KR100920222B1 - 필름 검사장치 및 필름 검사방법 - Google Patents

필름 검사장치 및 필름 검사방법 Download PDF

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Publication number
KR100920222B1
KR100920222B1 KR1020070092602A KR20070092602A KR100920222B1 KR 100920222 B1 KR100920222 B1 KR 100920222B1 KR 1020070092602 A KR1020070092602 A KR 1020070092602A KR 20070092602 A KR20070092602 A KR 20070092602A KR 100920222 B1 KR100920222 B1 KR 100920222B1
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KR
South Korea
Prior art keywords
gas
film
alignment unit
pad
pads
Prior art date
Application number
KR1020070092602A
Other languages
English (en)
Korean (ko)
Other versions
KR20090027405A (ko
Inventor
도진영
양희철
정종엽
Original Assignee
주식회사 아바코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 아바코 filed Critical 주식회사 아바코
Priority to KR1020070092602A priority Critical patent/KR100920222B1/ko
Priority to PCT/KR2008/003473 priority patent/WO2009035207A1/en
Priority to CN200880106624A priority patent/CN101802661A/zh
Publication of KR20090027405A publication Critical patent/KR20090027405A/ko
Application granted granted Critical
Publication of KR100920222B1 publication Critical patent/KR100920222B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
KR1020070092602A 2007-09-12 2007-09-12 필름 검사장치 및 필름 검사방법 KR100920222B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020070092602A KR100920222B1 (ko) 2007-09-12 2007-09-12 필름 검사장치 및 필름 검사방법
PCT/KR2008/003473 WO2009035207A1 (en) 2007-09-12 2008-06-19 Polarizing film inspection apparatus and method thereof
CN200880106624A CN101802661A (zh) 2007-09-12 2008-06-19 偏光膜检查设备及其方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070092602A KR100920222B1 (ko) 2007-09-12 2007-09-12 필름 검사장치 및 필름 검사방법

Publications (2)

Publication Number Publication Date
KR20090027405A KR20090027405A (ko) 2009-03-17
KR100920222B1 true KR100920222B1 (ko) 2009-10-05

Family

ID=40452187

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070092602A KR100920222B1 (ko) 2007-09-12 2007-09-12 필름 검사장치 및 필름 검사방법

Country Status (3)

Country Link
KR (1) KR100920222B1 (zh)
CN (1) CN101802661A (zh)
WO (1) WO2009035207A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100950438B1 (ko) * 2008-01-09 2010-04-02 주식회사 쓰리비 시스템 광학필름 검사장치
CN102141525A (zh) * 2011-01-01 2011-08-03 上海创波光电科技有限公司 可调节的正、背光源照明检测装置
CN102364332B (zh) * 2011-06-10 2014-07-30 乐金化学(南京)信息电子材料有限公司 偏光板移动检测装置及方法
KR101990026B1 (ko) * 2017-09-25 2019-06-17 (주)펨트론 소자실장형 fpcb용 2d검사장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181714A (ja) 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd 薄板検査装置
JP2006156692A (ja) 2004-11-29 2006-06-15 Smc Corp 非接触搬送装置
KR100737084B1 (ko) 2004-04-23 2007-07-06 다이니폰 스크린 세이조우 가부시키가이샤 광학식 외관 검사 방법 및 광학식 외관 검사 장치
KR100739479B1 (ko) 2006-06-13 2007-07-13 (주)리드 평판 디스플레이 제조에 사용되는 기판 건조 장치 및 방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050126605A1 (en) * 2003-12-15 2005-06-16 Coreflow Scientific Solutions Ltd. Apparatus and method for cleaning surfaces
KR20070016197A (ko) * 2005-08-02 2007-02-07 마이크로하이테크 주식회사 클램프 타입 편광필름 정밀 자동검사기

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181714A (ja) 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd 薄板検査装置
KR100737084B1 (ko) 2004-04-23 2007-07-06 다이니폰 스크린 세이조우 가부시키가이샤 광학식 외관 검사 방법 및 광학식 외관 검사 장치
JP2006156692A (ja) 2004-11-29 2006-06-15 Smc Corp 非接触搬送装置
KR100739479B1 (ko) 2006-06-13 2007-07-13 (주)리드 평판 디스플레이 제조에 사용되는 기판 건조 장치 및 방법

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Publication number Publication date
KR20090027405A (ko) 2009-03-17
WO2009035207A1 (en) 2009-03-19
CN101802661A (zh) 2010-08-11

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