KR100943756B1 - 기판 슬림화 장치 - Google Patents
기판 슬림화 장치 Download PDFInfo
- Publication number
- KR100943756B1 KR100943756B1 KR1020070103694A KR20070103694A KR100943756B1 KR 100943756 B1 KR100943756 B1 KR 100943756B1 KR 1020070103694 A KR1020070103694 A KR 1020070103694A KR 20070103694 A KR20070103694 A KR 20070103694A KR 100943756 B1 KR100943756 B1 KR 100943756B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- etchant
- chamber
- delete delete
- etching
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Weting (AREA)
- Surface Treatment Of Glass (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070103694A KR100943756B1 (ko) | 2007-10-15 | 2007-10-15 | 기판 슬림화 장치 |
TW096141584A TWI391349B (zh) | 2007-10-15 | 2007-11-02 | 基板薄型化裝置,基板薄型化方法以及基板薄型化組件 |
CN2008100087692A CN101412587B (zh) | 2007-10-15 | 2008-01-29 | 衬底薄化设备、方法和组件 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070103694A KR100943756B1 (ko) | 2007-10-15 | 2007-10-15 | 기판 슬림화 장치 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020090094682A Division KR20090122894A (ko) | 2009-10-06 | 2009-10-06 | 기판 슬림화 장치 및 기판 슬림화 장치 조립체 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20090038279A KR20090038279A (ko) | 2009-04-20 |
KR100943756B1 true KR100943756B1 (ko) | 2010-02-23 |
Family
ID=40593357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070103694A KR100943756B1 (ko) | 2007-10-15 | 2007-10-15 | 기판 슬림화 장치 |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100943756B1 (zh) |
CN (1) | CN101412587B (zh) |
TW (1) | TWI391349B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101088432B1 (ko) | 2011-08-12 | 2011-12-01 | 씨앤지하이테크 주식회사 | 유리패널 코팅장치 |
KR101105331B1 (ko) * | 2011-08-12 | 2012-01-16 | 씨앤지하이테크 주식회사 | 유리패널의 코팅방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1070103A (ja) | 1996-07-18 | 1998-03-10 | Lg Semicon Co Ltd | 半導体ウェーハウェットエッチング処理装置 |
KR100267085B1 (ko) | 1998-03-31 | 2000-11-01 | 김충환 | 배스 |
KR20010077385A (ko) * | 2000-02-02 | 2001-08-17 | 윤종용 | 습식 식각 장치 및 이를 이용한 습식 식각 방법 |
KR20050068239A (ko) * | 2003-12-29 | 2005-07-05 | 엘지.필립스 엘시디 주식회사 | 식각장비 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR0180850B1 (ko) * | 1996-06-26 | 1999-03-20 | 구자홍 | 유리기판 에칭장치 |
TW513388B (en) * | 2001-04-04 | 2002-12-11 | Ind Tech Res Inst | Apparatus and method for etching glass panels |
TWI304502B (en) * | 2003-02-20 | 2008-12-21 | Toppoly Optoelectronics Corp | Method of forming a liquid crystal panel |
JP4071220B2 (ja) * | 2004-03-17 | 2008-04-02 | 西山ステンレスケミカル株式会社 | ガラス基板の製造方法 |
US7497754B2 (en) * | 2004-04-30 | 2009-03-03 | Kabushiki Kaisha Toyota Jidoshokki | Method for thinning substrate of EL device |
KR100751805B1 (ko) * | 2006-04-27 | 2007-08-23 | (주)이노루트 | 기판의 박판화 장치 및 이를 포함하는 기판의 박판화시스템 |
-
2007
- 2007-10-15 KR KR1020070103694A patent/KR100943756B1/ko not_active IP Right Cessation
- 2007-11-02 TW TW096141584A patent/TWI391349B/zh not_active IP Right Cessation
-
2008
- 2008-01-29 CN CN2008100087692A patent/CN101412587B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1070103A (ja) | 1996-07-18 | 1998-03-10 | Lg Semicon Co Ltd | 半導体ウェーハウェットエッチング処理装置 |
KR100267085B1 (ko) | 1998-03-31 | 2000-11-01 | 김충환 | 배스 |
KR20010077385A (ko) * | 2000-02-02 | 2001-08-17 | 윤종용 | 습식 식각 장치 및 이를 이용한 습식 식각 방법 |
KR20050068239A (ko) * | 2003-12-29 | 2005-07-05 | 엘지.필립스 엘시디 주식회사 | 식각장비 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101088432B1 (ko) | 2011-08-12 | 2011-12-01 | 씨앤지하이테크 주식회사 | 유리패널 코팅장치 |
KR101105331B1 (ko) * | 2011-08-12 | 2012-01-16 | 씨앤지하이테크 주식회사 | 유리패널의 코팅방법 |
Also Published As
Publication number | Publication date |
---|---|
TW200916423A (en) | 2009-04-16 |
TWI391349B (zh) | 2013-04-01 |
KR20090038279A (ko) | 2009-04-20 |
CN101412587B (zh) | 2012-05-23 |
CN101412587A (zh) | 2009-04-22 |
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