KR100985272B1 - 집적 회로에 적용하기 위한 혼성 유기-무기 유전체를 위한폴리(유기실록산) 물질 및 방법 - Google Patents

집적 회로에 적용하기 위한 혼성 유기-무기 유전체를 위한폴리(유기실록산) 물질 및 방법 Download PDF

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KR100985272B1
KR100985272B1 KR1020047011109A KR20047011109A KR100985272B1 KR 100985272 B1 KR100985272 B1 KR 100985272B1 KR 1020047011109 A KR1020047011109 A KR 1020047011109A KR 20047011109 A KR20047011109 A KR 20047011109A KR 100985272 B1 KR100985272 B1 KR 100985272B1
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KR20040075089A (ko
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주하 란타라
제이슨 레이드
테무 토르마넨
눈가바람 선다람 비스와나탄
아토 엘. 티. 마니넨
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질렉스 오와이
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KR1020047011109A 2002-01-17 2003-01-17 집적 회로에 적용하기 위한 혼성 유기-무기 유전체를 위한폴리(유기실록산) 물질 및 방법 KR100985272B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US34995502P 2002-01-17 2002-01-17
US60/349,955 2002-01-17
US39541802P 2002-07-13 2002-07-13
US60/395,418 2002-07-13
US41457802P 2002-09-27 2002-09-27
US60/414,578 2002-09-27
PCT/US2003/001490 WO2003063205A2 (en) 2002-01-17 2003-01-17 Poly(organosiloxane) materials and methods for hybrid organic-inorganic dielectrics for integrated circuit applications

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KR20040075089A KR20040075089A (ko) 2004-08-26
KR100985272B1 true KR100985272B1 (ko) 2010-10-04

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US (4) US6974970B2 (US07060634-20060613-C00009.png)
EP (1) EP1490454B1 (US07060634-20060613-C00009.png)
JP (1) JP4495464B2 (US07060634-20060613-C00009.png)
KR (1) KR100985272B1 (US07060634-20060613-C00009.png)
AU (1) AU2003216067A1 (US07060634-20060613-C00009.png)
WO (1) WO2003063205A2 (US07060634-20060613-C00009.png)

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