KR100935971B1 - 처리방법 및 처리장치 - Google Patents

처리방법 및 처리장치 Download PDF

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Publication number
KR100935971B1
KR100935971B1 KR1020030028823A KR20030028823A KR100935971B1 KR 100935971 B1 KR100935971 B1 KR 100935971B1 KR 1020030028823 A KR1020030028823 A KR 1020030028823A KR 20030028823 A KR20030028823 A KR 20030028823A KR 100935971 B1 KR100935971 B1 KR 100935971B1
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South Korea
Prior art keywords
processing
processed
processing unit
unit
condition
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KR1020030028823A
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English (en)
Korean (ko)
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KR20030087942A (ko
Inventor
다테야마기요히사
Original Assignee
도쿄엘렉트론가부시키가이샤
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03D—APPARATUS FOR PROCESSING EXPOSED PHOTOGRAPHIC MATERIALS; ACCESSORIES THEREFOR
    • G03D3/00—Liquid processing apparatus involving immersion; Washing apparatus involving immersion
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47D—FURNITURE SPECIALLY ADAPTED FOR CHILDREN
    • A47D3/00—Children's tables
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
    • A47B13/00—Details of tables or desks
    • A47B13/08—Table tops; Rims therefor
    • A47B13/083—Rims for table tops
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
    • A47B13/00—Details of tables or desks
    • A47B13/08—Table tops; Rims therefor
    • A47B13/16—Holders for glasses, ashtrays, lamps, candles or the like forming part of tables
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
    • A47B17/00—Writing-tables
    • A47B17/06—Writing-tables with parts, e.g. trays, movable on a pivot or by chains or belts
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
    • A47B95/00—Fittings for furniture
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47D—FURNITURE SPECIALLY ADAPTED FOR CHILDREN
    • A47D15/00—Accessories for children's furniture, e.g. safety belts or baby-bottle holders
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D1/00—Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
    • H04R1/028—Casings; Cabinets ; Supports therefor; Mountings therein associated with devices performing functions other than acoustics, e.g. electric candles
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
    • A47B2220/00—General furniture construction, e.g. fittings
    • A47B2220/0075—Lighting
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2430/00—Signal processing covered by H04R, not provided for in its groups
    • H04R2430/01—Aspects of volume control, not necessarily automatic, in sound systems

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Pediatric Medicine (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020030028823A 2002-05-10 2003-05-07 처리방법 및 처리장치 Expired - Lifetime KR100935971B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002134882A JP3856125B2 (ja) 2002-05-10 2002-05-10 処理方法及び処理装置
JPJP-P-2002-00134882 2002-05-10

Publications (2)

Publication Number Publication Date
KR20030087942A KR20030087942A (ko) 2003-11-15
KR100935971B1 true KR100935971B1 (ko) 2010-01-08

Family

ID=29397476

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020030028823A Expired - Lifetime KR100935971B1 (ko) 2002-05-10 2003-05-07 처리방법 및 처리장치

Country Status (4)

Country Link
US (1) US6799910B2 (https=)
JP (1) JP3856125B2 (https=)
KR (1) KR100935971B1 (https=)
CN (1) CN1278380C (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3810726B2 (ja) * 2002-10-03 2006-08-16 三菱重工業株式会社 基板加熱制御システム及び基板加熱制御方法
US7113253B2 (en) * 2003-09-16 2006-09-26 Asml Netherlands B.V. Method, apparatus and computer product for substrate processing
JP4579029B2 (ja) * 2005-03-30 2010-11-10 株式会社Sokudo 基板処理装置
JP4619854B2 (ja) * 2005-04-18 2011-01-26 東京エレクトロン株式会社 ロードロック装置及び処理方法
JP4811860B2 (ja) * 2006-05-10 2011-11-09 東京エレクトロン株式会社 熱処理方法、そのプログラム及び熱処理装置
JP2008103384A (ja) * 2006-10-17 2008-05-01 Elpida Memory Inc レジストパターンの形成方法およびレジスト塗布現像装置
JP4687682B2 (ja) * 2007-03-30 2011-05-25 東京エレクトロン株式会社 塗布、現像装置及びその方法並びに記憶媒体
US20100192844A1 (en) * 2009-01-30 2010-08-05 Semes Co., Ltd. Apparatus and method for treating substrate
CN101794710B (zh) 2009-01-30 2012-10-03 细美事有限公司 用于处理基板的系统及方法
JP5338777B2 (ja) * 2010-09-02 2013-11-13 東京エレクトロン株式会社 塗布、現像装置、塗布、現像方法及び記憶媒体
JP6123740B2 (ja) 2014-06-17 2017-05-10 トヨタ自動車株式会社 半導体装置の製造ライン及び半導体装置の製造方法
JP6918461B2 (ja) * 2016-09-23 2021-08-11 東京エレクトロン株式会社 減圧乾燥システム、および減圧乾燥方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1154587A (ja) 1997-07-29 1999-02-26 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH11204413A (ja) 1998-01-19 1999-07-30 Dainippon Screen Mfg Co Ltd 基板処理装置
KR100656003B1 (ko) 1999-09-22 2006-12-08 동경 엘렉트론 주식회사 절연막 형성방법 및 절연막 형성장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950034648A (ko) * 1994-05-25 1995-12-28 김광호 반도체장치의 제조방법
US5849602A (en) * 1995-01-13 1998-12-15 Tokyo Electron Limited Resist processing process
JPH1030317A (ja) * 1996-07-16 1998-02-03 Buresuto:Kk 壁紙及び壁紙の裏打紙の剥離方法
JP3393035B2 (ja) * 1997-05-06 2003-04-07 東京エレクトロン株式会社 制御装置及び半導体製造装置
TW385488B (en) * 1997-08-15 2000-03-21 Tokyo Electron Ltd substrate processing device
US6402400B1 (en) * 1999-10-06 2002-06-11 Tokyo Electron Limited Substrate processing apparatus
JP2001358045A (ja) * 2000-06-09 2001-12-26 Dainippon Screen Mfg Co Ltd 基板処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1154587A (ja) 1997-07-29 1999-02-26 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH11204413A (ja) 1998-01-19 1999-07-30 Dainippon Screen Mfg Co Ltd 基板処理装置
KR100656003B1 (ko) 1999-09-22 2006-12-08 동경 엘렉트론 주식회사 절연막 형성방법 및 절연막 형성장치

Also Published As

Publication number Publication date
US6799910B2 (en) 2004-10-05
JP2003332192A (ja) 2003-11-21
CN1278380C (zh) 2006-10-04
KR20030087942A (ko) 2003-11-15
JP3856125B2 (ja) 2006-12-13
CN1457083A (zh) 2003-11-19
US20030210907A1 (en) 2003-11-13

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