TW513388B - Apparatus and method for etching glass panels - Google Patents
Apparatus and method for etching glass panels Download PDFInfo
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- TW513388B TW513388B TW90108039A TW90108039A TW513388B TW 513388 B TW513388 B TW 513388B TW 90108039 A TW90108039 A TW 90108039A TW 90108039 A TW90108039 A TW 90108039A TW 513388 B TW513388 B TW 513388B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
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Abstract
Description
513388 五、發明說明(1) ftagts^tgrrOTW»**·'»»1 »__ ι_ι___ΙΒ·1111111_u|N" 5-1發明領域: 本發明係一種用於蝕刻玻璃面板的裝置及方法,特別 係一種可同時在面板兩面且具有較佳厚度均勻度之蝕刻複 數個玻璃面板的裝置及方法,以製造可使用於液晶顯示器 的薄型玻璃面板。 5 - 2發明背景: 液晶顯示裝置已經被使用多年。起初,其主要係被應 用於小型設備上,例如電子錶和計算機。液晶顯示裝置現 在則應用於儀器面板之數位顯示和圖形顯示。液晶顯示裝 置的優點在於其特有的性質,如厚度薄,重量輕,只需低 驅動電壓和耗電量低。因此,最近彩色液晶顯示裝置有更 多的應用被發現,如小螢幕電視,筆記型電腦顯示面板和 影像相機之取景器,以取代傳統的映像管裝置。513388 V. Description of the invention (1) ftagts ^ tgrrOTW »** · '» »1» __ ι_ι ___ ΙΒ · 1111111_u | N " 5-1 Field of the invention: The present invention relates to a device and method for etching a glass panel, in particular to a device Apparatus and method capable of simultaneously etching a plurality of glass panels on both sides of the panel and having better thickness uniformity, so as to manufacture a thin glass panel which can be used for a liquid crystal display. 5-2 Background of the Invention: Liquid crystal display devices have been used for many years. At first, it was mainly applied to small devices, such as electronic watches and computers. Liquid crystal display devices are now used in digital display and graphic display of instrument panels. The advantages of liquid crystal display devices are their unique properties, such as thin thickness and light weight, which require low driving voltage and low power consumption. Therefore, more applications of color liquid crystal display devices have recently been discovered, such as small-screen TVs, notebook computer display panels, and viewfinders for video cameras to replace traditional picture tube devices.
一液晶顯示裝置可由一彩色單元或一黑及白單元所構 成。該裝置亦可視所使用的光源而被建構成一反射型或一 穿透型。因為液晶分子會對外界提供的電壓產生反應,所 以液晶分子可被使用作為光學切換器或一光閥。 一液晶顯示元件係為兩平行的玻璃基板所構成之單一A liquid crystal display device may be composed of a color unit or a black and white unit. The device can also be constructed as a reflection type or a transmission type depending on the light source used. Since the liquid crystal molecules respond to an externally supplied voltage, the liquid crystal molecules can be used as an optical switch or a light valve. A liquid crystal display element is a single unit composed of two parallel glass substrates.
第4頁 5133^8 五、發明說明(2) 兀件’亦即’ 一上部玻璃基板和一下部玻璃基板。上部基· 板和下部基板皆具有一塗佈在其外側表面的偏光膜。形成 在兩平板間之孔洞係以一液晶材料來填滿。其中一種最常 ,用的液晶材料為扭轉向列(twisted nematic,TN)型,其中 扭轉”係為液晶的一種趨勢,其形成一長列,從兩平板間 間隔之一側旋轉至間隔的另一側。該旋轉的角度可經由製 ^的過程來控制。 & &當一光束穿越偏光膜及液晶顯示元件,其偏光方向係 隨著液晶分子的物理旋轉方向而旋轉。在液晶分子出口側 的偏光膜可被定位為允許一旋轉過的光束通過該偏光層。 當從偏光膜側觀看時,像素點或液晶單元之顯像為清楚 的,亦即,在一穿透模式。 一透明導電體,如銦錫氧化物(indium-tirl oxide, I TO),係鍍在玻璃平板的内側。該透明導電體層可被定 義圖案化成一連串互相垂直的線條。當藉提供一橫跨過孔 洞的電壓以驅動面板適當的線條時,液晶分子重新排列自 己以跟隨提供的電場。然後,該液晶分子變成未扭轉態, 只要該電壓存在’未扭轉的光束就會被出口側的偏光膜擋 住。當電壓關閉時,液晶分子返回它們原本的狀態,而使 該分子或像素點再次變得清楚。如先前所述,典型用以驅 動液晶分子的電壓和電流係相對較低,使其成為用電池操 作之設備的考慮對象之一,其中,低耗電量是必備的。一Page 4 5133 ^ 8 V. Description of the invention (2) The element ‘that is’ an upper glass substrate and a lower glass substrate. Each of the upper base plate and the lower substrate has a polarizing film coated on an outer surface thereof. The hole formed between the two plates is filled with a liquid crystal material. One of the most commonly used liquid crystal materials is a twisted nematic (TN) type, where twisted is a trend of liquid crystals, which forms a long line that rotates from one side of the space between two plates to the other of the space. One side. The angle of this rotation can be controlled through the process of manufacturing. &Amp; & When a light beam passes through the polarizing film and the liquid crystal display element, its polarization direction is rotated according to the physical rotation direction of the liquid crystal molecules. At the exit of the liquid crystal molecules The polarizing film on the side can be positioned to allow a rotated light beam to pass through the polarizing layer. When viewed from the side of the polarizing film, the image of a pixel or a liquid crystal cell is clear, that is, in a transmission mode. A transparent Conductors, such as indium-tirl oxide (ITO), are plated on the inside of the glass plate. The transparent conductor layer can be defined and patterned into a series of mutually perpendicular lines. When provided by a When voltage is applied to drive the appropriate lines of the panel, the liquid crystal molecules rearrange themselves to follow the electric field provided. Then, the liquid crystal molecules become untwisted as long as the voltage is present. The twisted beam will be blocked by the polarizing film on the exit side. When the voltage is turned off, the liquid crystal molecules return to their original state, making the molecules or pixels clear again. As mentioned previously, the typical The relatively low voltage and current make it one of the considerations for battery-operated equipment, of which low power consumption is a must.
