KR100698567B1 - 광원 장치 - Google Patents

광원 장치 Download PDF

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Publication number
KR100698567B1
KR100698567B1 KR1020050120556A KR20050120556A KR100698567B1 KR 100698567 B1 KR100698567 B1 KR 100698567B1 KR 1020050120556 A KR1020050120556 A KR 1020050120556A KR 20050120556 A KR20050120556 A KR 20050120556A KR 100698567 B1 KR100698567 B1 KR 100698567B1
Authority
KR
South Korea
Prior art keywords
light
lens
solid
illuminance
source device
Prior art date
Application number
KR1020050120556A
Other languages
English (en)
Korean (ko)
Other versions
KR20060094017A (ko
Inventor
야스시 이치자와
Original Assignee
요코가와 덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 요코가와 덴키 가부시키가이샤 filed Critical 요코가와 덴키 가부시키가이샤
Publication of KR20060094017A publication Critical patent/KR20060094017A/ko
Application granted granted Critical
Publication of KR100698567B1 publication Critical patent/KR100698567B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14625—Optical elements or arrangements associated with the device
    • H01L27/14627—Microlenses

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR1020050120556A 2005-02-23 2005-12-09 광원 장치 KR100698567B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00046409 2005-02-23
JP2005046409A JP4656393B2 (ja) 2005-02-23 2005-02-23 光源装置

Publications (2)

Publication Number Publication Date
KR20060094017A KR20060094017A (ko) 2006-08-28
KR100698567B1 true KR100698567B1 (ko) 2007-03-21

Family

ID=37042284

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050120556A KR100698567B1 (ko) 2005-02-23 2005-12-09 광원 장치

Country Status (3)

Country Link
JP (1) JP4656393B2 (zh)
KR (1) KR100698567B1 (zh)
TW (1) TWI288237B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8159659B2 (en) * 2006-11-15 2012-04-17 Japan Electronic Materials Corp. Optical device inspecting apparatus
DE102007045525A1 (de) * 2007-09-24 2009-04-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bildsensor
KR100942252B1 (ko) * 2008-01-21 2010-02-16 이상근 반도체 웨이퍼 검사용 투광기
JP6208440B2 (ja) * 2012-05-30 2017-10-04 アークレイ株式会社 気泡低減装置、クロマトグラフィ装置、気泡低減方法、及び気泡低減プログラム
CN103543304B (zh) * 2012-07-13 2016-05-18 旺矽科技股份有限公司 高频探针卡
WO2024127516A1 (ja) * 2022-12-13 2024-06-20 株式会社インターアクション 光学モジュールおよび検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR940020050A (ko) * 1993-02-11 1994-09-15 김광호 공기조화기의 운전제어장치 및 그 방법
KR101820040B1 (ko) * 2016-08-03 2018-02-28 한빛이디에스(주) 부분 방전 펄스 측정 장치 및 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2582733Y2 (ja) * 1992-01-10 1998-10-08 株式会社ニコン 照明補助装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR940020050A (ko) * 1993-02-11 1994-09-15 김광호 공기조화기의 운전제어장치 및 그 방법
KR101820040B1 (ko) * 2016-08-03 2018-02-28 한빛이디에스(주) 부분 방전 펄스 측정 장치 및 방법

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
국내 특허공개 1983-4669(1983.07.16)
국내 특허공개 2004-20018(2004.03.06)
국내 특허공개 2005-04094(2005.01.12)

Also Published As

Publication number Publication date
TWI288237B (en) 2007-10-11
KR20060094017A (ko) 2006-08-28
TW200630601A (en) 2006-09-01
JP4656393B2 (ja) 2011-03-23
JP2006234450A (ja) 2006-09-07

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