JP2005346091A - 液晶表示装置およびその製造方法 - Google Patents
液晶表示装置およびその製造方法 Download PDFInfo
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- JP2005346091A JP2005346091A JP2005165603A JP2005165603A JP2005346091A JP 2005346091 A JP2005346091 A JP 2005346091A JP 2005165603 A JP2005165603 A JP 2005165603A JP 2005165603 A JP2005165603 A JP 2005165603A JP 2005346091 A JP2005346091 A JP 2005346091A
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- liquid crystal
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133388—Constructional arrangements; Manufacturing methods with constructional differences between the display region and the peripheral region
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Abstract
【解決手段】 本発明の薄膜トランジスター母基板310は、薄膜トランジスターアレーが形成された多数のアレー領域と、多数のアレー領域間のダミー領域と、ダミー領域のうちダミーシーリング材306が塗布されるダミーシーリグ領域に絶縁膜を貫通して形成されたマルチホール341と、ダミー領域のうちダミーシーリング領域の外郭領域に絶縁膜を貫通して形成された開口部338を備えている。
【選択図】 図9
Description
4,104:データライン
6,106:薄膜トランジスター
8,108:ゲート電極
10,110:ソース電極
12,112:ドレーン電極
14,114:活性層
16,24,30,38,125:コンタクトホール
18,118:画素電極
20,120:ストリッジキャパシター
22,122,124:ストリッジ上部電極
26:ゲートパッド
28:ゲートパッド下部電極
32:ゲートパッド上部電極
34:データパッド
36:データパッド下部電極
40:データパッド上部電極
42,142,312:基板
44,144,314:ゲート絶縁膜
48,148:オーミック接触層
50,150,316:保護膜
152,352:フォトレジストパターン
160:画素ホール
154,354:透明導電膜
214,216:スリット
213,215,330:ダミー透明導電パターン
300:初期パネル
302:液晶パネルユニット
304:メーンシーリング材
306:ダミーシーリング材
308:ダミー領域
310:薄膜トランジスター母基板
320:カラーフィルター母基板
322:スペーサー
318,338:開口部
341:支持部
341:マルチホール
Claims (20)
- 基板と、その基板上に形成された多数のアレー領域と、その多数のアレー領域間の前記基板上に形成された少なくとも一つのダミー領域と、前記少なくとも一つのダミー領域内で絶縁膜を貫通して形成された少なくとも一つの開口部と、前記少なくとも一つの開口部内に配置された少なくとも一つの支持部を備えることを特徴とする液晶表示装置。
- 前記開口部内に形成された透明導電膜を更に備えることを特徴とする請求項1記載の液晶表示装置。
- 前記絶縁膜は、ゲート絶縁膜および保護膜を含むことを特徴とする請求項1記載の液晶表示装置。
- 前記少なくとも一つの支持部は絶縁物質で形成されたことを特徴とする請求項1記載の液晶表示装置。
- 前記少なくとも一つの支持部は、ゲート絶縁膜および保護膜を含むことを特徴とする請求項1記載の液晶表示装置。
- 前記少なくとも一つの支持部上に形成されたダミーシーリング材パターンを更に備えることを特徴とする請求項1記載の液晶表示装置。
- 前記少なくとも一つの支持部は、前記絶縁膜を貫通するマルチホールを含むことを特徴とする請求項1記載の液晶表示装置。
- 前記マルチホールは、前記少なくとも一つの支持部上に形成されるダミーシーリング材パターンの幅より狭い線幅を有することを特徴とする請求項7記載の液晶表示装置。
- 前記開口部およびマルチホール内に形成された透明導電膜を更に備えることを特徴とする請求項7記載の液晶表示装置。
- 前記アレー領域は、それぞれ多数の薄膜トランジスターを含むことを特徴とする請求項1記載の液晶表示装置。
- 第1基板上に少なくとも一つのダミー領域を間に置き多数のアレー領域を形成する段階と、前記第1基板上に絶縁膜を形成する段階と、前記少なくとも一つのダミー領域内で前記絶縁膜の一部を貫通する少なくとも一つの開口部を形成する段階と、前記少なくとも一つの開口部内に少なくとも一つの支持部を形成する段階と、を含むことを特徴とする液晶表示装置の製造方法。
- 前記少なくとも一つの開口部および前記少なくとも一つの支持部は、同時に形成されることを特徴とする請求項11記載の液晶表示装置の製造方法。
- 前記少なくとも一つの開口部および少なくとも一つの支持部を形成する、前記絶縁膜上にフォトレジストパターンを形成する段階と、前記フォトレジストパターンをマスクに利用して前記絶縁膜を蝕刻する段階と、前記フォトレジストパターン上に透明導電膜を形成する段階と、前記フォトレジストパターンおよびその上に形成された透明導電膜を除去する段階と、を含むことを特徴とする請求項12記載の液晶装置の製造方法。
- 前記絶縁膜を形成する段階は、ゲート絶縁膜を形成する段階と、保護膜を形成する段階と、を含むことを特徴とする請求項11記載の液晶表示装置の製造方法。
- 前記少なくとも一つの支持部は、絶縁物質で形成されたことを特徴とする請求項11記載の液晶表示装置の製造方法。
- 前記少なくとも一つの支持部は、ゲート絶縁膜および保護膜で形成されたことを特徴とする請求項15記載の液晶表示装置の製造方法。
- 前記第1基板と第2基板とを合着する段階を更に含むことを特徴とする請求項11記載の液晶表示装置の製造方法。
- 前記少なくとも一つの支持部にマルチホールを形成する段階を更に含むことを特徴とする請求項13記載の液晶表示装置の製造方法。
