KR100910438B1 - 전기발광 디스플레이 장치의 제조방법 - Google Patents
전기발광 디스플레이 장치의 제조방법 Download PDFInfo
- Publication number
- KR100910438B1 KR100910438B1 KR20030005517A KR20030005517A KR100910438B1 KR 100910438 B1 KR100910438 B1 KR 100910438B1 KR 20030005517 A KR20030005517 A KR 20030005517A KR 20030005517 A KR20030005517 A KR 20030005517A KR 100910438 B1 KR100910438 B1 KR 100910438B1
- Authority
- KR
- South Korea
- Prior art keywords
- display substrate
- donor element
- organic
- layer
- donor
- Prior art date
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- 0 CC1N(***C2C=CC3)C2*3=CC1 Chemical compound CC1N(***C2C=CC3)C2*3=CC1 0.000 description 2
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
- H10K85/341—Transition metal complexes, e.g. Ru(II)polypyridine complexes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
- H10K85/341—Transition metal complexes, e.g. Ru(II)polypyridine complexes
- H10K85/342—Transition metal complexes, e.g. Ru(II)polypyridine complexes comprising iridium
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
- H10K85/351—Metal complexes comprising lanthanides or actinides, e.g. comprising europium
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/060,670 US6610455B1 (en) | 2002-01-30 | 2002-01-30 | Making electroluminscent display devices |
US10/060,670 | 2002-01-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030065371A KR20030065371A (ko) | 2003-08-06 |
KR100910438B1 true KR100910438B1 (ko) | 2009-08-04 |
Family
ID=27610065
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR20030005517A KR100910438B1 (ko) | 2002-01-30 | 2003-01-28 | 전기발광 디스플레이 장치의 제조방법 |
Country Status (6)
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6970490B2 (en) * | 2002-05-10 | 2005-11-29 | The Trustees Of Princeton University | Organic light emitting devices based on the formation of an electron-hole plasma |
US6890627B2 (en) * | 2002-08-02 | 2005-05-10 | Eastman Kodak Company | Laser thermal transfer from a donor element containing a hole-transporting layer |
US6939660B2 (en) * | 2002-08-02 | 2005-09-06 | Eastman Kodak Company | Laser thermal transfer donor including a separate dopant layer |
US6855636B2 (en) * | 2002-10-31 | 2005-02-15 | 3M Innovative Properties Company | Electrode fabrication methods for organic electroluminscent devices |
JP2004184797A (ja) * | 2002-12-05 | 2004-07-02 | Seiko Epson Corp | 電子装置及びその製造方法並びに電子機器 |
US7132140B2 (en) * | 2004-05-27 | 2006-11-07 | Eastman Kodak Company | Plural metallic layers in OLED donor |
KR20060017414A (ko) * | 2004-08-20 | 2006-02-23 | 삼성에스디아이 주식회사 | 유기 전계 발광 소자의 제조 방법 |
KR20060020044A (ko) * | 2004-08-30 | 2006-03-06 | 삼성에스디아이 주식회사 | 유기전계발광표시장치 및 도너 기판의 제조방법 |
KR100699993B1 (ko) * | 2004-08-30 | 2007-03-26 | 삼성에스디아이 주식회사 | 레이저 열전사 방법 |
KR20060020045A (ko) * | 2004-08-30 | 2006-03-06 | 삼성에스디아이 주식회사 | 유기전계발광표시장치의 제조방법 |
KR20060020031A (ko) * | 2004-08-30 | 2006-03-06 | 삼성에스디아이 주식회사 | 레이저 열전사 장치 |
KR100860005B1 (ko) * | 2004-09-21 | 2008-09-25 | 삼성에스디아이 주식회사 | 유기 전계 발광 소자의 제조 방법 |
KR20060027750A (ko) * | 2004-09-23 | 2006-03-28 | 삼성에스디아이 주식회사 | 유기 전계 발광 소자의 제조 방법 |
KR100721565B1 (ko) * | 2004-11-17 | 2007-05-23 | 삼성에스디아이 주식회사 | 저분자 유기 전계 발광 소자 및 그의 제조 방법 |
KR100700641B1 (ko) * | 2004-12-03 | 2007-03-27 | 삼성에스디아이 주식회사 | 레이저 조사 장치, 패터닝 방법 및 그를 이용한 레이저열전사 패터닝 방법과 이를 이용한 유기 전계 발광 소자의제조 방법 |
KR100635579B1 (ko) | 2004-12-20 | 2006-10-17 | 삼성에스디아이 주식회사 | 레이저 열 전사장치, 상기 장치를 사용하는 레이저 열전사법 및 상기 장치를 사용하는 유기전계발광표시장치제조방법 |
US7630029B2 (en) * | 2005-02-16 | 2009-12-08 | Industrial Technology Research Institute | Conductive absorption layer for flexible displays |
KR100712289B1 (ko) | 2005-04-07 | 2007-04-27 | 삼성에스디아이 주식회사 | 평판표시장치 및 그의 제조방법 |