513388 五、發明說明(3) 一典型的扭轉向列型(TN )液晶元件被使用於小型顯示器, 其具有9 0度之扭轉角。最近則研發出超扭轉向列型(s u p e r twisted nematic,STN)材料,形成一 27 0度之扭轉角,且 因而得到較高的對比度,所以許多像素元件可在一單一顯 示器中被多階的顯示。 上述的液晶顯示裝置為穿透型,同時,反射型液晶顯 示器亦可被使用。在一反射型液晶顯示器,上部平板和下 部平板之其中一個被取代為一反射平板,其可反射光線且 使光線無法穿透。該反射平板可由一具電晶體之玻璃基材 或其它内建於其上方,且塗佈有一金屬反射層之主動元件 所製成。在反射型液晶顯示裝置中,用來照射液晶顯示器 的光源係自外界環境而來,因此顯示器係在一反射狀態下 被觀看。 反射型液晶顯示裝置的其中一個特點為,雜訊係自顯 示裝置之上部或表面玻璃平板反射。在傳統的反射型液晶 裝置,反射平板和上部表面平板係彼此相互平行。當一外 部光源在反射定律下被使用於液晶裝置以產生一影像時, 由反射平板和由上部平板所反射的光線具有相同的反射角 度。從上部表面平板反射的光線無法在液晶顯示裝置中形 成影像,只會產生降低顯示裝置對比度的雜訊。更進一步 地,裝置之噪/訊(η 〇 i s e / s i g n a 1)比亦被增加而影響了顯 示裝置所產生的影像品質。513388 V. Description of the invention (3) A typical twisted nematic (TN) liquid crystal element is used in a small display, which has a twist angle of 90 degrees. Recently, a super twisted nematic (STN) material has been developed to form a twist angle of 270 degrees and thus obtain a high contrast. Therefore, many pixel elements can be displayed in multiple stages in a single display. . The above-mentioned liquid crystal display device is a transmissive type, and at the same time, a reflective liquid crystal display can also be used. In a reflection type liquid crystal display, one of the upper flat plate and the lower flat plate is replaced with a reflective flat plate, which can reflect light and make light impenetrable. The reflective plate may be made of a glass substrate with a transistor or other active elements built on it and coated with a metal reflective layer. In a reflective liquid crystal display device, the light source used to illuminate the liquid crystal display comes from the external environment, so the display is viewed in a reflective state. One of the characteristics of the reflective liquid crystal display device is that the noise is reflected from the upper part or the surface glass plate of the display device. In a conventional reflection type liquid crystal device, the reflection flat plate and the upper surface flat plate are parallel to each other. When an external light source is used in a liquid crystal device to generate an image under the law of reflection, the light reflected by the reflective plate and the upper plate have the same reflection angle. The light reflected from the upper surface plate cannot form an image in the liquid crystal display device, and only generates noise that reduces the contrast of the display device. Furthermore, the noise / signal (η o s e / s i g n a 1) ratio of the device is also increased, which affects the image quality produced by the display device.
513388 五、發明說明(4)513388 V. Description of Invention (4)
為了要有效率的將液晶顯示應用於可攜式電子產品, 如可攜型電視機和筆記型電腦,須被考慮的重要因素為縮 小液晶顯不元件的體積和重置。因為使用於液晶顯不元件 之驅動電路和薄膜電晶體為必要元件,且已經以微型尺寸 設置,因此,對於這些元件進一步的縮小其尺寸是不太可 能的。在液晶顯示元件中,唯一有可能達成重量減輕的元 件是玻璃基板。既然在比例上,玻璃基材為液晶顯示元件 中較重的元件,因此,減輕玻璃基材之重量的方法已經變 成目前在液晶顯示領域中的重要課題。 為了減輕玻璃基材之重量,一明顯的方法為減輕它的 厚度。然而,玻璃基材之薄型化製程係難以實行,因為薄 玻璃很容易由於機械強度的減少而受到損壞,且進一步地 ,薄型化製程可能會引起表面粗糙,其將直接影響到液晶 顯示元件的影像品質。In order to efficiently apply liquid crystal displays to portable electronic products, such as portable televisions and notebook computers, important factors that must be considered are the reduction in the size and resetting of the liquid crystal display elements. Because the drive circuits and thin-film transistors used in liquid crystal display devices are necessary components and are already set in miniature sizes, it is not possible to further reduce the size of these components. Among liquid crystal display elements, the only element that can achieve weight reduction is a glass substrate. Since the glass substrate is a heavier element in the liquid crystal display element in proportion, the method of reducing the weight of the glass substrate has become an important issue in the field of liquid crystal display at present. In order to reduce the weight of the glass substrate, an obvious method is to reduce its thickness. However, the thinning process of the glass substrate is difficult to implement, because the thin glass is easily damaged due to the reduction in mechanical strength, and further, the thinning process may cause surface roughness, which will directly affect the image of the liquid crystal display element. quality.
