Classifications

• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02K—DYNAMO-ELECTRIC MACHINES
  • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
  • H02K41/02—Linear motors; Sectional motors
• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02K—DYNAMO-ELECTRIC MACHINES
  • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
  • H02K41/02—Linear motors; Sectional motors
  • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02K—DYNAMO-ELECTRIC MACHINES
  • H02K3/00—Details of windings
  • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
  • H02K3/24—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors with channels or ducts for cooling medium between the conductors
• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02K—DYNAMO-ELECTRIC MACHINES
  • H02K9/00—Arrangements for cooling or ventilating
  • H02K9/19—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil

Definitions

• the present invention relates to a linear motor configured to supply cooling water around a coil to suppress heat generation of the linear motor, a manufacturing method thereof, and an improvement of a stage apparatus using the linear motor.
• a linear motor is used as a driving means for driving a stage on which a workpiece such as a substrate is placed.
• the translation drive is controlled by a pair of linear motors!
• the configuration of the linear motor includes a moving coil system in which the magnet yoke part is a fixed side and the coil part is a movable side, and a moving magnet system in which the coil part is a fixed side and the magnet yoke part is a movable side. is there.
• the linear motor is provided with cooling means for cooling the coil portion in order to reduce the influence of heat generated from the coil.
• this cooling means for example, a cooling pipe is attached to the coil section, and a refrigerant or pure water is supplied to the cooling pipe to cool the heat of the coil (see, for example, Patent Document 1).
• a plurality of coils are covered with a resin material called a holder and a mold, and a resin material such as CFRP (Carbon Fiber Reinforced Plastics) reinforced with a metal such as stainless steel or carbon fiber around its periphery, or
• CFRP Carbon Fiber Reinforced Plastics
• a cooling channel is formed between the resin material and the cover member by covering with a cover member that also has ceramic isotropic force.
• an inert refrigerant fluorine-based inert liquid
• This inert refrigerant has the property that it does not impair the function of the linear motor itself and does not affect the insulation of the coil, but has a relatively low specific heat, so that it can increase the cooling efficiency. difficult.
• Patent Document 1 Japanese Patent Laid-Open No. 2003-224961
• the linear motor is configured to generate a thrust (driving force) by flowing an electric current through the coil array
• the linear motor is configured to obtain a larger thrust or increase the moving speed of the movable part.
• the amount of heat generated by the coil increases, which not only degrades the performance of the linear motor itself, but also affects the precision positioning equipment such as laser manufacturing equipment such as laser interferometers.
• a structural member that receives or supports a moving part is deformed by a change in temperature, a phenomenon occurs that causes an obstacle to precise positioning.
• an object of the present invention is to provide a linear motor, a method of manufacturing a coil of the linear motor, and a stage device using the linear motor, which have solved the above problems.
• the present invention has the following features.
• the present invention provides a coil part in which a plurality of coils are arranged in parallel, a magnet yoke part in which a plurality of permanent magnets are arranged in parallel so as to face the coil part, a cover member that covers the coil part, A coil cooling part that is formed inside the cover member and cools the coil part by supplying cooling water, the coil part forming a grease material around the plurality of coils, A glass film is formed on the surface of the resin material and solves the above problems.
• the present invention solves the above problems by forming a glass film on the inner surface of the cover member.
• the coil portion includes a first glass film formed around the plurality of coils, a resin material is formed on a surface of the first glass film, and a second glass is formed on the surface of the resin material.
• the coil portion has a lead wire passage for guiding lead wires drawn out from the plurality of coils to the outside of the cover member, and a glass film is formed on an outer periphery of the lead wire passage.
• the present invention provides a first step of arranging a plurality of coils in parallel, a second step of forming a resin material around the plurality of coils, and a glass film on the surface of the resin material.
• a fourth step of covering the periphery of the glass film with a cover member that forms a cooling water flow path to which cooling water is supplied, and a lead wire for drawing out the lead wire drawn from the coil A fifth step of attaching a passage to the inside of the end of the cover member, and a sixth step of attaching the magnet yoke portion so that a magnet yoke portion having a plurality of permanent magnets faces the coil portion. Therefore, the above problem is solved.
• the present invention is a stage apparatus using the linear motor as a driving means, and solves the above problems.
• the heat of the coil can be efficiently cooled by supplying the cooling water.
• the glass film can prevent the cooling water from penetrating the coil and the resin material, and can prevent the occurrence of dielectric breakdown and cracks due to the cooling water.
• the insulating material on the coil surface can prevent the metal ions from melting.
• the glass film is formed on the inner surface of the cover member, it is possible to prevent the metal ions from being dissolved into the cover member due to the cooling water.
