KR100670687B1 - 기판 처리 방법 및 기판 처리 장치 - Google Patents

기판 처리 방법 및 기판 처리 장치 Download PDF

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Publication number
KR100670687B1
KR100670687B1 KR1020060005939A KR20060005939A KR100670687B1 KR 100670687 B1 KR100670687 B1 KR 100670687B1 KR 1020060005939 A KR1020060005939 A KR 1020060005939A KR 20060005939 A KR20060005939 A KR 20060005939A KR 100670687 B1 KR100670687 B1 KR 100670687B1
Authority
KR
South Korea
Prior art keywords
substrate
ice
processing liquid
container
fine particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020060005939A
Other languages
English (en)
Korean (ko)
Other versions
KR20060087417A (ko
Inventor
준페이 가와네
요시쿠니 다케치
Original Assignee
다이니폰 스크린 세이조우 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다이니폰 스크린 세이조우 가부시키가이샤 filed Critical 다이니폰 스크린 세이조우 가부시키가이샤
Publication of KR20060087417A publication Critical patent/KR20060087417A/ko
Application granted granted Critical
Publication of KR100670687B1 publication Critical patent/KR100670687B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N21/00—Selective content distribution, e.g. interactive television or video on demand [VOD]
    • H04N21/40—Client devices specifically adapted for the reception of or interaction with content, e.g. set-top-box [STB]; Operations thereof
    • H04N21/41—Structure of client; Structure of client peripherals
    • H04N21/426—Internal components of the client ; Characteristics thereof
    • H04N21/42661—Internal components of the client ; Characteristics thereof for reading from or writing on a magnetic storage medium, e.g. hard disk drive
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N21/00—Selective content distribution, e.g. interactive television or video on demand [VOD]
    • H04N21/40—Client devices specifically adapted for the reception of or interaction with content, e.g. set-top-box [STB]; Operations thereof
    • H04N21/41—Structure of client; Structure of client peripherals
    • H04N21/4104—Peripherals receiving signals from specially adapted client devices
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N21/00—Selective content distribution, e.g. interactive television or video on demand [VOD]
    • H04N21/40—Client devices specifically adapted for the reception of or interaction with content, e.g. set-top-box [STB]; Operations thereof
    • H04N21/45—Management operations performed by the client for facilitating the reception of or the interaction with the content or administrating data related to the end-user or to the client device itself, e.g. learning user preferences for recommending movies, resolving scheduling conflicts
    • H04N21/462—Content or additional data management, e.g. creating a master electronic program guide from data received from the Internet and a Head-end, controlling the complexity of a video stream by scaling the resolution or bit-rate based on the client capabilities
    • H04N21/4621—Controlling the complexity of the content stream or additional data, e.g. lowering the resolution or bit-rate of the video stream for a mobile client with a small screen

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Databases & Information Systems (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Liquid Crystal (AREA)
  • Cleaning In General (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020060005939A 2005-01-28 2006-01-19 기판 처리 방법 및 기판 처리 장치 Expired - Fee Related KR100670687B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2005020802 2005-01-28
JPJP-P-2005-00020802 2005-01-28
JP2005325739A JP2006231319A (ja) 2005-01-28 2005-11-10 基板処理方法および基板処理装置
JPJP-P-2005-00325739 2005-11-10

Publications (2)

Publication Number Publication Date
KR20060087417A KR20060087417A (ko) 2006-08-02
KR100670687B1 true KR100670687B1 (ko) 2007-01-17

Family

ID=37039544

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060005939A Expired - Fee Related KR100670687B1 (ko) 2005-01-28 2006-01-19 기판 처리 방법 및 기판 처리 장치

Country Status (4)

Country Link
JP (1) JP2006231319A (enExample)
KR (1) KR100670687B1 (enExample)
CN (1) CN1810389B (enExample)
TW (1) TW200640586A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5736615B2 (ja) * 2011-04-26 2015-06-17 国立大学法人大阪大学 基板の洗浄方法
CN107695040B (zh) * 2017-10-20 2021-01-15 大族激光科技产业集团股份有限公司 激光清洗系统及方法
CN109226107B (zh) * 2018-11-08 2024-06-21 广东交通职业技术学院 一种杆件激光清洗系统及清洗方法
JP7186095B2 (ja) * 2019-01-08 2022-12-08 東京エレクトロン株式会社 基板処理装置、基板処理方法及び記憶媒体
CN112090821B (zh) * 2020-07-29 2022-08-26 苏州晶洲装备科技有限公司 一种超高压洗净装置
CN116906959A (zh) * 2023-08-22 2023-10-20 嵊州市浙江工业大学创新研究院 具有辅助电力调峰功能的油烟管道清洁系统及清洁方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3380021B2 (ja) * 1993-12-28 2003-02-24 株式会社エフティーエル 洗浄方法
JP2000031239A (ja) * 1998-07-13 2000-01-28 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2002141269A (ja) * 2000-11-01 2002-05-17 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
JP2003033733A (ja) * 2001-07-23 2003-02-04 Taiyo Toyo Sanso Co Ltd 基板洗浄システム
JP2003039031A (ja) * 2001-07-27 2003-02-12 Kakizaki Mamufacuturing Co Ltd 板材洗浄方法および板材洗浄装置
JP2004313827A (ja) * 2003-04-11 2004-11-11 Tokyo Kakoki Kk 表面処理装置

Also Published As

Publication number Publication date
KR20060087417A (ko) 2006-08-02
CN1810389B (zh) 2010-07-28
JP2006231319A (ja) 2006-09-07
CN1810389A (zh) 2006-08-02
TWI295199B (enExample) 2008-04-01
TW200640586A (en) 2006-12-01

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