KR100960773B1 - 처리 장비용 더블 이중 슬롯 로드록 - Google Patents
처리 장비용 더블 이중 슬롯 로드록 Download PDFInfo
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- KR100960773B1 KR100960773B1 KR1020067002408A KR20067002408A KR100960773B1 KR 100960773 B1 KR100960773 B1 KR 100960773B1 KR 1020067002408 A KR1020067002408 A KR 1020067002408A KR 20067002408 A KR20067002408 A KR 20067002408A KR 100960773 B1 KR100960773 B1 KR 100960773B1
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- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67098—Apparatus for thermal treatment
Abstract
Description
Claims (31)
- 시스템의 생산성을 향상시키기 위해 처리 시스템 내의 기판을 처리하는 방법으로서,제 1 기판을 대기 상태로부터 고정 로드록 챔버를 통해 전달 챔버로 이동시키는 단계,상기 고정 로드록 챔버는 수직 관계로 배치된 두 개의 고립된 로드록 영역을 포함하고, 상기 로드록 영역 각각은 두 개의 기판 슬롯을 포함하며,제 1 기판을 대기 상태로부터 전달 챔버로 이동시키는 상기 단계는,상기 제 1 기판을 상기 대기 상태로부터 상기 로드록 영역 중 한 영역의 제 1 기판 슬롯 내로 이동시키고 제 2 기판을 로드록 영역 중 상기 한 영역의 제 2 기판 슬롯으로부터 대기 상태로 이동시키는 단계와,제 3 기판을 상기 로드록 영역 중 나머지 영역의 제 1 기판 슬롯으로부터 상기 전달 챔버로 이동시키고, 제 4 기판을 상기 전달 챔버로부터 상기 나머지 영역의 제 2 기판 슬롯으로 이동시키는 단계와,후속적으로 로드록 영역 중 상기 한 영역이 언로딩을 위해 진공 상태에 있을 때 상기 제 1 기판을 상기 한 영역으로부터 상기 전달 챔버로 언로딩하는 단계를 포함하고,상기 제 1 기판을 상기 전달 챔버로부터 상기 전달 챔버 주위에 배치된 하나 이상의 처리 챔버로 이동시키는 단계,상기 제 1 기판을 상기 하나 이상의 처리 챔버 내에서 처리하는 단계, 및상기 제 1 기판을 상기 하나 이상의 처리 챔버로부터 상기 로드록 챔버를 통해 상기 대기 상태로 이동시키는 단계를 포함하는,기판 처리 방법.
- 제 1 항에 있어서,상기 제 1 기판을 상기 전달 챔버로 이동시키기 전에 로드록 영역 중 상기 한 영역 내에 있는 상기 기판 슬롯 중 한 슬롯 상의 상기 제 1 기판을 가열하는 단계를 더 포함하는,기판 처리 방법.
- 제 1 항에 있어서,상기 제 2 기판을 상기 대기 상태로 이동시키기 전에 상기 로드록 챔버 내에 있는 상기 기판 슬롯 중 한 슬롯 상의 상기 제 2 기판을 냉각시키는 단계를 더 포함하는,기판 처리 방법.
- 제 1 항에 있어서,상기 로드록 영역 중 상기 한 영역 내의 제 1 기판 슬롯 상의 상기 제 1 기판을 상기 전달 챔버로 언로딩하기 전에 상기 제 1 기판을 가열하는 단계와 상기 한 영역 내의 상기 제 2 기판 슬롯 상의 상기 제 2 기판을 상기 대기 상태로 이동시키기 전에 상기 제 2 기판을 냉각시키는 단계를 더 포함하는,기판 처리 방법.