圖1係說明由k i m申請之美國專利第5,9 8 9,4 5號,揭示 一用以蝕刻玻璃基材之蝕刻劑。在該方法中,一含有至少 百分之5體積百分濃度之HF水溶液和約百分之5濃度之一醇 類,如乙醇,曱醇,丙醇,丁醇和異丙醇,被設置於一容 器1 2中。一多孔平板1 4產生氣泡8以自玻璃基材2 1之表面 分離蝕刻殘餘物和塵粒。雖然蝕刻後之殘餘物藉著含有百 分之5體積百分濃度的醇類的蝕刻劑可更容易被移除,但Figure 1 illustrates U.S. Patent No. 5,98,45, filed by Kim and discloses an etchant for etching a glass substrate. In this method, an aqueous solution containing at least 5 percent by volume of HF in water and about 5 percent by weight of one alcohol, such as ethanol, methanol, propanol, butanol, and isopropanol, are disposed in a In container 12. A porous flat plate 14 generates bubbles 8 to separate the etching residue and dust particles from the surface of the glass substrate 21. Although the etched residue can be more easily removed by using an etchant containing an alcohol concentration of 5% by volume, but
第7頁 513388 五、發明說明(5) 此方法在一大面積的玻璃基材並無法達到一均勻的餘刻, 且進一步地,其無法蝕刻已經具有導電元件形成於基材邊 緣上的玻璃基材。 如圖2所不,另一種方法,由kim申請之美國專利第6, 071,374號,揭示一用以蝕刻玻璃基材之裝置,其包括含 有,刻劑之第一浴池1 3,至少一多孔面板丨5,該面板在第 /谷池中具有複數個喷霧孔且含有蝕刻劑,以喷灑蝕刻劑 至玻璃基材30。一儲存蝕刻劑之容器2〇,一幫浦24,藉著 幫浦、容器、和多孔面板間的連接提供蝕刻劑至該多^面 板1 5 〇 如圖2所示,該玻璃基材3〇係藉由至少一對形 架18上且設置在多孔面板15之間的凸起物"來固定。 由幫:的壓力將姓刻劑經過噴射孔16;壤 線25提供至支架18時=經鞋刻劑供應管 ,〇 ^ ^ , 東庸Ζ4的屋力被傳送至連接到彡牟 二=劑,,劑穿過噴= 多;= ί;3和噴霧孔16亦設置在 _。氣泡係由氣體體以ΓΓ刻劑至玻璃基 所示的結構相較於圖1所:二2已 SC吾了蝕刻的均勻度,肤古、,土 / ^ ° 此方法仍然存在有許多的缺點,如 第8頁 513388 五、發明說明(6) ,難以控制穿過喷霧孔1 6而喷灑的蝕刻劑,且此方法只能 用於蝕刻一素玻璃基材,亦即,不能用於具有導電元件設 立於上方的玻璃面板,該裝置中不具有任何設備來保護任 何可能設置在玻璃面板上的導電元件。 5 - 3發明目的及概述: 本發明之目的係提供一用以蝕刻複數個玻璃面板的裝 置,其不具有傳統裝置的缺點和短處。 本發明之另一目的係提供一用以蝕刻複數個玻璃面板 的裝置,其具有可於面板上產生厚度更均勻的控制能力。 本發明之另一目的係提供一用以蝕刻複數個玻璃面板 ,並且具有能在橫跨面板的表面上改善平坦度能力的裝置 本發明之另一目的係提供一用以蝕刻複數個玻璃面板 的裝置,其中,該裝置包括一可旋轉的面板夾具,用以夾 持住該玻璃面板,及在該蝕刻劑溶液中旋轉該玻璃面板。 本發明之另一目的係提供一用以蝕刻複數個玻璃面板 的裝置,其中,該裝置包括一面板支架,可保護形成在面Page 7 513388 V. Description of the invention (5) This method cannot achieve a uniform finish on a large area of glass substrate, and further, it cannot etch a glass substrate that already has conductive elements formed on the edge of the substrate material. As shown in FIG. 2, another method, US Patent No. 6,071,374 filed by kim, discloses a device for etching a glass substrate, which includes a first bath 1 3 containing at least The porous panel 5 has a plurality of spray holes in the first / valley pond and contains an etchant to spray the etchant onto the glass substrate 30. A container 20 for storing the etchant, and a pump 24 for supplying the etchant to the multi-panel 1 5 through the connection between the pump, the container, and the porous panel. As shown in FIG. 2, the glass substrate 3. It is fixed by at least one pair of projections 18 formed on the frame 18 and arranged between the porous panels 15. By the pressure of the help: the last name of the agent through the injection hole 16; the soil line 25 is provided to the bracket 18 = via the shoe agent supply tube, ^^, Dongyong Z4's roof force is transmitted to the connection to 彡 Mo Er = agent , The agent passes through the spray = more; = ί; 3 and the spray hole 16 is also set at _. The structure of the bubble system from gas to ΓΓ is compared to that shown in Fig. 1: the uniformity of the etching has been improved, the skin is ancient, and the soil / ^ ° This method still has many shortcomings As described on page 8 513388 V. Description of the invention (6), it is difficult to control the etchant sprayed through the spray hole 16 and this method can only be used to etch a plain glass substrate, that is, it cannot be used There is a glass panel with conductive elements set up above. This device does not have any equipment to protect any conductive elements that may be placed on the glass panel. 5-3 Object and Summary of the Invention: The object of the present invention is to provide a device for etching a plurality of glass panels, which does not have the disadvantages and disadvantages of the conventional device. Another object of the present invention is to provide a device for etching a plurality of glass panels, which has a controllability capable of producing a more uniform thickness on the panel. Another object of the present invention is to provide a device for etching a plurality of glass panels, and the device has the ability to improve the flatness across the surface of the panel. Another object of the present invention is to provide a device for etching a plurality of glass panels. The device, wherein the device includes a rotatable panel clamp for holding the glass panel, and rotating the glass panel in the etchant solution. Another object of the present invention is to provide an apparatus for etching a plurality of glass panels, wherein the apparatus includes a panel bracket to protect the surface of the panel.
