KR100954302B1 - 크라이오패널 및 이를 이용한 크라이오펌프 - Google Patents

크라이오패널 및 이를 이용한 크라이오펌프 Download PDF

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Publication number
KR100954302B1
KR100954302B1 KR1020080077737A KR20080077737A KR100954302B1 KR 100954302 B1 KR100954302 B1 KR 100954302B1 KR 1020080077737 A KR1020080077737 A KR 1020080077737A KR 20080077737 A KR20080077737 A KR 20080077737A KR 100954302 B1 KR100954302 B1 KR 100954302B1
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KR
South Korea
Prior art keywords
panel
cryopanel
shaped
disk
shaped panel
Prior art date
Application number
KR1020080077737A
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English (en)
Korean (ko)
Other versions
KR20090015855A (ko
Inventor
료스케 츠유키
Original Assignee
스미도모쥬기가이고교 가부시키가이샤
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Application filed by 스미도모쥬기가이고교 가부시키가이샤 filed Critical 스미도모쥬기가이고교 가부시키가이샤
Publication of KR20090015855A publication Critical patent/KR20090015855A/ko
Application granted granted Critical
Publication of KR100954302B1 publication Critical patent/KR100954302B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B15/00—Sorption machines, plants or systems, operating continuously, e.g. absorption type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
    • F25B9/004—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant being air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S62/00—Refrigeration
    • Y10S62/02—Refrigerant pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR1020080077737A 2007-08-08 2008-08-08 크라이오패널 및 이를 이용한 크라이오펌프 KR100954302B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2007-00206907 2007-08-08
JP2007206907 2007-08-08
JP2008029048A JP5090200B2 (ja) 2007-08-08 2008-02-08 クライオパネル及びこれを用いたクライオポンプ
JPJP-P-2008-00029048 2008-02-08

Publications (2)

Publication Number Publication Date
KR20090015855A KR20090015855A (ko) 2009-02-12
KR100954302B1 true KR100954302B1 (ko) 2010-04-23

Family

ID=40553906

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080077737A KR100954302B1 (ko) 2007-08-08 2008-08-08 크라이오패널 및 이를 이용한 크라이오펌프

Country Status (3)

Country Link
JP (1) JP5090200B2 (ja)
KR (1) KR100954302B1 (ja)
TW (1) TWI369447B (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102743894B (zh) * 2011-04-20 2015-03-11 住友重机械工业株式会社 冷阱及真空排气装置
JP5398780B2 (ja) * 2011-05-12 2014-01-29 住友重機械工業株式会社 クライオポンプ
JP2013159841A (ja) * 2012-02-08 2013-08-19 Tokyo Electron Ltd 成膜装置
JP6053588B2 (ja) * 2013-03-19 2016-12-27 住友重機械工業株式会社 クライオポンプ、及び非凝縮性気体の真空排気方法
JP6084119B2 (ja) * 2013-05-27 2017-02-22 住友重機械工業株式会社 クライオポンプ
KR101667953B1 (ko) * 2015-06-02 2016-10-28 현민지브이티 주식회사 크라이오펌프의 배플 제조 방법
CN107489604A (zh) * 2017-09-26 2017-12-19 安徽万瑞冷电科技有限公司 一种大容量低温泵及其工作方法
CN112523993A (zh) * 2020-12-03 2021-03-19 安徽万瑞冷电科技有限公司 吸附阵及具有该吸附阵的低温泵
KR20230154172A (ko) * 2021-03-11 2023-11-07 스미도모쥬기가이고교 가부시키가이샤 크라이오펌프
CN117167234B (zh) * 2023-10-30 2024-02-06 苏州八匹马超导科技有限公司 低温泵吸附阵及低温泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0658258A (ja) * 1992-08-07 1994-03-01 Fujitsu Ltd クライオポンプ
JPH08109881A (ja) * 1994-10-13 1996-04-30 Sanyo Electric Co Ltd クライオポンプ装置
JP2000205125A (ja) 1999-01-11 2000-07-25 Seiko Epson Corp クライオポンプ
US20060064990A1 (en) 2004-09-24 2006-03-30 Helix Technology Corporation High conductance cryopump for type III gas pumping

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2780232B2 (ja) * 1989-05-22 1998-07-30 ダイキン工業株式会社 クライオポンプにおけるクライオパネル
JPH0347484A (ja) * 1989-07-12 1991-02-28 Sanyo Electric Co Ltd クライオポンプ
JPH0518356A (ja) * 1991-07-12 1993-01-26 Sanyo Electric Co Ltd クライオポンプ
JPH05172054A (ja) * 1991-12-20 1993-07-09 Ulvac Japan Ltd クライオポンプ
JPH08121337A (ja) * 1994-10-21 1996-05-14 Daikin Ind Ltd クライオパネル
JP3609474B2 (ja) * 1995-02-14 2005-01-12 アルバック・クライオ株式会社 クライオポンプ
JP3966370B2 (ja) * 1997-12-02 2007-08-29 アルバック・クライオ株式会社 クライオポンプ
JP2003021062A (ja) * 2001-07-10 2003-01-24 Sumitomo Heavy Ind Ltd クライオポンプ
JP2006046242A (ja) * 2004-08-06 2006-02-16 Foundation For The Promotion Of Industrial Science クライオポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0658258A (ja) * 1992-08-07 1994-03-01 Fujitsu Ltd クライオポンプ
JPH08109881A (ja) * 1994-10-13 1996-04-30 Sanyo Electric Co Ltd クライオポンプ装置
JP2000205125A (ja) 1999-01-11 2000-07-25 Seiko Epson Corp クライオポンプ
US20060064990A1 (en) 2004-09-24 2006-03-30 Helix Technology Corporation High conductance cryopump for type III gas pumping

Also Published As

Publication number Publication date
TWI369447B (en) 2012-08-01
JP5090200B2 (ja) 2012-12-05
JP2009057957A (ja) 2009-03-19
KR20090015855A (ko) 2009-02-12
TW200923209A (en) 2009-06-01

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