JP2006309955A (ja) * | 2005-04-26 | 2006-11-09 | Sony Corp | 有機電界発光素子の製造方法および有機電界発光素子 |
JP2006309994A (ja) * | 2005-04-27 | 2006-11-09 | Sony Corp | 転写用基板および転写方法ならびに表示装置の製造方法 |
US7534545B2 (en) | 2005-08-30 | 2009-05-19 | Samsung Sdi Co., Ltd. | Method of making an organic light emitting display device |
GB2436893A (en) * | 2006-03-31 | 2007-10-10 | Seiko Epson Corp | Inkjet printing of cross point passive matrix devices |
JP2008034280A (ja) * | 2006-07-31 | 2008-02-14 | Sony Corp | 表示装置の製造方法 |
JP4450006B2 (ja) | 2007-04-02 | 2010-04-14 | ソニー株式会社 | 転写用基板および有機電界発光素子の製造方法 |
JP4420065B2 (ja) * | 2007-05-21 | 2010-02-24 | ソニー株式会社 | 転写方法および転写装置ならびに有機発光素子の製造方法 |
KR100884253B1 (ko) * | 2007-07-04 | 2009-02-17 | 주식회사 아이엠티 | 건식세정장치 및 방법 |
JP2009048811A (ja) * | 2007-08-16 | 2009-03-05 | Sony Corp | 転写用基板および有機電界発光素子の製造方法 |
US8425974B2 (en) * | 2007-11-29 | 2013-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Evaporation donor substrate and method for manufacturing light-emitting device |
US8080811B2 (en) | 2007-12-28 | 2011-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing evaporation donor substrate and light-emitting device |
WO2009099002A1 (en) * | 2008-02-04 | 2009-08-13 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and method for manufacturing light-emitting device |
JP5416987B2 (ja) | 2008-02-29 | 2014-02-12 | 株式会社半導体エネルギー研究所 | 成膜方法及び発光装置の作製方法 |
JP2009231277A (ja) * | 2008-02-29 | 2009-10-08 | Semiconductor Energy Lab Co Ltd | 製造装置 |
WO2009107548A1 (en) * | 2008-02-29 | 2009-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and manufacturing method of light-emitting device |
JP5238544B2 (ja) * | 2008-03-07 | 2013-07-17 | 株式会社半導体エネルギー研究所 | 成膜方法及び発光装置の作製方法 |
JP5079722B2 (ja) | 2008-03-07 | 2012-11-21 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
US8182863B2 (en) | 2008-03-17 | 2012-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and manufacturing method of light-emitting device |
JP5244680B2 (ja) * | 2008-04-14 | 2013-07-24 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
US8409672B2 (en) * | 2008-04-24 | 2013-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing evaporation donor substrate and method of manufacturing light-emitting device |
EP2294240B1 (en) * | 2008-06-19 | 2017-03-08 | Utilight Ltd. | Light induced patterning |
US8652872B2 (en) * | 2008-10-12 | 2014-02-18 | Utilight Ltd. | Solar cells and method of manufacturing thereof |
US8486736B2 (en) * | 2008-10-20 | 2013-07-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting device |
WO2011114873A1 (ja) * | 2010-03-18 | 2011-09-22 | 株式会社半導体エネルギー研究所 | 成膜方法及び成膜用基板の作製方法 |
US8951816B2 (en) | 2010-03-18 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Film forming method |
US8900675B2 (en) | 2010-03-18 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and method for manufacturing deposition substrate |
KR20150109013A (ko) * | 2014-03-18 | 2015-10-01 | 삼성디스플레이 주식회사 | 유기막 패턴 형성용 마스크, 이를 이용한 유기막 패턴 형성 방법 및 유기 발광 표시 장치의 제조 방법 |
KR102181239B1 (ko) * | 2014-09-03 | 2020-11-23 | 삼성디스플레이 주식회사 | 박막 형성 장치 및 그를 이용한 박막 형성 방법 |
KR102352406B1 (ko) | 2015-03-02 | 2022-01-19 | 삼성디스플레이 주식회사 | 표시 장치의 제조 방법 및 표시 장치 |
CN113433630B (zh) * | 2016-07-17 | 2022-10-28 | Io技术集团公司 | 用于激光诱导的材料分配的套件和系统 |
CN107706223B (zh) * | 2017-09-29 | 2020-08-14 | 京东方科技集团股份有限公司 | Oled显示结构及显示器、空间点定位系统及方法 |
TWI637481B (zh) | 2017-11-29 | 2018-10-01 | 財團法人工業技術研究院 | 半導體結構、發光裝置及其製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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EP0851714A2 (en) | 1996-12-23 | 1998-07-01 | Samsung Display Devices Co., Ltd. | Donor film for organic thin film of organic electroluminescence device, and method for manufacturing organic electroluminescence device using the same |