第9頁Page 9
的導電元件,使其免於接觸到蝕刻劑溶液 的本發明之另一目的係提供一用以蝕刻複數個破璃面板 於2 士 ’藉由以一預定的旋轉速度旋轉一夾持有複數個浸 ; 定體積蝕刻劑中的面板之面板夾具。 本發明之另一 的方法,藉由在相 目的係提供一用以蝕刻複數個 反方向中振盪該面板。 玻璃 面板 本發明之另一目 的方法,藉由以一預 在一 I虫刻劑溶液中的It is another object of the present invention to provide a conductive element that is free from contact with an etchant solution. The present invention provides a method for etching a plurality of broken glass panels at 2 shims by rotating a clamped plurality at a predetermined rotation speed. Dip; Panel fixture for panels in a fixed volume of etchant. Another method of the present invention is to oscillate the panel in a plurality of opposite directions by providing a phase for etching. Glass panel Another method of the present invention is to prepare a glass panel with a
的係提供一用以蝕刻複數個玻璃面板 定之轉速,約5至6 0 r p m,來旋轉浸入 該面板。 根據本發明, 來蝕刻複數個玻璃 係提供一種可改善平坦度和厚 面板的方法和裝置。 度控制The system provides a predetermined speed for etching a plurality of glass panels, about 5 to 60 r p m, to rotate and immerse the panel. According to the present invention, a method and apparatus for etching a plurality of glass systems to improve flatness and a thick panel are provided. Degree control
之穿ί τ ί ΐ:施例中,提供-用以蝕刻複數個玻璃面板 空間,用二以:片㈣、-底壁和-背壁形成的小 有-個上部開口和^複數璃面板於其中。爽具具 ,以摩擦力固定主二其每:開口被一摩擦棒接合 個鄰近邊;底壁和ϊ;::ΐ璃面板中每:片的第-和第二 摩擦力固定住複數二二‘步地提供數個軌道’以 近邊;兩側壁以一二=中每一片的第三和第四個鄰 連、、、〇構件連接,以連接至一設置有夾具Piercing ί τ ί ΐ: In the embodiment, a space for etching a plurality of glass panels is provided, with two parts: a sheet, a bottom wall, and a back wall formed with a small upper opening and a plurality of glass panels. among them. Cooling device, the main two are fixed by friction: the opening is joined by a friction rod to an adjacent side; the bottom wall and the cymbal; ::: the first and second frictional forces of each of the pieces in the glass panel hold a plurality of two Two 'provide several tracks in one step' to the near side; the two side walls are connected with the third and fourth adjacent,, and 0 members of each piece in one to two = to connect to a set of fixtures
第10頁 513388 五、發明說明(8) 的槽中的旋轉棒;該槽具有一空間以盛入一體積的蝕刻劑 溶液,該槽進一步設置有支撐構件和旋轉構件以在一複數 個玻璃面板的平面中支撐和旋轉面板夾具至一預定的旋轉 速度。 在用以蝕刻複數個玻璃面板的裝置中,該槽可選擇性 的包含用以循環蝕刻劑溶液的構件。面板夾持裝置可由兩 側壁、一底壁及頂部、前部和後部為開口的夾具所組成。 該頂部、前部和後部開口各皆由一摩擦棒接合,以摩擦力 固定住複數個玻璃面板中每一片的第一、第二和第三鄰近 邊。複數個執道可由一具有足夠彈性的材料所構成,以提 供摩擦的接合面,或可由一細長的區塊,其具有凹槽於其 中以安放複數個玻璃面板中每一片的第三和第四鄰近邊。 該複數個執道進一步可由一細長的、彈性的區塊所形成, 其具有凹槽於其中以承接複數個面板中,其中一面的一邊 緣,或可形成一足夠保護形成於玻璃面板上一邊緣部份的 導線的高度。該支撐構件可進一步包括一軸承和一用以旋 轉軸承之軸。該旋轉構件可包括一電動馬達。 本發明進一步揭示一種用以蝕刻複數個玻璃面板的方 法,其操作步驟首先包括提供一面板夾具以夾持複數個玻 璃面板;垂直地且有間隔地定位面板夾具中的複數個面板 ;安置該面板夾具於一蝕刻槽中;以一體積之蝕刻劑注入 該蝕刻槽以浸入該複數個玻璃面板;並以一預定的旋轉速Page 10 513388 V. Rotating rod in the groove of the invention description (8); the groove has a space for containing a volume of the etchant solution, and the groove is further provided with a supporting member and a rotating member to form a plurality of glass panels The panel fixture is supported and rotated in a plane to a predetermined rotation speed. In a device for etching a plurality of glass panels, the groove may optionally include a member for circulating an etchant solution. The panel clamping device may be composed of two side walls, a bottom wall, and clamps with openings at the top, front and rear. The top, front, and rear openings are each joined by a friction bar, and the first, second, and third adjacent edges of each of the plurality of glass panels are fixed by friction. The plurality of channels may be composed of a material having sufficient elasticity to provide a frictional joint surface, or may be an elongated block having grooves therein to accommodate the third and fourth of each of the plurality of glass panels. Adjacent edges. The plurality of channels may further be formed by an elongated, elastic block having grooves therein to receive the plurality of panels, one edge of one side, or an edge sufficient to protect the glass panel. The height of the part of the wire. The support member may further include a bearing and a shaft for rotating the bearing. The rotating member may include an electric motor. The invention further discloses a method for etching a plurality of glass panels, the operation steps of which include firstly providing a panel fixture to clamp the plurality of glass panels; positioning the plurality of panels in the panel fixture vertically and at intervals; and positioning the panel The fixture is in an etching bath; a volume of etchant is injected into the etching bath to immerse the plurality of glass panels; and a predetermined rotation speed is used.