- 前記マルチホールは、前記少なくとも一つの開口部と共に形成することを特徴とする請求項18記載の液晶表示装置の製造方法。
- 前記開口部および前記マルチホール内には前記透明導電膜が残存することを特徴とする請求項19記載の液晶表示装置の製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040041137A KR101024651B1 (ko) | 2004-06-05 | 2004-06-05 | 표시 소자용 박막 트랜지스터 모기판 및 그 제조 방법 |
Publications (2)
Publication Number | Publication Date |
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JP2005346091A true JP2005346091A (ja) | 2005-12-15 |
JP4422648B2 JP4422648B2 (ja) | 2010-02-24 |
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Application Number | Title | Priority Date | Filing Date |
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JP2005165603A Expired - Fee Related JP4422648B2 (ja) | 2004-06-05 | 2005-06-06 | 液晶表示装置およびその製造方法 |
Country Status (4)
Country | Link |
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US (1) | US7439586B2 (ja) |
JP (1) | JP4422648B2 (ja) |
KR (1) | KR101024651B1 (ja) |
CN (1) | CN100380220C (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012084865A (ja) * | 2010-09-13 | 2012-04-26 | Semiconductor Energy Lab Co Ltd | 液晶表示装置及び液晶表示装置の作製方法 |
JP2012208151A (ja) * | 2011-03-29 | 2012-10-25 | Sony Corp | 表示装置および電子機器 |
JP2012252360A (ja) * | 2006-07-27 | 2012-12-20 | Samsung Electronics Co Ltd | 表示基板の製造方法 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100755645B1 (ko) * | 2000-12-29 | 2007-09-04 | 엘지.필립스 엘시디 주식회사 | 액정표시소자 및 그의 제조방법 |
KR100989264B1 (ko) * | 2004-05-31 | 2010-10-20 | 엘지디스플레이 주식회사 | 구동 회로가 내장된 액정 표시 패널 및 그 제조 방법 |
KR101303816B1 (ko) * | 2006-06-30 | 2013-09-04 | 엘지디스플레이 주식회사 | 액정 표시 장치용 모기판, 이를 이용한 액정 표시 장치 및액정 표시 장치의 제조 방법 |
KR101976134B1 (ko) | 2012-09-12 | 2019-05-08 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치의 제조 방법 |
KR101382907B1 (ko) * | 2012-12-28 | 2014-04-08 | 하이디스 테크놀로지 주식회사 | 액정 표시 장치 및 액정 표시 장치의 제조 방법 |
KR102523923B1 (ko) * | 2016-02-29 | 2023-04-20 | 삼성디스플레이 주식회사 | 표시 패널용 모기판, 그의 절단 방법, 및 그 방법에 의해 제조된 표시 패널 |
TWI600947B (zh) * | 2016-11-24 | 2017-10-01 | 友達光電股份有限公司 | 用於顯示面板的畫素結構與主動元件陣列基板 |
TWI648573B (zh) | 2017-09-11 | 2019-01-21 | 友達光電股份有限公司 | 陣列基板 |
CN108519706B (zh) * | 2018-03-29 | 2021-05-07 | 武汉华星光电技术有限公司 | 显示面板 |
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JPS58220121A (ja) * | 1982-06-17 | 1983-12-21 | Canon Inc | 電気光学装置 |
US4653864A (en) * | 1986-02-26 | 1987-03-31 | Ovonic Imaging Systems, Inc. | Liquid crystal matrix display having improved spacers and method of making same |
US5162933A (en) | 1990-05-16 | 1992-11-10 | Nippon Telegraph And Telephone Corporation | Active matrix structure for liquid crystal display elements wherein each of the gate/data lines includes at least a molybdenum-base alloy layer containing 0.5 to 10 wt. % of chromium |
KR940004322B1 (ko) | 1991-09-05 | 1994-05-19 | 삼성전자 주식회사 | 액정표시장치 및 그 제조방법 |
US5317433A (en) | 1991-12-02 | 1994-05-31 | Canon Kabushiki Kaisha | Image display device with a transistor on one side of insulating layer and liquid crystal on the other side |