WO2000014777A1 (en) | 1998-09-04 | 2000-03-16 | Fed Corporation | Fabrication method for high resolution full color organic led displays |
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NL124075C (US06610455-20030826-C00009.png) | 1959-04-09 | |||
US3658520A (en) | 1968-02-20 | 1972-04-25 | Eastman Kodak Co | Photoconductive elements containing as photoconductors triarylamines substituted by active hydrogen-containing groups |
US3567450A (en) | 1968-02-20 | 1971-03-02 | Eastman Kodak Co | Photoconductive elements containing substituted triarylamine photoconductors |
JPS62128766A (ja) * | 1985-11-29 | 1987-06-11 | Ricoh Co Ltd | レ−ザ熱転写記録装置 |
US4720432A (en) | 1987-02-11 | 1988-01-19 | Eastman Kodak Company | Electroluminescent device with organic luminescent medium |
US4769292A (en) | 1987-03-02 | 1988-09-06 | Eastman Kodak Company | Electroluminescent device with modified thin film luminescent zone |
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JP3401356B2 (ja) | 1995-02-21 | 2003-04-28 | パイオニア株式会社 | 有機エレクトロルミネッセンスディスプレイパネルとその製造方法 |
US5593788A (en) | 1996-04-25 | 1997-01-14 | Eastman Kodak Company | Organic electroluminescent devices with high operational stability |
US5688551A (en) | 1995-11-13 | 1997-11-18 | Eastman Kodak Company | Method of forming an organic electroluminescent display panel |
US5578416A (en) | 1995-11-20 | 1996-11-26 | Eastman Kodak Company | Cinnamal-nitrile dyes for laser recording element |
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US5851709A (en) | 1997-10-31 | 1998-12-22 | Eastman Kodak Company | Method for selective transfer of a color organic layer |
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JP2918037B1 (ja) * | 1998-06-18 | 1999-07-12 | 日本電気株式会社 | カラー有機elディスプレイとその製造方法 |
CN1213127C (zh) | 1998-09-09 | 2005-08-03 | 出光兴产株式会社 | 有机电致发光器件与苯二胺衍生物 |
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AU3908400A (en) | 1999-03-23 | 2000-10-09 | University Of Southern California | Cyclometallated metal complexes as phosphorescent dopants in organic leds |
EP3321954A1 (en) | 1999-05-13 | 2018-05-16 | The Trustees of Princeton University | Very high efficiency organic light emitting devices based on electrophosphorescence |
-
2002
- 2002-01-30 US US10/060,670 patent/US6610455B1/en not_active Expired - Lifetime
- 2002-12-31 TW TW91138026A patent/TWI259738B/zh not_active IP Right Cessation
-
2003
- 2003-01-20 EP EP03075187.9A patent/EP1335637B1/en not_active Expired - Lifetime
- 2003-01-28 KR KR20030005517A patent/KR100910438B1/ko active IP Right Grant
- 2003-01-29 JP JP2003020705A patent/JP2003229259A/ja active Pending
- 2003-01-30 CN CNB031019927A patent/CN100416849C/zh not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0851714A2 (en) | 1996-12-23 | 1998-07-01 | Samsung Display Devices Co., Ltd. | Donor film for organic thin film of organic electroluminescence device, and method for manufacturing organic electroluminescence device using the same |
WO2000014777A1 (en) | 1998-09-04 | 2000-03-16 | Fed Corporation | Fabrication method for high resolution full color organic led displays |
Also Published As
Publication number | Publication date |
---|---|
TWI259738B (en) | 2006-08-01 |
CN100416849C (zh) | 2008-09-03 |
EP1335637A1 (en) | 2003-08-13 |
JP2003229259A (ja) | 2003-08-15 |
CN1436025A (zh) | 2003-08-13 |
US6610455B1 (en) | 2003-08-26 |
KR20030065371A (ko) | 2003-08-06 |
EP1335637B1 (en) | 2017-08-23 |
TW200302679A (en) | 2003-08-01 |
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