KR100887126B1 - 도전성 이송 부재 및 그의 제조 방법 - Google Patents

도전성 이송 부재 및 그의 제조 방법 Download PDF

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Publication number
KR100887126B1
KR100887126B1 KR1020047008426A KR20047008426A KR100887126B1 KR 100887126 B1 KR100887126 B1 KR 100887126B1 KR 1020047008426 A KR1020047008426 A KR 1020047008426A KR 20047008426 A KR20047008426 A KR 20047008426A KR 100887126 B1 KR100887126 B1 KR 100887126B1
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KR
South Korea
Prior art keywords
carbon fiber
polymer
composite material
conductive polymer
fiber reinforced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020047008426A
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English (en)
Korean (ko)
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KR20050044642A (ko
Inventor
슈지 사까이
크리스 엘. 밀러
다이스께 우찌다
다까시 고바야시
겐이찌 아오야기
신지 야마모또
Original Assignee
이 아이 듀폰 디 네모아 앤드 캄파니
니폰 오일 코포레이션 (신 니혼 세키유 가부시키 가이샤)
이시하라 야쿠힌 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이 아이 듀폰 디 네모아 앤드 캄파니, 니폰 오일 코포레이션 (신 니혼 세키유 가부시키 가이샤), 이시하라 야쿠힌 가부시끼가이샤 filed Critical 이 아이 듀폰 디 네모아 앤드 캄파니
Publication of KR20050044642A publication Critical patent/KR20050044642A/ko
Application granted granted Critical
Publication of KR100887126B1 publication Critical patent/KR100887126B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Robotics (AREA)
  • Laminated Bodies (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Crystal (AREA)
  • Moulding By Coating Moulds (AREA)
  • Conductive Materials (AREA)
KR1020047008426A 2001-12-03 2002-12-02 도전성 이송 부재 및 그의 제조 방법 Expired - Fee Related KR100887126B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US33458701P 2001-12-03 2001-12-03
US60/334,587 2001-12-03
PCT/US2002/041653 WO2003049157A1 (en) 2001-12-03 2002-12-02 Transfer member with electric conductivity and its manufacturing method

Publications (2)

Publication Number Publication Date
KR20050044642A KR20050044642A (ko) 2005-05-12
KR100887126B1 true KR100887126B1 (ko) 2009-03-04

Family

ID=23307891

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020047008426A Expired - Fee Related KR100887126B1 (ko) 2001-12-03 2002-12-02 도전성 이송 부재 및 그의 제조 방법

Country Status (11)

Country Link
EP (1) EP1451854B1 (enExample)
JP (1) JP4383173B2 (enExample)
KR (1) KR100887126B1 (enExample)
CN (1) CN1332419C (enExample)
AT (1) ATE308799T1 (enExample)
AU (1) AU2002360823A1 (enExample)
CA (1) CA2469475C (enExample)
DE (1) DE60207105T2 (enExample)
ES (1) ES2251626T3 (enExample)
TW (1) TWI276194B (enExample)
WO (1) WO2003049157A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6794662B1 (en) * 2003-10-07 2004-09-21 Ibis Technology Corporation Thermosetting resin wafer-holding pin
DE10357698A1 (de) * 2003-12-09 2005-07-14 Schunk Kohlenstofftechnik Gmbh Träger für zu behandelnde Gegenstände sowie Verfahren zur Herstellung eines solchen
JP2006049384A (ja) * 2004-07-30 2006-02-16 Laserfront Technologies Inc ガントリー型ｘｙステージ
JP2007005582A (ja) * 2005-06-24 2007-01-11 Asm Japan Kk 基板搬送装置及びそれを搭載した半導体基板製造装置
JP2007201066A (ja) * 2006-01-25 2007-08-09 Murata Mach Ltd 枚葉搬送用トレイ及び枚葉搬送用トレイの保管又は搬送装置
JP4895635B2 (ja) * 2006-02-20 2012-03-14 セイコーインスツル株式会社 搬送装置
US20070221335A1 (en) * 2006-03-23 2007-09-27 Recif Technologies Device for contact by adhesion to a glass or semiconductor plate (wafer) surface or the like and system for gripping such a plate comprising such a device
JP2008034723A (ja) * 2006-07-31 2008-02-14 Shin Etsu Polymer Co Ltd 半導体ウェーハ用接触部品
WO2017188377A1 (ja) * 2016-04-27 2017-11-02 京セラ株式会社 試料搬送部材
JP7093655B2 (ja) * 2018-03-20 2022-06-30 三菱重工業株式会社 複合材料構造体及び複合材料構造体の製造方法
CN108646395A (zh) * 2018-05-04 2018-10-12 江苏羿骏自动化科技有限公司 一种多工位移动型显微镜检测设备
JP7471743B2 (ja) * 2019-11-20 2024-04-22 株式会社ディスコ 搬送路
JP2022102893A (ja) * 2020-12-25 2022-07-07 京セラ株式会社 試料搬送部材

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010049514A (ko) * 1999-06-09 2001-06-15 오오자와 지로 반송용 부재
KR20010105202A (ko) * 2000-05-17 2001-11-28 오오사와 슈지로 자외선 내성을 갖는 섬유강화 복합재료제의 반송용 부재및 그의 제조방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58207651A (ja) * 1982-05-28 1983-12-03 Hitachi Ltd 静電防止型収容治具
JPS63133644A (ja) * 1986-11-26 1988-06-06 Hitachi Electronics Eng Co Ltd ウエハ搬送フオ−ク
JPH03296243A (ja) * 1990-04-13 1991-12-26 Toshiba Ceramics Co Ltd 半導体ウエハの取扱い用治具
JP2979194B2 (ja) * 1990-05-31 1999-11-15 京セラ株式会社 真空吸着装置
US5280979A (en) * 1991-06-20 1994-01-25 Recif, S.A. Tip for a vacuum pipette with improved electrostatic discharge properties
JPH08288190A (ja) * 1995-04-19 1996-11-01 Hitachi Ltd 物品取扱部材およびその製造方法および収納容器ならびに物品取扱装置
JP2000343476A (ja) * 1999-06-09 2000-12-12 Nippon Mitsubishi Oil Corp 搬送用部材

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010049514A (ko) * 1999-06-09 2001-06-15 오오자와 지로 반송용 부재
KR20010105202A (ko) * 2000-05-17 2001-11-28 오오사와 슈지로 자외선 내성을 갖는 섬유강화 복합재료제의 반송용 부재및 그의 제조방법

Also Published As

Publication number Publication date
KR20050044642A (ko) 2005-05-12
CN1599947A (zh) 2005-03-23
EP1451854B1 (en) 2005-11-02
TW200303064A (en) 2003-08-16
ATE308799T1 (de) 2005-11-15
DE60207105D1 (de) 2005-12-08
DE60207105T2 (de) 2006-07-27
CA2469475C (en) 2012-06-26
TWI276194B (en) 2007-03-11
ES2251626T3 (es) 2006-05-01
AU2002360823A1 (en) 2003-06-17
WO2003049157A1 (en) 2003-06-12
JP2005512319A (ja) 2005-04-28
CN1332419C (zh) 2007-08-15
CA2469475A1 (en) 2003-06-12
JP4383173B2 (ja) 2009-12-16
EP1451854A1 (en) 2004-09-01

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