第11頁Page 11
五、發明說明(9) 度’在一複I 面 該 ’ 在一 開口壁 包括一 ’且每 至一邊 合構件 造的的 藉由至 的邊緣 包括一 板夾具 包括一 HFV容液 複數個 用以蝕 個方型 且使複 步驟, 一面板 緣。該 ’其内 摩擦接 少分別 ,以在 步驟, ’或以 步驟, 中提供 破璃面 刻複數個 模子中提 數個破璃 在面板夾 寿皆 方法更包 板的平面中旋轉面板夾具。 破璃面板之方法進一步包括— 具有一 合構件。 安裝在開 適當的位 在振盪模 旋轉速度 在一稀釋 一體積的 板在I虫刻 凹 供一面板夾具, 面板接觸到钱刻 具中垂直地定位 擦接合構件,皆 括一步驟,在一 槽’或提供由一 該方法更包括一 口壁上的一摩擦 置夾持複數個玻 式中,以相反方 約5至6 0 r pm旋轉 的 '至少百分之 1虫刻劑,或者是 劑中至少3分鐘c 步 該模子至少具有兩 劑。該方法進一步 該複數個坡螭面^ 以摩擦力至少固定 執道中提供摩擦接 合成橡膠材料所製 步驟,在旋轉中, 棒接合複數個面板 璃面板。該方法更 向交替地旋轉該面 該面板。該方法更 5體積百分·濃度的 在旋轉時,浸入該 _ 4發明詳細說明 复。^發明係揭示一種用以蝕刻複數個玻璃面板之裝置, :製造具有改善過的平垣度和厚度之玻璃面板。本發明 之裝置進一步允許蝕刻具有導線之玻璃面板,或面板邊緣V. Description of the invention (9) Degree 'on a complex I side, the' includes one in an opening wall 'and each side is made of a member, and the edge formed by the plate includes a plate clamp including a plurality of HFV liquid-retaining liquid for Etch a square shape and make a complex step, a panel edge. The ′ internal friction is reduced separately to provide a broken glass surface in a step, ’or a step, and a plurality of broken glass are engraved in a plurality of molds to rotate the panel fixture in the plane of the panel clamp. The method of breaking the glass panel further includes-having a composite member. Install at a proper position at the rotation speed of the oscillating die. A diluted one-volume plate is recessed in the worm for a panel fixture. The panel contacts the coin carving tool to vertically position the wiper joint member. All steps are included in a slot 'Or provide at least 1 percent of insecticide, or by a method comprising a plurality of glass-type friction grips on a wall, rotating at about 5 to 60 r pm in the opposite direction. Step c for at least 3 minutes The mold has at least two doses. The method further comprises a plurality of slope surfaces ^ fixed by friction at least, and a step of providing a friction joint made of synthetic rubber material in a guideway. During the rotation, the rod joins a plurality of panels and glass panels. This method rotates the face and the panel more alternately. This method is more 5 vol% · concentration when rotating, immersed in the _4 invention detailed description complex. ^ The invention discloses a device for etching a plurality of glass panels: manufacturing a glass panel with improved flatness and thickness. The device of the invention further allows etching of glass panels with wires, or panel edges
第12頁 J uoo 五、發明說明(10) _ 上形成有導電元件之面板,藉由在 保護導電元件。該裝置係由—面板心軌❹遮住餘刻劑 以在蝕刻槽中旋轉面板夾具之旋轉構ς二二蝕刻槽和—用 構成。該面板夾具可以為一方型, 二,主要元件所 兩側壁,-底壁和一背壁以垂直地夾二::子狀,藉由 。該面板夾具可具有一上部開口和一下=數個破螭面板 口均被-摩擦棒接♦,以摩擦力固定住=^其每-開 每一片的第一和第二個鄰近邊。 设數個破螭面板中 ,在面板夾具中,背壁和底壁可進一牛M w古、> 道以摩擦力固定住複數個玻璃面板中每二T二ΐ设數個執 個:近邊。該複數個軌道可由合成 和第四 設有-凹#,以*置面板並遮住蝕二二:2且其内 成在邊ΐίπ;;::;由適當選擇軌道的高度,使形 壁可進被完整地保護。面板爽具的兩側 轉構件之軸,例如带叙民4 : >軸承和一用以連結旋 夾具之槽的外部。%,,’、達’/、可設置在内部放置有面板 本發明之裝署治 體積蝕刻劑溶液以供面板:::刻:’具有用以盛入某- 可設置有支撐構件 “ 文入/、内的一空間。該槽並 及力疋轉構件,以在複數個说掠其杯之一 平面上支撐及旋轉哕而+ θ 牡设數個玻璃基板之 例如在振盪模式ΐ :夾具至一預定的旋轉速度’或者 。亥面板夾具以相反方向交替地旋轉。Page 12 Jooo 5. Description of the invention (10) _ A panel with conductive elements is formed on it to protect the conductive elements. The device is composed of a panel core rail covering the remaining etching agent, a rotary structure for rotating the panel fixture in the etching groove, and an etching groove. The panel fixture can be one-sided, two, two side walls of the main component,-the bottom wall and a back wall to clamp two vertically :: sub-shaped, by. The panel clamp may have an upper opening and a lower = several broken panel openings are connected by a -friction bar, and are fixed by friction = ^ each of them-the first and second adjacent edges of each piece. In a number of broken panels, in the panel fixture, the back wall and the bottom wall can be inserted into the glass wall with a friction force to fix a plurality of glass panels. Each of the two glass panels is provided with: side. The plurality of tracks can be combined with the fourth and provided with -concave #, to set the panel and cover the eclipse 22: 2, and the inside is formed on the edge ;; ::; by appropriately selecting the height of the track, the shaped wall can Progression is completely protected. The axis of the rotating member on both sides of the panel fixture, for example, with the bearing 4: > bearing and an outer part of the groove for connecting the screw fixture. % ,, ', up' /, can be set with a panel placed inside The volume etching solution of the present invention is provided for the panel ::: engraved: 'has to hold a certain-may be provided with a supporting member " A space inside the groove. The groove and the force turn the member to support and rotate on one of the planes of the plurality of cups, and + θ is provided with a plurality of glass substrates, for example, in an oscillation mode. A predetermined rotation speed'or. The panel clamp is rotated alternately in opposite directions.
