JP4558524B2 - リニアモータ及びその製造方法及びこのリニアモータを用いたステージ装置 - Google Patents

リニアモータ及びその製造方法及びこのリニアモータを用いたステージ装置 Download PDF

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Publication number
JP4558524B2
JP4558524B2 JP2005020217A JP2005020217A JP4558524B2 JP 4558524 B2 JP4558524 B2 JP 4558524B2 JP 2005020217 A JP2005020217 A JP 2005020217A JP 2005020217 A JP2005020217 A JP 2005020217A JP 4558524 B2 JP4558524 B2 JP 4558524B2
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JP
Japan
Prior art keywords
coil
linear motor
glass film
cooling water
coils
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005020217A
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English (en)
Japanese (ja)
Other versions
JP2006211817A (ja
Inventor
大輔 篠平
道太郎 臼井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2005020217A priority Critical patent/JP4558524B2/ja
Priority to TW094143653A priority patent/TW200629695A/zh
Priority to PCT/JP2005/024062 priority patent/WO2006080176A1/ja
Priority to CN200580046966A priority patent/CN100596004C/zh
Priority to KR1020077016470A priority patent/KR100873001B1/ko
Publication of JP2006211817A publication Critical patent/JP2006211817A/ja
Priority to US11/822,001 priority patent/US20070252445A1/en
Application granted granted Critical
Publication of JP4558524B2 publication Critical patent/JP4558524B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
    • H02K3/24—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors with channels or ducts for cooling medium between the conductors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/19—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Motor Or Generator Cooling System (AREA)
  • Manufacture Of Motors, Generators (AREA)
JP2005020217A 2005-01-27 2005-01-27 リニアモータ及びその製造方法及びこのリニアモータを用いたステージ装置 Expired - Fee Related JP4558524B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2005020217A JP4558524B2 (ja) 2005-01-27 2005-01-27 リニアモータ及びその製造方法及びこのリニアモータを用いたステージ装置
TW094143653A TW200629695A (en) 2005-01-27 2005-12-09 Linear motorand manufacturing method thereof, and the carrier with the same
PCT/JP2005/024062 WO2006080176A1 (ja) 2005-01-27 2005-12-28 リニアモータ及びその製造方法及びこのリニアモータを用いたステージ装置
CN200580046966A CN100596004C (zh) 2005-01-27 2005-12-28 线性电动机及其制造方法以及使用了该线性电动机的载物台装置
KR1020077016470A KR100873001B1 (ko) 2005-01-27 2005-12-28 리니어 모터 및 그 제조방법 그리고 이 리니어 모터를이용한 스테이지장치
US11/822,001 US20070252445A1 (en) 2005-01-27 2007-06-29 Linear motor, manufacturing method of the linear motor, and stage apparatus using the linear motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005020217A JP4558524B2 (ja) 2005-01-27 2005-01-27 リニアモータ及びその製造方法及びこのリニアモータを用いたステージ装置

Publications (2)

Publication Number Publication Date
JP2006211817A JP2006211817A (ja) 2006-08-10
JP4558524B2 true JP4558524B2 (ja) 2010-10-06

Family

ID=36740209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005020217A Expired - Fee Related JP4558524B2 (ja) 2005-01-27 2005-01-27 リニアモータ及びその製造方法及びこのリニアモータを用いたステージ装置

Country Status (6)

Country Link
US (1) US20070252445A1 (https=)
JP (1) JP4558524B2 (https=)
KR (1) KR100873001B1 (https=)
CN (1) CN100596004C (https=)
TW (1) TW200629695A (https=)
WO (1) WO2006080176A1 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2360818A2 (en) * 2004-05-18 2011-08-24 Kabushiki Kaisha Yaskawa Denki Armature of canned linear motor and canned linear motor
KR101151575B1 (ko) * 2004-10-01 2012-06-01 가부시키가이샤 니콘 리니어 모터, 스테이지 장치 및 노광 장치
GB2438816B (en) * 2005-04-12 2009-04-01 Yaskawa Denki Seisakusho Kk Canned linear motor armature and canned linear motor
JP4531737B2 (ja) * 2006-11-07 2010-08-25 住友重機械工業株式会社 型締装置
NO20084775A (no) * 2008-11-12 2010-05-10 Smart Motor As Anordning ved en elektrisk maskin samt en framgangsmåte for tilvirkning av statorseksjoner for slike maskiner
JP2010178483A (ja) * 2009-01-29 2010-08-12 Toshiba Mach Co Ltd リニアモータ
JP5216118B2 (ja) * 2011-04-08 2013-06-19 株式会社テクノ高槻 電磁部への流体漏洩防止機能付き電磁振動型ダイヤフラムポンプ
CN102761189B (zh) * 2011-04-28 2014-12-17 上海微电子装备有限公司 具有导流装置的直线电机
KR101428419B1 (ko) 2013-08-30 2014-08-08 주식회사 포스코 절연특성이 우수한 태양전지용 기판 및 그 제조방법
DE102014106851A1 (de) * 2014-05-15 2015-11-19 Dr. Ing. H.C. F. Porsche Aktiengesellschaft Elektrische Maschine, Spulenpaket für eine elektrische Maschine und Verfahren zum Herstellen desselben
EP3324521B1 (de) * 2016-11-16 2020-04-15 Etel S. A.. Kühlplatte für einen linearmotor

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2330189A1 (fr) * 1975-10-30 1977-05-27 Guimbal Jean Moteur lineaire de grande puissance et a grande vitesse
US4696100A (en) * 1985-02-21 1987-09-29 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a chip coil
US5239222A (en) * 1989-04-24 1993-08-24 Fujitsu Limited Electrostatic actuator using films
FR2653949B1 (fr) * 1989-10-30 1992-02-07 Celduc Const Elect Centre Dispositif de refroidissement pour inducteur de moteur lineaire.
WO1991016757A1 (en) * 1990-04-16 1991-10-31 Fujitsu Limited Electrostatic actuator
US6673463B1 (en) * 1995-08-02 2004-01-06 Matsushita Electric Industrial Co., Ltd. Structure material and molded product using the same and decomposing method thereof
JP3478084B2 (ja) * 1997-10-14 2003-12-10 日立金属株式会社 リニアモータ
US6590355B1 (en) 1999-06-07 2003-07-08 Nikon Corporation Linear motor device, stage device, and exposure apparatus
CN1156035C (zh) * 2001-06-14 2004-06-30 中国科学院上海冶金研究所 有机发光器件的保护膜及它的封装方法
JP3809381B2 (ja) * 2002-01-28 2006-08-16 キヤノン株式会社 リニアモータ、ステージ装置、露光装置及びデバイス製造方法
US6806594B2 (en) * 2002-02-20 2004-10-19 Sumitomo Heavy Industries, Ltd. Coil unit for linear motor
JP2004254494A (ja) * 2003-01-27 2004-09-09 Nikon Corp リニアモータ装置、ステージ装置及び露光装置並びにリニアモータ装置の製造方法
US20050057102A1 (en) 2003-09-11 2005-03-17 Nikon Corporation Holding member, coolant, cooling method and cooling device, linear motor device, stage device, and exposure apparatus

Also Published As

Publication number Publication date
WO2006080176A1 (ja) 2006-08-03
KR100873001B1 (ko) 2008-12-09
TWI301688B (https=) 2008-10-01
CN100596004C (zh) 2010-03-24
JP2006211817A (ja) 2006-08-10
KR20070091022A (ko) 2007-09-06
TW200629695A (en) 2006-08-16
CN101103512A (zh) 2008-01-09
US20070252445A1 (en) 2007-11-01

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