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- 시스템의 생산성을 향상시키기 위해 처리 시스템 내의 기판을 처리하는 방법으로서,제 1 기판을 대기 상태로부터 고정 로드록 챔버를 통해 전달 챔버로 이동시키는 단계,상기 고정 로드록 챔버는 수직 관계로 배치된 두 개의 로드록 영역을 포함하고, 상기 로드록 영역 각각은 두 개의 기판 슬롯 및 이동식 냉각 플레이트를 포함하며,제 1 기판을 대기 상태로부터 전달 챔버로 이동시키는 상기 단계는,상기 제 1 기판을 상기 대기 상태로부터 상기 로드록 영역 중 한 영역의 제 1 기판 슬롯 내로 이동시키고 제 2 기판을 로드록 영역 중 상기 한 영역의 제 2 기판 슬롯으로부터 대기 상태로 이동시키는 단계와,제 3 기판을 상기 로드록 영역 중 나머지 영역의 제 1 기판 슬롯으로부터 상기 전달 챔버로 이동시키고, 제 4 기판을 상기 전달 챔버로부터 상기 나머지 영역의 제 2 기판 슬롯으로 이동시키는 단계와,후속적으로 상기 로드록 영역 중 상기 한 영역이 언로딩을 위해 진공 상태에 있을 때 상기 제 1 기판을 상기 한 영역으로부터 상기 전달 챔버로 언로딩하는 단계를 포함하고,상기 제 1 기판을 상기 전달 챔버로부터 상기 전달 챔버 주위에 배치된 하나 이상의 처리 챔버로 이동시키는 단계,상기 제 1 기판을 상기 하나 이상의 처리 챔버 내에서 처리하는 단계, 및상기 제 1 기판을 상기 하나 이상의 처리 챔버로부터 상기 로드록 챔버를 통해 상기 대기 상태로 이동시키는 단계를 포함하는,기판 처리 방법.
- 제 13 항에 있어서,상기 제 1 기판을 상기 전달 챔버로 이동시키기 전에 로드록 영역 중 상기 한 영역 내에 있는 상기 기판 슬롯 중 한 슬롯 내의 상기 제 1 기판을 가열하는 단계를 더 포함하는,기판 처리 방법.
- 제 13 항에 있어서,상기 제 2 기판을 상기 대기 상태로 이동시키기 전에 상기 로드록 챔버 내에 있는 상기 기판 슬롯 중 한 슬롯 내의 상기 제 2 기판을 냉각시키는 단계를 더 포함하는,기판 처리 방법.
- 제 13 항에 있어서,상기 제 1 기판을 상기 전달 챔버로 이동시키기 전에 상기 기판 슬롯 중 한 슬롯 내의 상기 제 1 기판을 가열하는 단계와 상기 제 2 기판을 상기 대기 상태로 이동시키기 전에 상기 기판 슬롯 중 다른 하나의 슬롯 상의 상기 제 2 기판을 냉각시키는 단계를 더 포함하는,기판 처리 방법.
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- 제 1 항에 있어서,상기 제 1 기판을 상기 하나 이상의 처리 챔버로부터 상기 로드록 챔버를 통해 상기 대기 상태로 이동시키는 단계가,상기 로드록 영역 중 상기 제 1 기판을 갖는 상기 한 영역을 상기 제 1 기판 윗쪽에 배열된 디퓨저를 통해 벤팅하는 단계를 더 포함하는,기판 처리 방법.
- 제 26 항에 있어서,상기 제 1 기판을 갖는 상기 한 영역을 상기 제 1 기판 윗쪽에 배열된 디퓨저를 통해 벤팅하는 단계가,헬륨 가스(He) 또는 질소 가스(N2) 중 하나 이상을 상기 제 1 기판을 갖는 상기 한 영역 내로 유동시키는 단계를 더 포함하는,기판 처리 방법.
- 제 3 항에 있어서,상기 냉각시키는 단계가,상기 제 2 기판에 인접한, 물에 의해 냉각되는 플레이트로 상기 제 2 기판을 냉각시키는 단계를 더 포함하는,기판 처리 방법.
- 제 13 항에 있어서,상기 제 1 기판을 상기 하나 이상의 처리 챔버로부터 상기 로드록 챔버를 통해 상기 대기 상태로 이동시키는 단계가,상기 로드록 영역 중 상기 제 1 기판을 갖는 상기 한 영역을 상기 제 1 기판 윗쪽에 배열된 디퓨저를 통해 벤팅하는 단계를 더 포함하는,기판 처리 방법.
- 제 29 항에 있어서,상기 제 1 기판을 갖는 상기 한 영역을 상기 제 1 기판 윗쪽에 배열된 디퓨저를 통해 벤팅하는 단계가,헬륨 가스(He) 또는 질소 가스(N2) 중 하나 이상을 상기 제 1 기판을 갖는 상기 한 영역 내로 유동시키는 단계를 더 포함하는,기판 처리 방법.