五 、發明說明(n) 本發明更揭示一種用 I由力^ Γ 禋用以蝕刻複數個玻璃面扣 在4工制下,在一钱刻密丨玄 板之方、、么 •罩+ d,令液中旋轉面板。i 乃去, 早—方向旋轉,轉速約5至60 垓面板 相反方6 >接α β姑 rpm或者在振盪枱2」為 方向父替地鉍轉❶該蝕刻劑約 f €式中以 /辰度的HF。 负白刀之5體積百分 面板I f f3 為本發明面板夹具32之立體圖。該 i 3所板/具32具有-前部開口 42和—上部開Π 44。如 接人,不戶俠别换部開口 42和上部開口 44各皆被一摩擦棒46所 “上:係藉由兩末端托座48、5。設置在兩側壁34 置在側辟W末端托座48、50允許該摩擦棒46,藉由旋鬆設 栓ΐ ί 6上的托架槽5 4 (如圖中虛線所示)中的托架 摩扒_4(^兩側壁34、36上滑動。藉由旋轉拢架栓52,該 數個玻璃面板fin -\ 起移除以便於安裝或卸下複 ψ Ά φ ^ . 〇。稭由移除設置在側壁3 4、3 6上的螺紋安 s μ =木裎5 2,可進一步將該摩擦棒4 6完全自地側壁 Μ、3 6上移除。 4f 3進步顯不複數個設置在底壁4 0上的安裝執道5 6 口 個設置在背壁38上的安裝軌道58,用來直立的、垂 一、=持住破璃面板6 〇,藉由接合玻璃面板中的第一和第 一固岫近邊。該安装軌道5 6另外提供一個重要功能,此功V. Description of the invention (n) The present invention further discloses a method of using I to ^ Γ 蚀刻 to etch a plurality of glass faces under a four-work system, engraved with a coin 丨 the square of the mysterious plate, and the cover + d To rotate the panel in liquid. i is to go, rotate in the early direction, the speed is about 5 to 60 垓 the opposite side of the panel 6 > connect α β rpm or in the shaker 2 ″ direction for the bismuth to turn the etchant about f € in the formula where / Chen degrees HF. The 5 volume percent panel I f f3 of the negative white knife is a perspective view of the panel fixture 32 of the present invention. The i 3 panel / tool 32 has a front opening 42 and an upper opening 44. For example, the door opening 42 and the upper opening 44 of each door are each “upper” by a friction bar 46: the two end brackets 48 and 5 are provided. The two side walls 34 are disposed on the side W end brackets. The seats 48 and 50 allow the friction rod 46 to loosen the bracket groove 5 4 (shown as a dashed line in the figure) on the bracket slot 5 4 (shown on the two side walls 34 and 36). Slide. By rotating the bracket 52, the glass panels fin- \ are removed to facilitate the installation or removal of the complex ψ Ά φ ^. 〇. The threads are removed from the threads provided on the side walls 3 4, 36 Ans μ = wooden cymbal 5 2 can further remove the friction rod 4 6 from the ground side wall M, 36. 4f 3 progress shows that there are many installation guides 5 6 on the bottom wall 40. A mounting rail 58 provided on the back wall 38 is used to stand upright, to hold the broken glass panel 60, by joining the first and first fixed edges in the glass panel. The mounting rail 5 6 provides another important function, this function
第14頁Page 14
J 丄JJOO 五、發明說明(12) ---------- 能僅有本發明之新穎裝置才萨 璃面板60之邊緣部位的導電b成,八係為保護形成在破J 丄 JJOO V. Description of the invention (12) ---------- Only the novel device of the present invention can be used to conduct the electrical conductivity of the edge portion of the glass panel 60.
件或導線,可*金屬或導電性m不於®)。這些導電元 ( IT0)〇 J ,如彈性體(例如合成橡膠)其 ,、摩擦材料所組成時 60之邊緣部可緊密地貼合在二”有足夠的彈性,玻璃面板 元件。適當的選擇安裝執道凹槽62内,從而保護該導.電 裝軌道56、58内的凹栌6?,道、58的咼度,藉由接合在安 護。 電元件可被完全地遮蔽保Pieces or wires, which can be * metal or conductive m is not less than ®). These conductive elements (IT0) 0J, such as elastomer (such as synthetic rubber), and the edge portion of the friction material when 60 can be closely attached to the two "glass panel components with sufficient flexibility. Appropriate selection of installation The grooves 62 are held in the road to protect the guides. The recesses 6 in the electrical tracks 56, 58 and the angle of the roads 58 are joined by security. The electrical components can be completely shielded and protected.
