TWI301688B - - Google Patents

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Publication number
TWI301688B
TWI301688B TW094143653A TW94143653A TWI301688B TW I301688 B TWI301688 B TW I301688B TW 094143653 A TW094143653 A TW 094143653A TW 94143653 A TW94143653 A TW 94143653A TW I301688 B TWI301688 B TW I301688B
Authority
TW
Taiwan
Prior art keywords
coil
glass film
linear motor
cooling water
coils
Prior art date
Application number
TW094143653A
Other languages
English (en)
Chinese (zh)
Other versions
TW200629695A (en
Inventor
Daisuke Shinohira
Dotaro Usui
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW200629695A publication Critical patent/TW200629695A/zh
Application granted granted Critical
Publication of TWI301688B publication Critical patent/TWI301688B/zh

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
    • H02K3/24—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors with channels or ducts for cooling medium between the conductors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/19—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Motor Or Generator Cooling System (AREA)
  • Manufacture Of Motors, Generators (AREA)
TW094143653A 2005-01-27 2005-12-09 Linear motorand manufacturing method thereof, and the carrier with the same TW200629695A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005020217A JP4558524B2 (ja) 2005-01-27 2005-01-27 リニアモータ及びその製造方法及びこのリニアモータを用いたステージ装置

Publications (2)

Publication Number Publication Date
TW200629695A TW200629695A (en) 2006-08-16
TWI301688B true TWI301688B (https=) 2008-10-01

Family

ID=36740209

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094143653A TW200629695A (en) 2005-01-27 2005-12-09 Linear motorand manufacturing method thereof, and the carrier with the same

Country Status (6)

Country Link
US (1) US20070252445A1 (https=)
JP (1) JP4558524B2 (https=)
KR (1) KR100873001B1 (https=)
CN (1) CN100596004C (https=)
TW (1) TW200629695A (https=)
WO (1) WO2006080176A1 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2360818A2 (en) * 2004-05-18 2011-08-24 Kabushiki Kaisha Yaskawa Denki Armature of canned linear motor and canned linear motor
KR101151575B1 (ko) * 2004-10-01 2012-06-01 가부시키가이샤 니콘 리니어 모터, 스테이지 장치 및 노광 장치
GB2438816B (en) * 2005-04-12 2009-04-01 Yaskawa Denki Seisakusho Kk Canned linear motor armature and canned linear motor
JP4531737B2 (ja) * 2006-11-07 2010-08-25 住友重機械工業株式会社 型締装置
NO20084775A (no) * 2008-11-12 2010-05-10 Smart Motor As Anordning ved en elektrisk maskin samt en framgangsmåte for tilvirkning av statorseksjoner for slike maskiner
JP2010178483A (ja) * 2009-01-29 2010-08-12 Toshiba Mach Co Ltd リニアモータ
JP5216118B2 (ja) * 2011-04-08 2013-06-19 株式会社テクノ高槻 電磁部への流体漏洩防止機能付き電磁振動型ダイヤフラムポンプ
CN102761189B (zh) * 2011-04-28 2014-12-17 上海微电子装备有限公司 具有导流装置的直线电机
KR101428419B1 (ko) 2013-08-30 2014-08-08 주식회사 포스코 절연특성이 우수한 태양전지용 기판 및 그 제조방법
DE102014106851A1 (de) * 2014-05-15 2015-11-19 Dr. Ing. H.C. F. Porsche Aktiengesellschaft Elektrische Maschine, Spulenpaket für eine elektrische Maschine und Verfahren zum Herstellen desselben
EP3324521B1 (de) * 2016-11-16 2020-04-15 Etel S. A.. Kühlplatte für einen linearmotor

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2330189A1 (fr) * 1975-10-30 1977-05-27 Guimbal Jean Moteur lineaire de grande puissance et a grande vitesse
US4696100A (en) * 1985-02-21 1987-09-29 Matsushita Electric Industrial Co., Ltd. Method of manufacturing a chip coil
US5239222A (en) * 1989-04-24 1993-08-24 Fujitsu Limited Electrostatic actuator using films
FR2653949B1 (fr) * 1989-10-30 1992-02-07 Celduc Const Elect Centre Dispositif de refroidissement pour inducteur de moteur lineaire.
WO1991016757A1 (en) * 1990-04-16 1991-10-31 Fujitsu Limited Electrostatic actuator
US6673463B1 (en) * 1995-08-02 2004-01-06 Matsushita Electric Industrial Co., Ltd. Structure material and molded product using the same and decomposing method thereof
JP3478084B2 (ja) * 1997-10-14 2003-12-10 日立金属株式会社 リニアモータ
US6590355B1 (en) 1999-06-07 2003-07-08 Nikon Corporation Linear motor device, stage device, and exposure apparatus
CN1156035C (zh) * 2001-06-14 2004-06-30 中国科学院上海冶金研究所 有机发光器件的保护膜及它的封装方法
JP3809381B2 (ja) * 2002-01-28 2006-08-16 キヤノン株式会社 リニアモータ、ステージ装置、露光装置及びデバイス製造方法
US6806594B2 (en) * 2002-02-20 2004-10-19 Sumitomo Heavy Industries, Ltd. Coil unit for linear motor
JP2004254494A (ja) * 2003-01-27 2004-09-09 Nikon Corp リニアモータ装置、ステージ装置及び露光装置並びにリニアモータ装置の製造方法
US20050057102A1 (en) 2003-09-11 2005-03-17 Nikon Corporation Holding member, coolant, cooling method and cooling device, linear motor device, stage device, and exposure apparatus

Also Published As

Publication number Publication date
WO2006080176A1 (ja) 2006-08-03
KR100873001B1 (ko) 2008-12-09
JP4558524B2 (ja) 2010-10-06
CN100596004C (zh) 2010-03-24
JP2006211817A (ja) 2006-08-10
KR20070091022A (ko) 2007-09-06
TW200629695A (en) 2006-08-16
CN101103512A (zh) 2008-01-09
US20070252445A1 (en) 2007-11-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees