KR100873001B1 - 리니어 모터 및 그 제조방법 그리고 이 리니어 모터를이용한 스테이지장치 - Google Patents

리니어 모터 및 그 제조방법 그리고 이 리니어 모터를이용한 스테이지장치 Download PDF

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Publication number
KR100873001B1
KR100873001B1 KR1020077016470A KR20077016470A KR100873001B1 KR 100873001 B1 KR100873001 B1 KR 100873001B1 KR 1020077016470 A KR1020077016470 A KR 1020077016470A KR 20077016470 A KR20077016470 A KR 20077016470A KR 100873001 B1 KR100873001 B1 KR 100873001B1
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KR
South Korea
Prior art keywords
coil
linear motor
glass film
cooling water
cover member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020077016470A
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English (en)
Korean (ko)
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KR20070091022A (ko
Inventor
다이스케 시노히라
도타로 우스이
Original Assignee
스미도모쥬기가이고교 가부시키가이샤
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Publication of KR20070091022A publication Critical patent/KR20070091022A/ko
Application granted granted Critical
Publication of KR100873001B1 publication Critical patent/KR100873001B1/ko
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
    • H02K3/24—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors with channels or ducts for cooling medium between the conductors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/19—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Motor Or Generator Cooling System (AREA)
  • Manufacture Of Motors, Generators (AREA)
KR1020077016470A 2005-01-27 2005-12-28 리니어 모터 및 그 제조방법 그리고 이 리니어 모터를이용한 스테이지장치 Expired - Fee Related KR100873001B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00020217 2005-01-27
JP2005020217A JP4558524B2 (ja) 2005-01-27 2005-01-27 リニアモータ及びその製造方法及びこのリニアモータを用いたステージ装置

Publications (2)

Publication Number Publication Date
KR20070091022A KR20070091022A (ko) 2007-09-06
KR100873001B1 true KR100873001B1 (ko) 2008-12-09

Family

ID=36740209

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077016470A Expired - Fee Related KR100873001B1 (ko) 2005-01-27 2005-12-28 리니어 모터 및 그 제조방법 그리고 이 리니어 모터를이용한 스테이지장치

Country Status (6)

Country Link
US (1) US20070252445A1 (https=)
JP (1) JP4558524B2 (https=)
KR (1) KR100873001B1 (https=)
CN (1) CN100596004C (https=)
TW (1) TW200629695A (https=)
WO (1) WO2006080176A1 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2360818A2 (en) * 2004-05-18 2011-08-24 Kabushiki Kaisha Yaskawa Denki Armature of canned linear motor and canned linear motor
KR101151575B1 (ko) * 2004-10-01 2012-06-01 가부시키가이샤 니콘 리니어 모터, 스테이지 장치 및 노광 장치
GB2438816B (en) * 2005-04-12 2009-04-01 Yaskawa Denki Seisakusho Kk Canned linear motor armature and canned linear motor
JP4531737B2 (ja) * 2006-11-07 2010-08-25 住友重機械工業株式会社 型締装置
NO20084775A (no) * 2008-11-12 2010-05-10 Smart Motor As Anordning ved en elektrisk maskin samt en framgangsmåte for tilvirkning av statorseksjoner for slike maskiner
JP2010178483A (ja) * 2009-01-29 2010-08-12 Toshiba Mach Co Ltd リニアモータ
JP5216118B2 (ja) * 2011-04-08 2013-06-19 株式会社テクノ高槻 電磁部への流体漏洩防止機能付き電磁振動型ダイヤフラムポンプ
CN102761189B (zh) * 2011-04-28 2014-12-17 上海微电子装备有限公司 具有导流装置的直线电机
KR101428419B1 (ko) 2013-08-30 2014-08-08 주식회사 포스코 절연특성이 우수한 태양전지용 기판 및 그 제조방법
DE102014106851A1 (de) * 2014-05-15 2015-11-19 Dr. Ing. H.C. F. Porsche Aktiengesellschaft Elektrische Maschine, Spulenpaket für eine elektrische Maschine und Verfahren zum Herstellen desselben
EP3324521B1 (de) * 2016-11-16 2020-04-15 Etel S. A.. Kühlplatte für einen linearmotor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03261346A (ja) * 1989-10-30 1991-11-21 Constr Electrique Du Centre Celduc リニヤモータインダクターの冷却装置
US6590355B1 (en) 1999-06-07 2003-07-08 Nikon Corporation Linear motor device, stage device, and exposure apparatus
JP2004254494A (ja) 2003-01-27 2004-09-09 Nikon Corp リニアモータ装置、ステージ装置及び露光装置並びにリニアモータ装置の製造方法
US20050057102A1 (en) 2003-09-11 2005-03-17 Nikon Corporation Holding member, coolant, cooling method and cooling device, linear motor device, stage device, and exposure apparatus

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2330189A1 (fr) * 1975-10-30 1977-05-27 Guimbal Jean Moteur lineaire de grande puissance et a grande vitesse
US4696100A (en) * 1985-02-21 1987-09-29 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a chip coil
US5239222A (en) * 1989-04-24 1993-08-24 Fujitsu Limited Electrostatic actuator using films
WO1991016757A1 (en) * 1990-04-16 1991-10-31 Fujitsu Limited Electrostatic actuator
US6673463B1 (en) * 1995-08-02 2004-01-06 Matsushita Electric Industrial Co., Ltd. Structure material and molded product using the same and decomposing method thereof
JP3478084B2 (ja) * 1997-10-14 2003-12-10 日立金属株式会社 リニアモータ
CN1156035C (zh) * 2001-06-14 2004-06-30 中国科学院上海冶金研究所 有机发光器件的保护膜及它的封装方法
JP3809381B2 (ja) * 2002-01-28 2006-08-16 キヤノン株式会社 リニアモータ、ステージ装置、露光装置及びデバイス製造方法
US6806594B2 (en) * 2002-02-20 2004-10-19 Sumitomo Heavy Industries, Ltd. Coil unit for linear motor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03261346A (ja) * 1989-10-30 1991-11-21 Constr Electrique Du Centre Celduc リニヤモータインダクターの冷却装置
US6590355B1 (en) 1999-06-07 2003-07-08 Nikon Corporation Linear motor device, stage device, and exposure apparatus
JP2004254494A (ja) 2003-01-27 2004-09-09 Nikon Corp リニアモータ装置、ステージ装置及び露光装置並びにリニアモータ装置の製造方法
US20050057102A1 (en) 2003-09-11 2005-03-17 Nikon Corporation Holding member, coolant, cooling method and cooling device, linear motor device, stage device, and exposure apparatus

Also Published As

Publication number Publication date
WO2006080176A1 (ja) 2006-08-03
TWI301688B (https=) 2008-10-01
JP4558524B2 (ja) 2010-10-06
CN100596004C (zh) 2010-03-24
JP2006211817A (ja) 2006-08-10
KR20070091022A (ko) 2007-09-06
TW200629695A (en) 2006-08-16
CN101103512A (zh) 2008-01-09
US20070252445A1 (en) 2007-11-01

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