KR101005031B1 - 유체혼합시스템 및 유체혼합장치 - Google Patents

유체혼합시스템 및 유체혼합장치 Download PDF

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KR101005031B1
KR101005031B1 KR1020080084568A KR20080084568A KR101005031B1 KR 101005031 B1 KR101005031 B1 KR 101005031B1 KR 1020080084568 A KR1020080084568 A KR 1020080084568A KR 20080084568 A KR20080084568 A KR 20080084568A KR 101005031 B1 KR101005031 B1 KR 101005031B1
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KR
South Korea
Prior art keywords
gas
flow rate
fluid
fluid mixing
duty ratio
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KR1020080084568A
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English (en)
Korean (ko)
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KR20090023230A (ko
Inventor
카츠토시 이토
야스노리 니시무라
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씨케이디 가부시키 가이샤
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Publication of KR20090023230A publication Critical patent/KR20090023230A/ko
Application granted granted Critical
Publication of KR101005031B1 publication Critical patent/KR101005031B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
    • G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86389—Programmer or timer
    • Y10T137/86445—Plural, sequential, valve actuations
    • Y10T137/86461—Variable cycle
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Accessories For Mixers (AREA)
KR1020080084568A 2007-08-31 2008-08-28 유체혼합시스템 및 유체혼합장치 KR101005031B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007226913A JP5001757B2 (ja) 2007-08-31 2007-08-31 流体混合システム及び流体混合装置
JPJP-P-2007-00226913 2007-08-31

Publications (2)

Publication Number Publication Date
KR20090023230A KR20090023230A (ko) 2009-03-04
KR101005031B1 true KR101005031B1 (ko) 2010-12-30

Family

ID=40407256

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080084568A KR101005031B1 (ko) 2007-08-31 2008-08-28 유체혼합시스템 및 유체혼합장치

Country Status (4)

Country Link
US (1) US8201989B2 (zh)
JP (1) JP5001757B2 (zh)
KR (1) KR101005031B1 (zh)
CN (1) CN101376088B (zh)

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US8418732B2 (en) * 2011-07-06 2013-04-16 Air Products And Chemicals, Inc. Blending compressed gases
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
DE102012001267A1 (de) * 2012-01-23 2013-07-25 Carl Zeiss Microscopy Gmbh Partikelstrahlsystem mit Zuführung von Prozessgas zu einem Bearbeitungsort
DE102012003278A1 (de) * 2012-02-20 2013-08-22 Bürkert Werke GmbH Gasmischer
US9004107B2 (en) * 2012-08-21 2015-04-14 Applied Materials, Inc. Methods and apparatus for enhanced gas flow rate control
EP2740528B1 (en) * 2012-12-10 2015-11-04 Gometrics S.L. Gas mixer
FR3021879B1 (fr) * 2014-06-04 2021-04-30 World Aero Techno Trend Watt Dispositif de melange d'un gaz traceur avec un gaz porteur et procede de melange prevoyant un tel dispositif de melange
CN104142695A (zh) * 2014-07-02 2014-11-12 苏州宏瑞净化科技有限公司 一种合流式气体流量控制装置
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
CN106064026A (zh) * 2016-07-26 2016-11-02 液化空气（中国）研发有限公司 多元气体混配系统
WO2018123193A1 (ja) * 2016-12-28 2018-07-05 オルガノ株式会社 希釈液製造装置および希釈液製造方法
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
JP7296854B2 (ja) * 2019-11-07 2023-06-23 東京エレクトロン株式会社 ガス供給方法及び基板処理装置
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly

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JP2006272323A (ja) * 2005-03-04 2006-10-12 Able Corp ガス混合装置及びガス混合方法
JP2007175691A (ja) * 2005-12-02 2007-07-12 Asahi Organic Chem Ind Co Ltd 流体混合装置

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JP2007175691A (ja) * 2005-12-02 2007-07-12 Asahi Organic Chem Ind Co Ltd 流体混合装置

Also Published As

Publication number Publication date
KR20090023230A (ko) 2009-03-04
CN101376088B (zh) 2012-12-26
JP2009056411A (ja) 2009-03-19
JP5001757B2 (ja) 2012-08-15
CN101376088A (zh) 2009-03-04
US8201989B2 (en) 2012-06-19
US20090059717A1 (en) 2009-03-05

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