我們該注意的是,在囝 r底壁40和一背壁38並非^ Ά佳實施例中所示的一實 容易地藉由一具有中*邱、巴十而要的。例如,底壁4 0可 架足以支標該複數個。^撐框架所取*,只要該框 夾具32在-體積之兹刻劑:J:6。在,刻過程中’當面板 -步改善了银刻劑在複數::? 疋轉時,該中空框架進 同樣的適用於背壁Ϊ8 =:璃中f循環。:上所述 僅使用-中空框架可進-步增進姓It should be noted that the bottom wall 40 and a back wall 38 are not the ones shown in the preferred embodiment, which can be easily obtained by having middle, high, and low. For example, the bottom wall 40 may be sufficient to support the plurality. ^ The support frame is taken as long as the frame holder 32 is in the volumetric engraving agent: J: 6. In the engraving process ’when the panel-step improved the silver engraving in the plural ::? When turning, the hollow frame is also suitable for the back wall Ϊ8 =: glass in f cycle. : As mentioned above, only using-hollow frame can further-further increase the surname
如圖3所示,一支撐構件6 4設置於側壁3 4和3 6上。該 支撐構件6 4可為一轴承元件以連接至一位於蝕刻槽(如圖4 所示)之槽壁上的一軸(未示於圖),以接合一旋轉構件, 例如一安置於槽外壁上的電動馬達(如圖5所示)。此旋轉 構件係屬於傳統型,因此在本說明書中沒有詳細的說明。As shown in FIG. 3, a supporting member 64 is disposed on the side walls 34 and 36. The support member 64 can be a bearing element connected to a shaft (not shown) on the groove wall of the etching groove (as shown in FIG. 4) to engage a rotating member, for example, placed on the outer wall of the groove. Electric motor (as shown in Figure 5). This rotating member is of a conventional type, so it is not described in detail in this specification.
第15頁 513388 五、發明說明(13) 該摩擦棒4 6可由一輕重量的金属所製造’ 糙塗佈,例如可用氟化石夕橡膠,以提供想 各種用來製造面板夾具3 2的材料應該要可 用來飯刻玻璃基材的钱刻劑,例如各種酸 圖4係為本發明之蝕刻裝置之一立體E 板夾具32係安置於一蝕刻槽74之空間72之 是該蝕刻槽7 4係以部份分解圖示於圖中, 出面板夾具3 2的位置。一體積之餘刻劑溶 填入至該空間7 2至一高度,該高度至少要 完全的浸入於其中。蝕刻槽7 4最終可包含 件7 6,例如一液體幫浦,以進一步增強循 間7 2内具有均勻的蝕刻劑溶液。面板夾具 7 4中的較佳圖示為圖5中所示之剖面圖。 如圖5所示,當被一馬達8 0轉動時,^ 藉由一軸承6 4和一軸7 8安置在蝕刻槽7钟 面板夾具3 2可以以經過適當選擇的速率約 。這裡所使用的一詞”約”係指正負誤差百 給的平均數值。複數個面板6 0總共所需的 至3 0分鐘,視蝕刻劑溶液的濃度而定。在 ’當使用HF濃度大於百分之5體積百分濃j 對於玻璃面板之厚度降低之目標為從 如铭,並做一粗 要的摩擦性質。 以抵抗各種一般 的稀釋溶液。 3。特別注意面 内。另外一提的 此是為了要顯示 液(未示於圖)被 能讓面板夾具3 2 有一液體循環構 環而得到在該空 3 2安置在姓刻槽 《面板夾具3 2係 的空間72内。該 5至6 0 rpm下旋轉 分之1 0以内之所 浸泡時間約在3 本較佳實施例中 ^之飯刻劑時, 513388 發明說明(14) 本發 同時地蝕 的方向來 改善至可 該面板係 塵粒、姓 當該槽選 可進一步 餘刻均勻 明之用以蝕刻複數個玻璃面板之新穎裝置可允許 刻和薄化玻璃面板的兩面。藉由與面板彼此平^于 旋二玻璃面板,面板上蝕刻的均勻度可被明顯的 生產出具有均勻厚度的整個面板。更甚者,因為 垂直地設置於蝕刻槽内,其被位於面板表面上的 刻殘餘物或副產物給污染的機會亦明顯的減少。 擇性的被配置有一蝕刻劑循環裝置時,該循環器 過濾、掉钱刻劑中的不純物或塵粒,並提供較好^ 性於面板上。P.15 513388 V. Description of the invention (13) The friction bar 46 can be made of a light weight metal. Rough coating, for example, fluorite rubber can be used to provide a variety of materials used to make the panel fixture 32. For example, various acids can be used for engraving glass substrates. Fig. 4 is a three-dimensional E-plate fixture of the etching device of the present invention. 32 is placed in a space of an etching groove 74. 72 is the etching groove 74. A partially exploded view is shown in the figure to show the position of the panel clamp 32. The remaining volume of the filler is filled into the space 72 to a height which is at least completely immersed therein. The etch bath 74 may finally include a member 76, such as a liquid pump, to further enhance the uniform etchant solution in the cycle 72. The preferred illustration in the panel fixture 74 is a cross-sectional view shown in FIG. As shown in FIG. 5, when rotated by a motor 80, ^ is placed in the etching bath 7 by a bearing 64 and a shaft 78, and the panel jig 32 can be adjusted at an appropriately selected rate. The term "about" as used herein refers to the average value of the positive and negative errors. A total of 60 to 30 minutes is required for the plurality of panels, depending on the concentration of the etchant solution. When the HF concentration is greater than 5 percent by volume, the goal of reducing the thickness of the glass panel is to follow the Ming, and to make a rough friction properties. To resist a variety of general dilution solutions. 3. Pay special attention to the inside. Another mention is to show that the liquid (not shown in the figure) can be obtained by allowing the panel fixture 3 2 to have a liquid circulation ring. The space 3 2 is placed in the space 72 of the panel of the panel fixture 3 2 . When the soaking time within 5 to 60 rpm of rotation is within 10 minutes of about 3 times of the rice engraving agent in the preferred embodiment, 513388 Invention description (14) The direction of the erosion at the same time to improve the The panel is dust particles, and when the slot is selected, the novel device for etching a plurality of glass panels can be etched evenly and at a later time. The novel device for etching and thinning both sides of the glass panel is allowed. By flushing the panel with the two glass panel, the uniformity of the etching on the panel can be obviously produced with the entire panel having a uniform thickness. Furthermore, because it is vertically arranged in the etching bath, the chance of contamination by the etching residue or by-products on the surface of the panel is also significantly reduced. When selectively equipped with an etchant circulation device, the circulator filters and removes impurities or dust particles in the etchant, and provides better performance on the panel.