- 제 13 항에 있어서,상기 제 1 기판을 상기 하나 이상의 처리 챔버로부터 상기 로드록 챔버를 통해 상기 대기 상태로 이동시키는 단계가,상기 제 2 기판에 인접한, 물에 의해 냉각되는 플레이트로 상기 제 2 기판을 냉각시키는 단계를 더 포함하는,기판 처리 방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US66386200A | 2000-09-15 | 2000-09-15 | |
US09/663,862 | 2000-09-15 |
Related Parent Applications (1)
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KR10-2003-7003782A Division KR20030032034A (ko) | 2000-09-15 | 2001-09-13 | 처리 장비용 두 개의 이중 슬롯 로드록 |
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KR1020077006250A Division KR20070037517A (ko) | 2000-09-15 | 2001-09-13 | 처리 장비용 더블 이중 슬롯 로드록 |
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KR20060017925A KR20060017925A (ko) | 2006-02-27 |
KR100960773B1 true KR100960773B1 (ko) | 2010-06-01 |
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KR1020067002408A KR100960773B1 (ko) | 2000-09-15 | 2001-09-13 | 처리 장비용 더블 이중 슬롯 로드록 |
KR10-2003-7003782A KR20030032034A (ko) | 2000-09-15 | 2001-09-13 | 처리 장비용 두 개의 이중 슬롯 로드록 |
KR1020087026801A KR20080109062A (ko) | 2000-09-15 | 2001-09-13 | 처리 장비용 더블 이중 슬롯 로드록 |
KR1020077006250A KR20070037517A (ko) | 2000-09-15 | 2001-09-13 | 처리 장비용 더블 이중 슬롯 로드록 |
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KR10-2003-7003782A KR20030032034A (ko) | 2000-09-15 | 2001-09-13 | 처리 장비용 두 개의 이중 슬롯 로드록 |
KR1020087026801A KR20080109062A (ko) | 2000-09-15 | 2001-09-13 | 처리 장비용 더블 이중 슬롯 로드록 |
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EP (1) | EP1319243A2 (ko) |
JP (1) | JP2004523880A (ko) |
KR (4) | KR100960773B1 (ko) |
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- 2001-09-13 TW TW090122796A patent/TW512421B/zh not_active IP Right Cessation
- 2001-09-13 WO PCT/US2001/028944 patent/WO2002023597A2/en not_active Application Discontinuation
- 2001-09-13 JP JP2002527550A patent/JP2004523880A/ja active Pending
- 2001-09-13 EP EP01971084A patent/EP1319243A2/en not_active Ceased
- 2001-09-13 KR KR1020087026801A patent/KR20080109062A/ko not_active Application Discontinuation
- 2001-09-13 KR KR1020077006250A patent/KR20070037517A/ko not_active Application Discontinuation
- 2001-09-21 US US09/957,784 patent/US7105463B2/en not_active Expired - Lifetime
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170141747A (ko) * | 2015-04-22 | 2017-12-26 | 어플라이드 머티어리얼스, 인코포레이티드 | 로드락 장치, 냉각 플레이트 조립체, 및 전자 디바이스 프로세싱 시스템들 및 방법들 |
KR102278413B1 (ko) | 2015-04-22 | 2021-07-15 | 어플라이드 머티어리얼스, 인코포레이티드 | 로드락 장치, 냉각 플레이트 조립체, 및 전자 디바이스 프로세싱 시스템들 및 방법들 |
US10699936B2 (en) | 2015-08-11 | 2020-06-30 | Samsung Display Co., Ltd. | Substrate processing system |
US11355384B2 (en) | 2015-08-11 | 2022-06-07 | Samsung Display Co., Ltd. | Substrate processing system |
Also Published As
Publication number | Publication date |
---|---|
KR20080109062A (ko) | 2008-12-16 |
KR20060017925A (ko) | 2006-02-27 |
US7105463B2 (en) | 2006-09-12 |
TW512421B (en) | 2002-12-01 |
KR20070037517A (ko) | 2007-04-04 |
KR20030032034A (ko) | 2003-04-23 |
WO2002023597A2 (en) | 2002-03-21 |
EP1319243A2 (en) | 2003-06-18 |
US20020034886A1 (en) | 2002-03-21 |
JP2004523880A (ja) | 2004-08-05 |
WO2002023597A3 (en) | 2002-10-10 |
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