• the first glass film is formed around the plurality of coils, the resin material is formed on the surface of the first glass film, and the second glass film is formed on the surface of the resin material. Since it is formed, the double glass film can prevent the cooling water from penetrating, and the cooling water can prevent the insulating material and metal ions on the coil surface from melting.
• the lead wire passage that guides the lead wires drawn from the plurality of coils to the outside of the cover member is formed, and the glass film is formed on the outer periphery of the lead wire passage.
• the cooling water can be prevented from penetrating, and the lead wire force can also be prevented by the cooling water from melting out the metal ions.
• FIG. 1 is a plan view of a stage apparatus to which an embodiment of a linear motor according to the present invention is applied.
• FIG. 2 is a perspective view showing the configuration of the linear motor 20.
• FIG. 3A is a diagram showing the internal structure of the coil unit 60, and is a longitudinal sectional view of the coil unit 60.
• FIG. 3B is a diagram showing an internal structure of the coil part 60, and is an enlarged sectional view showing an A part in an enlarged manner.
• FIG. 4 is a perspective view showing a state in which two rows of coils 66 are juxtaposed.
• FIG. 5 is a right side view of the coil section 60.
• FIG. 6A is a view showing the inside of the coil section 60, and is a longitudinal sectional view taken along the line V-V in FIG.
• FIG. 6B is a view showing the inside of the coil part 60, and is an enlarged sectional view showing the part B in an enlarged manner.
• FIG. 7 is a longitudinal sectional view showing, in an enlarged manner, part A of Modification Example 1.
• FIG. 8 is an enlarged longitudinal sectional view showing a part A of Modification 2.
• FIG. 1 is a plan view of a stage apparatus to which an embodiment of a linear motor according to the present invention is applied.
• the stage apparatus 10 is an XY stage, and includes a base 14 fixed on a concrete base, a movable part 16 that moves on the base 14, and both ends of the movable part 16 at Y. And a pair of linear motors 20 driven in the direction.
• the movable section 16 includes a slider 18 driven by the linear motor 20, a Y slider 24 horizontally mounted in the X direction orthogonal to the moving direction so as to connect the sliders 18, and the Y slider 24. And rider 26 moving in the X direction.
• the slider 18 is guided by a guide portion 30 extending in the Y direction and is slidably supported in the Y direction.
• the slider 18 is driven by a thrust (driving force) from the linear motor 20 as a driving means. Controlled movement of direction.
• the movable part 16 is driven in the Y direction by the driving force of the linear motor 20 while the sliders 18 provided at the left and right ends are guided by the guide part 30. Further, each linear motor 20 is controlled to generate the same driving force at the same time so as to translate a pair of sliders 18 arranged at both ends of the movable portion 16.
• the linear motor 20 is a moving magnet type (MM type), and includes a coil part 60 fixed on the base 14 and a magnet yoke part 62 moving in the extending direction of the coil part 60. Consists of.
• the coil unit 60 includes a plurality of coils 66 (see FIG. 4) described later, and the magnet yoke unit 62 includes a permanent magnet 68 disposed so as to face the coil 66.
• the coil 66 of the coil unit 60 is disposed so as to face the permanent magnet 68, and generates a thrust (driving force) in the Y direction with respect to the permanent magnet 68 by applying a driving voltage.
• the linear motor 20 is configured to apply a driving force in the Y direction to the slider 18 by generating a Lorentz force with respect to the permanent magnet 68 from the coil portion 60.
• the driving force can be generated so that the slider 18 travels in the Y direction at a constant speed.
• the coil unit 60 is provided with a cooling water supply port 70 to which cooling water for cooling the coil 66 is supplied at the upper front end, and a cooling water discharge port 72 for discharging cooling water at the lower rear end. ing. Therefore, the cooling water supplied from the cooling water supply port 70 flows downward while flowing backward (Y direction), and is discharged from the cooling water discharge port 72.
• a cooling water channel 74 described later is formed inside the coil unit 60, and the cooling water supplied from the cooling water supply port 70 is the cooling water filled in the entire area of the cooling water channel 74. Is pushed backward (Y direction) and heat is exchanged in the course of flowing to collect the heat of each coil 66.
• tap water containing chlorine may be used as the cooling water, or pure water from which impurities are removed may be used.
• the specific temperature of the cooling water is higher than that of the inert refrigerant, the heat generated from the coil 66 having good cooling efficiency can be sufficiently cooled.
• FIG. 3A is a longitudinal sectional view showing the internal structure of the coil portion 60
• FIG. 3B is an enlarged sectional view showing the A portion in an enlarged manner.
• the coil portion 60 is formed by integrally covering two rows of coils 66 with a mold (grease material) 76 and covered with a cover member 78.
• a glass film 80 is formed on the surface of the mold 76. Since the glass film 80 is an inorganic material, it has insulating properties and can prevent water from penetrating.
• a cooling water channel 74 through which cooling water flows is formed in the gap between the inner wall of the cover member 78 and the surface of the glass film 80.
• the cover member 78 is made of a stainless material, a resin material, or ceramics.
