KR100708925B1 - 방전펌핑된 엑시머 레이저 장치 - Google Patents

방전펌핑된 엑시머 레이저 장치 Download PDF

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Publication number
KR100708925B1
KR100708925B1 KR1020000027958A KR20000027958A KR100708925B1 KR 100708925 B1 KR100708925 B1 KR 100708925B1 KR 1020000027958 A KR1020000027958 A KR 1020000027958A KR 20000027958 A KR20000027958 A KR 20000027958A KR 100708925 B1 KR100708925 B1 KR 100708925B1
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South Korea
Prior art keywords
bearing
motor
radial magnetic
bearings
disposed
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Expired - Lifetime
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KR1020000027958A
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English (en)
Korean (ko)
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KR20000077397A (ko
Inventor
세키구치신이치
시노자키히로유키
바라다도시미츠
나카자와도시하루
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가부시키가이샤 에바라 세이사꾸쇼
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/047—Details of housings; Mounting of active magnetic bearings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lasers (AREA)
KR1020000027958A 1999-05-25 2000-05-24 방전펌핑된 엑시머 레이저 장치 Expired - Lifetime KR100708925B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP14516899 1999-05-25
JP11-145168 1999-05-25
JP20185199A JP3877912B2 (ja) 1999-05-25 1999-07-15 放電励起エキシマレーザ装置
JP11-201851 1999-07-15

Publications (2)

Publication Number Publication Date
KR20000077397A KR20000077397A (ko) 2000-12-26
KR100708925B1 true KR100708925B1 (ko) 2007-04-17

Family

ID=26476369

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000027958A Expired - Lifetime KR100708925B1 (ko) 1999-05-25 2000-05-24 방전펌핑된 엑시머 레이저 장치

Country Status (6)

Country Link
US (1) US6603787B1 (https=)
EP (1) EP1056171B2 (https=)
JP (1) JP3877912B2 (https=)
KR (1) KR100708925B1 (https=)
DE (1) DE60013205T3 (https=)
TW (1) TW463429B (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001111138A (ja) * 1999-10-04 2001-04-20 Ebara Corp エキシマレーザ装置
EP1188932A3 (en) * 2000-09-19 2003-05-02 Ntn Corporation Bearing structure for laser fan
JP2005209832A (ja) * 2004-01-22 2005-08-04 Matsushita Electric Ind Co Ltd レーザ発振装置とその製造方法およびレーザ加工機
EP2275686A1 (en) * 2009-07-13 2011-01-19 Siemens Aktiengesellschaft Turbocompressor assembly
JP6063199B2 (ja) * 2012-10-15 2017-01-18 ギガフォトン株式会社 放電励起式ガスレーザ装置
WO2014069636A1 (ja) 2012-11-05 2014-05-08 ギガフォトン株式会社 レーザチャンバ及び放電励起式ガスレーザ装置
US20200061238A1 (en) * 2017-03-28 2020-02-27 Ceramtec Gmbh Ceramic Sliding Bearing
JP6447662B2 (ja) * 2017-05-09 2019-01-09 ダイキン工業株式会社 電動機システムおよびそれを備えたターボ圧縮機

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10173259A (ja) * 1996-12-06 1998-06-26 Komatsu Ltd エキシマレーザ装置
JPH1187810A (ja) * 1997-07-11 1999-03-30 Cymer Inc 磁気軸受け支持ファンを有するエキシマレーザ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3212928C2 (de) * 1982-04-07 1984-01-26 Lambda Physik GmbH, 3400 Göttingen Entladungsgepumpter Laser
JPS62194025A (ja) 1986-02-18 1987-08-26 Ebara Corp 磁気軸受
DE3931661A1 (de) † 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe
EP0419163B1 (en) * 1989-09-18 1995-01-11 Ngk Insulators, Ltd. Fuel cell generator
US4975925A (en) * 1989-11-01 1990-12-04 The Spectranetics Corporation Unlubricated bearings for gas lasers
JPH04219493A (ja) 1990-08-10 1992-08-10 Ebara Corp ターボ分子ポンプ
JPH0521866A (ja) 1991-07-12 1993-01-29 Komatsu Ltd ガスレーザ装置
DE4227013A1 (de) 1992-08-14 1994-02-17 Budig Peter Klaus Prof Dr Sc T Aktives magnetisches Axiallager für Rotoren mit Notlauflager
US5856991A (en) * 1997-06-04 1999-01-05 Cymer, Inc. Very narrow band laser
US5870420A (en) 1997-08-18 1999-02-09 Cymer, Inc. Cross-flow blower with braces
US6061376A (en) * 1998-08-28 2000-05-09 Cymer, Inc. Tangential fan for excimer laser
DE69941930D1 (de) 1998-11-30 2010-03-04 Ebara Corp Durch elektrische entladung angeregter excimerlaser
US6111907A (en) * 1999-03-17 2000-08-29 Cymer, Inc. Laser chamber installation in and removal from a laser system housing

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10173259A (ja) * 1996-12-06 1998-06-26 Komatsu Ltd エキシマレーザ装置
JPH1187810A (ja) * 1997-07-11 1999-03-30 Cymer Inc 磁気軸受け支持ファンを有するエキシマレーザ

Also Published As

Publication number Publication date
EP1056171B2 (en) 2008-06-18
KR20000077397A (ko) 2000-12-26
JP2001044533A (ja) 2001-02-16
TW463429B (en) 2001-11-11
DE60013205T3 (de) 2009-01-22
DE60013205D1 (de) 2004-09-30
DE60013205T2 (de) 2005-09-15
EP1056171B1 (en) 2004-08-25
US6603787B1 (en) 2003-08-05
JP3877912B2 (ja) 2007-02-07
EP1056171A2 (en) 2000-11-29
EP1056171A3 (en) 2001-10-31

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