) WO2007135710A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101156962B1 (ko) * 2008-07-08 2012-06-20 가부시키가이샤 아드반테스트 전자부품 시험방법, 인서트, 트레이 및 전자부품 시험장치
JPWO2010146709A1 (ja) * 2009-06-19 2012-11-29 株式会社アドバンテスト 電子部品移載装置及び電子部品の移載方法
WO2010146708A1 (ja) * 2009-06-19 2010-12-23 株式会社アドバンテスト 電子部品移載装置及びそれを備えた電子部品試験装置
JP7561534B2 (ja) * 2020-07-21 2024-10-04 株式会社アドバンテスト 電子部品ハンドリング装置及び電子部品試験装置
KR102860384B1 (ko) * 2024-11-29 2025-09-18 주식회사 아테코 테스트 핸들러의 랏 엔드시 적용되는 제어방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100312093B1 (ko) * 1997-07-02 2001-11-03 오우라 히로시 반도체 디바이스 시험장치 및 그 시험장치에 사용되는 테스트 트레이

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000065895A (ja) * 1998-08-24 2000-03-03 Ando Electric Co Ltd オートハンドラおよびオートハンドラのキャリアの搬送方法
JP4109368B2 (ja) * 1999-01-14 2008-07-02 株式会社アドバンテスト 電子部品試験装置用マッチプレート
JP3813772B2 (ja) * 1999-09-27 2006-08-23 株式会社ルネサステクノロジ 半導体装置の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100312093B1 (ko) * 1997-07-02 2001-11-03 오우라 히로시 반도체 디바이스 시험장치 및 그 시험장치에 사용되는 테스트 트레이

Also Published As

Publication number Publication date
TWI327224B (https=) 2010-07-11
WO2007135710A1 (ja) 2007-11-29
TW200804839A (en) 2008-01-16
KR20090015938A (ko) 2009-02-12

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