TW200630601A - Illuminator - Google Patents

Illuminator

Info

Publication number
TW200630601A
TW200630601A TW095104229A TW95104229A TW200630601A TW 200630601 A TW200630601 A TW 200630601A TW 095104229 A TW095104229 A TW 095104229A TW 95104229 A TW95104229 A TW 95104229A TW 200630601 A TW200630601 A TW 200630601A
Authority
TW
Taiwan
Prior art keywords
light
solid
state image
image element
illuminator
Prior art date
Application number
TW095104229A
Other languages
Chinese (zh)
Other versions
TWI288237B (en
Inventor
Yasushi Ichizawa
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Publication of TW200630601A publication Critical patent/TW200630601A/en
Application granted granted Critical
Publication of TWI288237B publication Critical patent/TWI288237B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14625—Optical elements or arrangements associated with the device
    • H01L27/14627—Microlenses

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The object of the invention is to provide an illuminator capable of illuminating light for inspection evenly in a central region and a peripheral region of a solid-state image element. The invention improves an illuminator for solid-state image element inspection. The device is characterized by including a light generating section for outputting light; a lens section that irradiates the incident light from the light generating section onto the solid-state image element; and an aperture diaphragm between the lens section and the light generating section, provided at a desired position within the focal length of the lens section.
TW095104229A 2005-02-23 2006-02-08 Illuminator TWI288237B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005046409A JP4656393B2 (en) 2005-02-23 2005-02-23 Light source device

Publications (2)

Publication Number Publication Date
TW200630601A true TW200630601A (en) 2006-09-01
TWI288237B TWI288237B (en) 2007-10-11

Family

ID=37042284

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095104229A TWI288237B (en) 2005-02-23 2006-02-08 Illuminator

Country Status (3)

Country Link
JP (1) JP4656393B2 (en)
KR (1) KR100698567B1 (en)
TW (1) TWI288237B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8159659B2 (en) * 2006-11-15 2012-04-17 Japan Electronic Materials Corp. Optical device inspecting apparatus
DE102007045525A1 (en) * 2007-09-24 2009-04-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. image sensor
KR100942252B1 (en) * 2008-01-21 2010-02-16 이상근 Floodlight for inspecting wafer of semiconductor
JP6208440B2 (en) * 2012-05-30 2017-10-04 アークレイ株式会社 Bubble reduction device, chromatography device, bubble reduction method, and bubble reduction program
CN103543304B (en) * 2012-07-13 2016-05-18 旺矽科技股份有限公司 High-frequency probe card
WO2024127516A1 (en) * 2022-12-13 2024-06-20 株式会社インターアクション Optical module and inspection device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2582733Y2 (en) * 1992-01-10 1998-10-08 株式会社ニコン Lighting auxiliary equipment
KR0125740B1 (en) * 1993-02-11 1998-04-01 김광호 Control apparatus of airconditioner and method therefor
KR101820040B1 (en) * 2016-08-03 2018-02-28 한빛이디에스(주) Apparatus and method for measuring a partial discharging pulse

Also Published As

Publication number Publication date
JP2006234450A (en) 2006-09-07
TWI288237B (en) 2007-10-11
KR100698567B1 (en) 2007-03-21
KR20060094017A (en) 2006-08-28
JP4656393B2 (en) 2011-03-23

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees