KR100681981B1 - 전자소자들에 대해 액체기반, 광역, 고속응답하는 온도순환 제어를 하는 장치, 방법 및 시스템 - Google Patents

전자소자들에 대해 액체기반, 광역, 고속응답하는 온도순환 제어를 하는 장치, 방법 및 시스템 Download PDF

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KR100681981B1
KR100681981B1 KR1020017000632A KR20017000632A KR100681981B1 KR 100681981 B1 KR100681981 B1 KR 100681981B1 KR 1020017000632 A KR1020017000632 A KR 1020017000632A KR 20017000632 A KR20017000632 A KR 20017000632A KR 100681981 B1 KR100681981 B1 KR 100681981B1
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South Korea
Prior art keywords
temperature
set point
heater
temperature control
liquid
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Expired - Fee Related
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KR1020017000632A
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Korean (ko)
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KR20010071916A (ko
Inventor
마크에프. 말리노스키
토마스피. 존스
브라이언 아니스
조나단이. 터너
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델타 디자인, 인코포레이티드
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Publication of KR20010071916A publication Critical patent/KR20010071916A/ko
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Automation & Control Theory (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Control Of Temperature (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1020017000632A 1998-07-14 1999-07-14 전자소자들에 대해 액체기반, 광역, 고속응답하는 온도순환 제어를 하는 장치, 방법 및 시스템 Expired - Fee Related KR100681981B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9271598P 1998-07-14 1998-07-14
US60/092,715 1998-07-14

Publications (2)

Publication Number Publication Date
KR20010071916A KR20010071916A (ko) 2001-07-31
KR100681981B1 true KR100681981B1 (ko) 2007-02-15

Family

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Application Number Title Priority Date Filing Date
KR1020017000632A Expired - Fee Related KR100681981B1 (ko) 1998-07-14 1999-07-14 전자소자들에 대해 액체기반, 광역, 고속응답하는 온도순환 제어를 하는 장치, 방법 및 시스템

Country Status (6)

Country Link
US (4) US6389225B1 (enExample)
JP (1) JP5000803B2 (enExample)
KR (1) KR100681981B1 (enExample)
AU (1) AU4991899A (enExample)
DE (1) DE19983376T1 (enExample)
WO (1) WO2000004396A1 (enExample)

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US20030047305A1 (en) 2003-03-13
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US6549026B1 (en) 2003-04-15
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