• the glass film 80 is formed to have a uniform thickness (several microns) by coating, for example, a liquid glass material called liquid glass. Further, by using a liquid coating agent called a glass coating agent, coating at room temperature becomes possible, and the glass film 80 can be easily formed. Thus, by covering the entire surface of the coil 66 with the glass film 80, it is possible to prevent the cooling water flowing through the cooling water flow path 74 from penetrating into the coil 66 side. For this reason, it is possible to prevent dielectric breakdown from being caused by cooling water and to prevent the metal ions from melting out from the insulating material on the coil surface.
• quartz glass As the glass film 80.
• a glass coating agent can form a strong glass film that is completely different from a silica film at a relatively low temperature. 80 can be coated on the entire surface of the mold 76.
• FIG. 4 is a perspective view showing a state in which two rows of coils 66 are arranged side by side.
• the coil part 60 has a U-shaped coil 66 whose both sides are bent 90 degrees in parallel with the traveling direction (Y direction).
• the two coil arrays 60A and 60B are arranged opposite to each other in 180 degrees and are combined so that the coils 66 of the first coil array 60A and the coils 66 of the second coil array 60B are alternately fitted.
• Y direction traveling direction
• the straight portion 66A of the coil 66 of the first coil row 60A is fitted into the recess 66C of the coil 66 of the second coil row 60B, and the straight portion 66A of the coil 66 of the second coil row 60B is fitted to the first coil.
• Row 6 OA coil 66 is fitted into recess 66C, and first portion 66A of coil 66 straight portion 66A and second portion 60B of coil 66 straight portion 66A are alternately combined so that they overlap. . Since the plurality of coils 66 are controlled by being divided into three phases of U phase, V phase, and W phase, two lead wires are drawn from each phase.
• FIG. 5 is a right side view of the coil unit 60.
• FIG. 6A is a longitudinal sectional view taken along the line V-V in FIG. 5, and
• FIG. 6B is an enlarged sectional view showing an enlarged B portion.
• rectangular blocks 82 and 84 are fitted and fixed to both ends of a cover member 78 in which a plurality of coils 66 are accommodated.
• the cover member 78 and the blocks 82 and 84 are made of a metal material such as stainless steel, the fitting portions are joined by welding to form an airtight structure.
• a cooling water supply port 70 is passed through one block 82, and a cooling water discharge port 72 is passed through the other block 84.
• the cooling water supply port 70 and the cooling water discharge port 72 also serve as a metal noopka, and the outer periphery of the cooling water supply port 70 and the cooling water discharge port 72 is joined to the blocks 82 and 84 by welding to form an airtight structure.
• the lead wires 86 (six wires) of each coil 66 are inserted into the lead wire guide member 88 and pulled out to the outside.
• the lead wire guide member 88 also has a metallic noise force such as stainless steel, and one end is inserted into the coil 66 side and the other end is penetrated through the block 84.
• liquid glass is coated on the outer periphery of the lead wire guide member 88 having a lead wire passage inside, and a glass film 89 is formed on the entire outer periphery of the lead wire guide member 88. Therefore, the cooling water is prevented from penetrating the lead wire guide member 88 by the glass film 89. As a result, it is possible to prevent the lead wire 86 from causing dielectric breakdown due to the cooling water and the insulating material from being melted out of metal ions.
• a lead wire guide member 88 with the lead wire 86 inserted is attached to the inside of the end of the cover member 78 (see FIGS. 6A and 6B).
• FIG. 7 is an enlarged longitudinal sectional view showing part A of the first modification.
• the inner surface of the cover member 78 is also coated with the glass film 90. Therefore, it is possible to prevent the metal ions from being melted out of the cover member 78 by the cooling water.
• FIG. 8 is an enlarged longitudinal sectional view showing a part A of the second modification.
• the first glass film 92 is coated around the plurality of coils 66, the resin material 76 is molded on the surface of the first glass film 92, and the resin material 76 A second glass film 94 is coated on the surface. Therefore, in the second modification, since the cooling water can be prevented from penetrating by the double glass films 92, 94, it is possible to prevent dielectric breakdown and cracks from being generated by the cooling water. Can be surely prevented from melting, and durability has been improved.
• the force is not limited to the linear motor used in the stage device as an example, and the present invention can also be applied to a linear motor used as a driving unit of another device. Of course you can.
• MM type moving magnet type linear motor
• MC type moving coil type linear motor

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• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Chemical & Material Sciences (AREA)
• Combustion & Propulsion (AREA)
• Electromagnetism (AREA)
• Power Engineering (AREA)
• Linear Motors (AREA)
• Motor Or Generator Cooling System (AREA)
• Manufacture Of Motors, Generators (AREA)

Priority Applications (2)

Applications Claiming Priority (2)

Related Child Applications (1)

Publications (1)

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ID=36740209

Family Applications (1)

Country Status (6)

Families Citing this family (11)

Citations (2)

Family Cites Families (11)

• 2005
  • 2005-01-27 JP JP2005020217A patent/JP4558524B2/ja not_active Expired - Fee Related
  • 2005-12-09 TW TW094143653A patent/TW200629695A/zh not_active IP Right Cessation
  • 2005-12-28 CN CN200580046966A patent/CN100596004C/zh not_active Expired - Fee Related
  • 2005-12-28 KR KR1020077016470A patent/KR100873001B1/ko not_active Expired - Fee Related
  • 2005-12-28 WO PCT/JP2005/024062 patent/WO2006080176A1/ja not_active Ceased
• 2007
  • 2007-06-29 US US11/822,001 patent/US20070252445A1/en not_active Abandoned

Patent Citations (2)

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