KR100830735B1 - 액정 표시 장치의 제조방법 - Google Patents
액정 표시 장치의 제조방법 Download PDFInfo
- Publication number
- KR100830735B1 KR100830735B1 KR1020010054521A KR20010054521A KR100830735B1 KR 100830735 B1 KR100830735 B1 KR 100830735B1 KR 1020010054521 A KR1020010054521 A KR 1020010054521A KR 20010054521 A KR20010054521 A KR 20010054521A KR 100830735 B1 KR100830735 B1 KR 100830735B1
- Authority
- KR
- South Korea
- Prior art keywords
- data line
- contact hole
- passivation layer
- forming
- liquid crystal
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 17
- 239000004973 liquid crystal related substance Substances 0.000 title abstract description 17
- 238000004519 manufacturing process Methods 0.000 title abstract description 13
- 238000002161 passivation Methods 0.000 claims abstract description 14
- 239000010409 thin film Substances 0.000 claims abstract description 7
- 238000000151 deposition Methods 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims description 19
- 239000010408 film Substances 0.000 claims description 10
- 230000001681 protective effect Effects 0.000 claims description 4
- 238000001312 dry etching Methods 0.000 claims description 3
- 230000007423 decrease Effects 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 22
- 239000011159 matrix material Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/123—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode pixel
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/40—Arrangements for improving the aperture ratio
Landscapes
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Liquid Crystal (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Optics & Photonics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Crystallography & Structural Chemistry (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
Abstract
Description
Claims (3)
- 어레이 기판상에 일방향으로 복수개의 게이트 라인을 형성하는 단계와;상기 게이트 라인과 수직한 방향으로 복수개의 데이터 라인을 형성하는 단계와;상기 게이트 라인과 데이터 라인이 교차하는 부분에 박막 트랜지스터를 형성하는 단계와;상기 게이트 라인, 상기 데이터 라인 및 상기 트렌지스터를 포함하는 상기 어레이 기판 전면 상부에 보호막을 증착하고, 상기 박막 트랜지스터가 부분 노출되도록 상기 보호막을 제거하여 콘택홀을 형성함과 동시에 상기 데이터 라인이 선택적으로 노출되도록 상기 보호막을 제거하는 단계와;상기 보호막을 제거하는 단계 후의 상기 어레이 기판 전면 상부에 유기 절연막을 증착하고, 상기 콘택홀이 노출되도록 유기 절연막을 선택적으로 제거하는 단계와;상기 콘택홀을 포함하고, 상기 게이트 라인 및 데이터 라인 일측상에 복수개의 픽셀전극을 형성하는 단계를 포함하는 것을 특징으로 하는 액정 표시 장치의 제조방법.
- 제 1 항에 있어서,상기 데이터 라인이 선택적으로 노출되도록 상기 보호막을 제거시 건식식각 공정을 이용하는 것을 특징으로 하는 액정 표시 장치의 제조방법.
- 제 1 항에 있어서.상기 데이터 라인이 선택적으로 노출되도록 상기 보호막을 제거시 노출된 데이터 라인의 표면이 거칠게되는 것을 특징으로 하는 액정 표시 장치의 제조방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020010054521A KR100830735B1 (ko) | 2001-09-05 | 2001-09-05 | 액정 표시 장치의 제조방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020010054521A KR100830735B1 (ko) | 2001-09-05 | 2001-09-05 | 액정 표시 장치의 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030021383A KR20030021383A (ko) | 2003-03-15 |
KR100830735B1 true KR100830735B1 (ko) | 2008-05-20 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020010054521A KR100830735B1 (ko) | 2001-09-05 | 2001-09-05 | 액정 표시 장치의 제조방법 |
Country Status (1)
Country | Link |
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KR (1) | KR100830735B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101331901B1 (ko) | 2006-06-30 | 2013-11-22 | 엘지디스플레이 주식회사 | 액정표시장치 및 그 제조방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1031228A (ja) * | 1996-07-15 | 1998-02-03 | Fujitsu Ltd | 液晶表示装置及びその製造方法 |
KR20000003179A (ko) * | 1998-06-26 | 2000-01-15 | 김영환 | 액정표시소자의 데이터 라인 형성방법 |
KR20000066342A (ko) * | 1999-04-15 | 2000-11-15 | 구본준 | 액정표시장치 |
KR20010081578A (ko) * | 2000-02-16 | 2001-08-29 | 구본준, 론 위라하디락사 | 액정 표시장치 및 액정 표시장치 제조방법 |
-
2001
- 2001-09-05 KR KR1020010054521A patent/KR100830735B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1031228A (ja) * | 1996-07-15 | 1998-02-03 | Fujitsu Ltd | 液晶表示装置及びその製造方法 |
KR20000003179A (ko) * | 1998-06-26 | 2000-01-15 | 김영환 | 액정표시소자의 데이터 라인 형성방법 |
KR20000066342A (ko) * | 1999-04-15 | 2000-11-15 | 구본준 | 액정표시장치 |
KR20010081578A (ko) * | 2000-02-16 | 2001-08-29 | 구본준, 론 위라하디락사 | 액정 표시장치 및 액정 표시장치 제조방법 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101331901B1 (ko) | 2006-06-30 | 2013-11-22 | 엘지디스플레이 주식회사 | 액정표시장치 및 그 제조방법 |
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KR20030021383A (ko) | 2003-03-15 |
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