DE4339721C1 (de) | 1993-11-22 | 1995-02-02 | Lueder Ernst | Verfahren zur Herstellung einer Matrix aus Dünnschichttransistoren |
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JP3866783B2 (ja) | 1995-07-25 | 2007-01-10 | 株式会社 日立ディスプレイズ | 液晶表示装置 |
KR0156202B1 (ko) | 1995-08-22 | 1998-11-16 | 구자홍 | 액정표시장치 및 그 제조방법 |
JPH09113931A (ja) | 1995-10-16 | 1997-05-02 | Sharp Corp | 液晶表示装置 |
JP3625598B2 (ja) | 1995-12-30 | 2005-03-02 | 三星電子株式会社 | 液晶表示装置の製造方法 |
KR970048809A (ko) * | 1995-12-30 | 1997-07-29 | 손욱 | 탄성 접착성 스페이서들을 가지는 액정표시장치 |
US5764324A (en) * | 1997-01-22 | 1998-06-09 | International Business Machines Corporation | Flicker-free reflective liquid crystal cell |
KR100335462B1 (ko) * | 1999-08-11 | 2002-05-04 | 구본준, 론 위라하디락사 | 액정표시패널 |
JP2001305557A (ja) * | 2000-04-21 | 2001-10-31 | Nec Corp | 液晶表示装置 |
KR100715943B1 (ko) * | 2001-01-29 | 2007-05-08 | 삼성전자주식회사 | 액정표시장치 및 그 제조방법 |
JP4111785B2 (ja) * | 2001-09-18 | 2008-07-02 | シャープ株式会社 | 液晶表示装置 |
JP4059676B2 (ja) * | 2002-01-22 | 2008-03-12 | 株式会社日立製作所 | 液晶表示装置 |
KR100698042B1 (ko) | 2002-07-29 | 2007-03-23 | 엘지.필립스 엘시디 주식회사 | 액정표시소자 및 그 제조방법 |
KR100561646B1 (ko) * | 2003-10-23 | 2006-03-20 | 엘지.필립스 엘시디 주식회사 | 표시 소자용 박막 트랜지스터 기판 및 그 제조 방법 |
-
2004
- 2004-06-05 KR KR1020040041137A patent/KR101024651B1/ko active IP Right Grant
-
2005
- 2005-06-03 US US11/143,681 patent/US7439586B2/en not_active Expired - Fee Related
- 2005-06-06 JP JP2005165603A patent/JP4422648B2/ja not_active Expired - Fee Related
- 2005-06-06 CN CNB2005100785436A patent/CN100380220C/zh not_active Expired - Fee Related
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012252360A (ja) * | 2006-07-27 | 2012-12-20 | Samsung Electronics Co Ltd | 表示基板の製造方法 |
JP2012084865A (ja) * | 2010-09-13 | 2012-04-26 | Semiconductor Energy Lab Co Ltd | 液晶表示装置及び液晶表示装置の作製方法 |
US9305944B2 (en) | 2010-09-13 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US9917112B2 (en) | 2010-09-13 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US10522572B2 (en) | 2010-09-13 | 2019-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US11024655B2 (en) | 2010-09-13 | 2021-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US11417688B2 (en) | 2010-09-13 | 2022-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US11682678B2 (en) | 2010-09-13 | 2023-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
JP2012208151A (ja) * | 2011-03-29 | 2012-10-25 | Sony Corp | 表示装置および電子機器 |
Also Published As
Publication number | Publication date |
---|---|
CN1707342A (zh) | 2005-12-14 |
US20050269638A1 (en) | 2005-12-08 |
KR20050115742A (ko) | 2005-12-08 |
JP4422648B2 (ja) | 2010-02-24 |
KR101024651B1 (ko) | 2011-03-25 |
CN100380220C (zh) | 2008-04-09 |
US7439586B2 (en) | 2008-10-21 |
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