KR100696256B1 - 자외선 레이저 출력으로 전기적인 전도성 링크를 절단하는방법 - Google Patents

자외선 레이저 출력으로 전기적인 전도성 링크를 절단하는방법 Download PDF

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Publication number
KR100696256B1
KR100696256B1 KR1020007012202A KR20007012202A KR100696256B1 KR 100696256 B1 KR100696256 B1 KR 100696256B1 KR 1020007012202 A KR1020007012202 A KR 1020007012202A KR 20007012202 A KR20007012202 A KR 20007012202A KR 100696256 B1 KR100696256 B1 KR 100696256B1
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South Korea
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link
laser output
passivation layer
predetermined wavelength
electrically conductive
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Expired - Fee Related
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Korean (ko)
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KR20010043254A (ko
Inventor
윤롱 선
에드워드 스웬슨
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일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76886—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances
    • H01L21/76892—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances modifying the pattern
    • H01L21/76894—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances modifying the pattern using a laser, e.g. laser cutting, laser direct writing, laser repair

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
KR1020007012202A 1998-06-05 1999-06-04 자외선 레이저 출력으로 전기적인 전도성 링크를 절단하는방법 Expired - Fee Related KR100696256B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/092,490 1998-06-05
US09/092,490 US6057180A (en) 1998-06-05 1998-06-05 Method of severing electrically conductive links with ultraviolet laser output

Publications (2)

Publication Number Publication Date
KR20010043254A KR20010043254A (ko) 2001-05-25
KR100696256B1 true KR100696256B1 (ko) 2007-03-21

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Application Number Title Priority Date Filing Date
KR1020007012202A Expired - Fee Related KR100696256B1 (ko) 1998-06-05 1999-06-04 자외선 레이저 출력으로 전기적인 전도성 링크를 절단하는방법

Country Status (10)

Country Link
US (1) US6057180A (enExample)
EP (1) EP1092237B1 (enExample)
JP (1) JP2002517902A (enExample)
KR (1) KR100696256B1 (enExample)
CN (1) CN1198329C (enExample)
AU (1) AU4417799A (enExample)
CA (1) CA2330653A1 (enExample)
DE (1) DE69936646T2 (enExample)
TW (1) TW445684B (enExample)
WO (1) WO1999063592A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11108030B2 (en) 2018-12-19 2021-08-31 Lg Display Co., Ltd. Display device including light absorption layer and low potential electrode in pad region and method of fabricating the same

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CN1303519A (zh) 2001-07-11
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KR20010043254A (ko) 2001-05-25
CA2330653A1 (en) 1999-12-09
CN1198329C (zh) 2005-04-20
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US6057180A (en) 2000-05-02
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