KR100910438B1 - 전기발광 디스플레이 장치의 제조방법 - Google Patents

전기발광 디스플레이 장치의 제조방법 Download PDF

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Publication number
KR100910438B1
KR100910438B1 KR20030005517A KR20030005517A KR100910438B1 KR 100910438 B1 KR100910438 B1 KR 100910438B1 KR 20030005517 A KR20030005517 A KR 20030005517A KR 20030005517 A KR20030005517 A KR 20030005517A KR 100910438 B1 KR100910438 B1 KR 100910438B1
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South Korea
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display substrate
donor element
organic
layer
donor
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KR20030005517A
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English (en)
Korean (ko)
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KR20030065371A (ko
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버버리미첼스튜어트
터트리윌리암
컬버미론윌리암
탕칭완
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이스트맨 코닥 캄파니
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/10Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/048Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/18Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/35Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30Coordination compounds
    • H10K85/341Transition metal complexes, e.g. Ru(II)polypyridine complexes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30Coordination compounds
    • H10K85/341Transition metal complexes, e.g. Ru(II)polypyridine complexes
    • H10K85/342Transition metal complexes, e.g. Ru(II)polypyridine complexes comprising iridium
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30Coordination compounds
    • H10K85/351Metal complexes comprising lanthanides or actinides, e.g. comprising europium
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/615Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/631Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/649Aromatic compounds comprising a hetero atom

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
KR20030005517A 2002-01-30 2003-01-28 전기발광 디스플레이 장치의 제조방법 KR100910438B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/060,670 US6610455B1 (en) 2002-01-30 2002-01-30 Making electroluminscent display devices
US10/060,670 2002-01-30

Publications (2)

Publication Number Publication Date
KR20030065371A KR20030065371A (ko) 2003-08-06
KR100910438B1 true KR100910438B1 (ko) 2009-08-04

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KR20030005517A KR100910438B1 (ko) 2002-01-30 2003-01-28 전기발광 디스플레이 장치의 제조방법

Country Status (6)

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US (1) US6610455B1 (US06610455-20030826-C00009.png)
EP (1) EP1335637B1 (US06610455-20030826-C00009.png)
JP (1) JP2003229259A (US06610455-20030826-C00009.png)
KR (1) KR100910438B1 (US06610455-20030826-C00009.png)
CN (1) CN100416849C (US06610455-20030826-C00009.png)
TW (1) TWI259738B (US06610455-20030826-C00009.png)

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JP2004184797A (ja) * 2002-12-05 2004-07-02 Seiko Epson Corp 電子装置及びその製造方法並びに電子機器
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KR20060017414A (ko) * 2004-08-20 2006-02-23 삼성에스디아이 주식회사 유기 전계 발광 소자의 제조 방법
KR20060020044A (ko) * 2004-08-30 2006-03-06 삼성에스디아이 주식회사 유기전계발광표시장치 및 도너 기판의 제조방법
KR100699993B1 (ko) * 2004-08-30 2007-03-26 삼성에스디아이 주식회사 레이저 열전사 방법
KR20060020045A (ko) * 2004-08-30 2006-03-06 삼성에스디아이 주식회사 유기전계발광표시장치의 제조방법
KR20060020031A (ko) * 2004-08-30 2006-03-06 삼성에스디아이 주식회사 레이저 열전사 장치
KR100860005B1 (ko) * 2004-09-21 2008-09-25 삼성에스디아이 주식회사 유기 전계 발광 소자의 제조 방법
KR20060027750A (ko) * 2004-09-23 2006-03-28 삼성에스디아이 주식회사 유기 전계 발광 소자의 제조 방법
KR100721565B1 (ko) * 2004-11-17 2007-05-23 삼성에스디아이 주식회사 저분자 유기 전계 발광 소자 및 그의 제조 방법
KR100700641B1 (ko) * 2004-12-03 2007-03-27 삼성에스디아이 주식회사 레이저 조사 장치, 패터닝 방법 및 그를 이용한 레이저열전사 패터닝 방법과 이를 이용한 유기 전계 발광 소자의제조 방법
KR100635579B1 (ko) 2004-12-20 2006-10-17 삼성에스디아이 주식회사 레이저 열 전사장치, 상기 장치를 사용하는 레이저 열전사법 및 상기 장치를 사용하는 유기전계발광표시장치제조방법
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KR100712289B1 (ko) 2005-04-07 2007-04-27 삼성에스디아이 주식회사 평판표시장치 및 그의 제조방법
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JP2006309994A (ja) * 2005-04-27 2006-11-09 Sony Corp 転写用基板および転写方法ならびに表示装置の製造方法
US7534545B2 (en) 2005-08-30 2009-05-19 Samsung Sdi Co., Ltd. Method of making an organic light emitting display device
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US8425974B2 (en) * 2007-11-29 2013-04-23 Semiconductor Energy Laboratory Co., Ltd. Evaporation donor substrate and method for manufacturing light-emitting device
US8080811B2 (en) 2007-12-28 2011-12-20 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing evaporation donor substrate and light-emitting device
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JP5416987B2 (ja) 2008-02-29 2014-02-12 株式会社半導体エネルギー研究所 成膜方法及び発光装置の作製方法
JP2009231277A (ja) * 2008-02-29 2009-10-08 Semiconductor Energy Lab Co Ltd 製造装置
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JP5238544B2 (ja) * 2008-03-07 2013-07-17 株式会社半導体エネルギー研究所 成膜方法及び発光装置の作製方法
JP5079722B2 (ja) 2008-03-07 2012-11-21 株式会社半導体エネルギー研究所 発光装置の作製方法
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JP5244680B2 (ja) * 2008-04-14 2013-07-24 株式会社半導体エネルギー研究所 発光装置の作製方法
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KR20150109013A (ko) * 2014-03-18 2015-10-01 삼성디스플레이 주식회사 유기막 패턴 형성용 마스크, 이를 이용한 유기막 패턴 형성 방법 및 유기 발광 표시 장치의 제조 방법
KR102181239B1 (ko) * 2014-09-03 2020-11-23 삼성디스플레이 주식회사 박막 형성 장치 및 그를 이용한 박막 형성 방법
KR102352406B1 (ko) 2015-03-02 2022-01-19 삼성디스플레이 주식회사 표시 장치의 제조 방법 및 표시 장치
CN113433630B (zh) * 2016-07-17 2022-10-28 Io技术集团公司 用于激光诱导的材料分配的套件和系统
CN107706223B (zh) * 2017-09-29 2020-08-14 京东方科技集团股份有限公司 Oled显示结构及显示器、空间点定位系统及方法
TWI637481B (zh) 2017-11-29 2018-10-01 財團法人工業技術研究院 半導體結構、發光裝置及其製造方法

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Also Published As

Publication number Publication date
TWI259738B (en) 2006-08-01
CN100416849C (zh) 2008-09-03
EP1335637A1 (en) 2003-08-13
JP2003229259A (ja) 2003-08-15
CN1436025A (zh) 2003-08-13
US6610455B1 (en) 2003-08-26
KR20030065371A (ko) 2003-08-06
EP1335637B1 (en) 2017-08-23
TW200302679A (en) 2003-08-01

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