TWI369447B - Cryopanel and cryopump using the cryopanel - Google Patents

Cryopanel and cryopump using the cryopanel

Info

Publication number
TWI369447B
TWI369447B TW097125605A TW97125605A TWI369447B TW I369447 B TWI369447 B TW I369447B TW 097125605 A TW097125605 A TW 097125605A TW 97125605 A TW97125605 A TW 97125605A TW I369447 B TWI369447 B TW I369447B
Authority
TW
Taiwan
Prior art keywords
cryopanel
cryopump
Prior art date
Application number
TW097125605A
Other languages
English (en)
Other versions
TW200923209A (en
Inventor
Tsuyuki Ryosuke
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW200923209A publication Critical patent/TW200923209A/zh
Application granted granted Critical
Publication of TWI369447B publication Critical patent/TWI369447B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B15/00—Sorption machines, plants or systems, operating continuously, e.g. absorption type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
    • F25B9/004—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant being air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S62/00—Refrigeration
    • Y10S62/02—Refrigerant pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
TW097125605A 2007-08-08 2008-07-07 Cryopanel and cryopump using the cryopanel TWI369447B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007206907 2007-08-08
JP2008029048A JP5090200B2 (ja) 2007-08-08 2008-02-08 クライオパネル及びこれを用いたクライオポンプ

Publications (2)

Publication Number Publication Date
TW200923209A TW200923209A (en) 2009-06-01
TWI369447B true TWI369447B (en) 2012-08-01

Family

ID=40553906

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097125605A TWI369447B (en) 2007-08-08 2008-07-07 Cryopanel and cryopump using the cryopanel

Country Status (3)

Country Link
JP (1) JP5090200B2 (zh)
KR (1) KR100954302B1 (zh)
TW (1) TWI369447B (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102743894B (zh) * 2011-04-20 2015-03-11 住友重机械工业株式会社 冷阱及真空排气装置
JP5398780B2 (ja) * 2011-05-12 2014-01-29 住友重機械工業株式会社 クライオポンプ
JP2013159841A (ja) * 2012-02-08 2013-08-19 Tokyo Electron Ltd 成膜装置
JP6053588B2 (ja) * 2013-03-19 2016-12-27 住友重機械工業株式会社 クライオポンプ、及び非凝縮性気体の真空排気方法
JP6084119B2 (ja) * 2013-05-27 2017-02-22 住友重機械工業株式会社 クライオポンプ
KR101667953B1 (ko) * 2015-06-02 2016-10-28 현민지브이티 주식회사 크라이오펌프의 배플 제조 방법
CN107489604A (zh) * 2017-09-26 2017-12-19 安徽万瑞冷电科技有限公司 一种大容量低温泵及其工作方法
CN112523993A (zh) * 2020-12-03 2021-03-19 安徽万瑞冷电科技有限公司 吸附阵及具有该吸附阵的低温泵
KR20230154172A (ko) * 2021-03-11 2023-11-07 스미도모쥬기가이고교 가부시키가이샤 크라이오펌프
CN117167234B (zh) * 2023-10-30 2024-02-06 苏州八匹马超导科技有限公司 低温泵吸附阵及低温泵

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2780232B2 (ja) * 1989-05-22 1998-07-30 ダイキン工業株式会社 クライオポンプにおけるクライオパネル
JPH0347484A (ja) * 1989-07-12 1991-02-28 Sanyo Electric Co Ltd クライオポンプ
JPH0518356A (ja) * 1991-07-12 1993-01-26 Sanyo Electric Co Ltd クライオポンプ
JPH05172054A (ja) * 1991-12-20 1993-07-09 Ulvac Japan Ltd クライオポンプ
JPH0658258A (ja) * 1992-08-07 1994-03-01 Fujitsu Ltd クライオポンプ
JP3615247B2 (ja) * 1994-10-13 2005-02-02 三洋電機株式会社 クライオポンプ装置
JPH08121337A (ja) * 1994-10-21 1996-05-14 Daikin Ind Ltd クライオパネル
JP3609474B2 (ja) * 1995-02-14 2005-01-12 アルバック・クライオ株式会社 クライオポンプ
JP3966370B2 (ja) * 1997-12-02 2007-08-29 アルバック・クライオ株式会社 クライオポンプ
JP2000205125A (ja) 1999-01-11 2000-07-25 Seiko Epson Corp クライオポンプ
JP2003021062A (ja) * 2001-07-10 2003-01-24 Sumitomo Heavy Ind Ltd クライオポンプ
JP2006046242A (ja) * 2004-08-06 2006-02-16 Foundation For The Promotion Of Industrial Science クライオポンプ
US7313922B2 (en) 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping

Also Published As

Publication number Publication date
JP5090200B2 (ja) 2012-12-05
JP2009057957A (ja) 2009-03-19
KR100954302B1 (ko) 2010-04-23
KR20090015855A (ko) 2009-02-12
TW200923209A (en) 2009-06-01

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