本發明之用以蝕刻複數個玻璃面板之新穎裝置和方法 已經被適當地揭示在上面的說明之中,並伴隨者圖式3至 雖然本發明已經被適當的揭示,在此所使用的專業術 語應普遍性的、本質上的被瞭解,而非是對於其的一種限 制。 4 更進一步地,雖然本發明已以一較佳實施例做揭示, 任何熟知此領域技藝的人士,在熟讀本發明之說明書後, 將可輕易的將其應用並做各種的變化。唯,凡是依本發明 申請專利範圍所作之均等變化與修飾,皆應仍屬本發明專 利涵蓋之範圍内。The novel device and method for etching a plurality of glass panels of the present invention have been appropriately disclosed in the above description, and accompanied by Figures 3 to 3. Although the present invention has been properly disclosed, the terminology used herein It should be understood universally and essentially, rather than a limitation on it. 4 Furthermore, although the present invention has been disclosed with a preferred embodiment, anyone familiar with the art in this field can easily apply it and make various changes after reading the description of the present invention. However, all equivalent changes and modifications made in accordance with the scope of patent application of the present invention shall still fall within the scope of the patent of the present invention.
第17頁 513388 五、發明說明(15) 一" 圖式簡單說明: 本發明之目的、特徵及優點將可從下列的圖示和詳細 說明被清楚的瞭解,其中, ” 圖1係說明習知在餘刻液中產生氣泡來姓刻玻璃面板 的方法。 圖2係說明第二個習知的以一钱刻劑溶液噴灑在玻璃 面板上以蝕刻玻璃面板的方法。 圖3係本發明之玻璃面板夾具之立體圖,其係以一間 隔,垂直地夾持複數個玻璃面板。 圖4係本發明之用以蝕刻複數個玻璃面板之裝置的立 體圖,說明一玻璃面板夾具和一餘刻槽。 圖5係本發明之用以蝕刻複數個玻璃面板之裝置的剖 面圖,其係設置有一面板夾具、一旋轉面板夾具的馬達裝 置和一用以盛入触刻劑之餘刻槽。P.17 513388 V. Description of the invention (15) A " Brief description of the drawings: The purpose, features and advantages of the present invention will be clearly understood from the following illustrations and detailed descriptions, of which "" Figure 1 is an explanatory exercise It is known that the method of engraving a glass panel is generated by generating bubbles in the remaining etching solution. Fig. 2 illustrates a second conventional method of spraying a glass etching solution on a glass panel to etch the glass panel. Fig. 3 illustrates the method of the present invention. A perspective view of a glass panel fixture, which holds a plurality of glass panels vertically at an interval. Figure 4 is a perspective view of a device for etching a plurality of glass panels according to the present invention, illustrating a glass panel fixture and an extra groove. 5 is a cross-sectional view of a device for etching a plurality of glass panels according to the present invention, which is provided with a panel fixture, a motor device for rotating the panel fixture, and an extra groove for containing a contact agent.
第18頁 513388 五、發明說明(16) 元件編號說明 8 氣泡 10 蝕刻劑溶液 11 側壁 12 側壁 13 第一浴池 14 多孔平板 15 多孔面板 16 喷霧孔 17 多孔平板 18 支架 19 凸起物 20 儲存容器 21 玻璃基材 22 過濾器 23 蝕刻劑供應管線 24 幫浦 25 蝕刻劑供應管線 26 氣體槽 27 氣體供給管線 29 蝕刻劑供應管線 30 玻璃基材 32 面板爽具 1Page 18 513388 V. Description of the invention (16) Description of component number 8 Bubble 10 Etchant solution 11 Side wall 12 Side wall 13 First bath 14 Multi-well plate 15 Multi-well panel 16 Spray hole 17 Multi-well plate 18 Bracket 19 Projection 20 Storage container 21 glass substrate 22 filter 23 etchant supply line 24 pump 25 etchant supply line 26 gas tank 27 gas supply line 29 etchant supply line 30 glass substrate 32 panel fixture 1
第19頁 513388 五、; 發明說明 (17) 34 側壁 36 側 壁 38 背 壁 40 底 壁 42 前 部 開 α 44 上 部 開 π 46 摩 擦 棒 4 8 末 端 托 座 50 末 端 托 座 52 托 架 栓 54 托 架 槽 56 安 裝 執 道 58 安 裝 執 道 60 玻 璃 面 板 62 凹 槽 64 支撐 構 件 70 蝕 刻 槽 裝 置 72 .空 間 74 刻 槽 76 液 體 循 環 構件 78 軸 承 80 馬 達Page 19 513388 5. Description of the invention (17) 34 Side wall 36 Side wall 38 Back wall 40 Bottom wall 42 Front opening α 44 Upper opening π 46 Friction bar 4 8 End bracket 50 End bracket 52 Bracket bolt 54 Bracket Groove 56 Mounting duct 58 Mounting duct 60 Glass panel 62 Groove 64 Support member 70 Etching groove device 72. Space 74 Notch groove 76 Liquid circulation member 78 Bearing 80 Motor
第20頁Page 20
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TWI391349B (en) * | 2007-10-15 | 2013-04-01 | Lee Seung Woog | Apparatus and method for thinning substrate,and assembly for thinning substrate |
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TWI391349B (en) * | 2007-10-15 | 2013-04-01 | Lee Seung Woog | Apparatus and method for thinning substrate,and assembly for thinning substrate |
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