CN1810389B - 基板处理方法以及基板处理装置 - Google Patents
基板处理方法以及基板处理装置 Download PDFInfo
- Publication number
- CN1810389B CN1810389B CN2006100063152A CN200610006315A CN1810389B CN 1810389 B CN1810389 B CN 1810389B CN 2006100063152 A CN2006100063152 A CN 2006100063152A CN 200610006315 A CN200610006315 A CN 200610006315A CN 1810389 B CN1810389 B CN 1810389B
- Authority
- CN
- China
- Prior art keywords
- substrate
- treatment fluid
- ice
- atomic
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 241
- 238000000034 method Methods 0.000 title abstract description 17
- 239000007788 liquid Substances 0.000 claims abstract description 20
- 239000012530 fluid Substances 0.000 claims description 114
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 52
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 25
- 239000001569 carbon dioxide Substances 0.000 claims description 25
- 238000007789 sealing Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- 238000005406 washing Methods 0.000 abstract description 20
- 238000004140 cleaning Methods 0.000 description 49
- 239000002002 slurry Substances 0.000 description 45
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 37
- 239000002585 base Substances 0.000 description 17
- 238000003672 processing method Methods 0.000 description 14
- 238000011010 flushing procedure Methods 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 7
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- 239000003513 alkali Substances 0.000 description 6
- 229920002472 Starch Polymers 0.000 description 5
- 235000019698 starch Nutrition 0.000 description 5
- 238000007599 discharging Methods 0.000 description 4
- 238000006386 neutralization reaction Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 239000008107 starch Substances 0.000 description 4
- 239000002253 acid Substances 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 2
- 235000011089 carbon dioxide Nutrition 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 235000014347 soups Nutrition 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 235000003363 Cornus mas Nutrition 0.000 description 1
- 240000006766 Cornus mas Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000009991 scouring Methods 0.000 description 1
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- 230000003068 static effect Effects 0.000 description 1
- 238000004781 supercooling Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N21/00—Selective content distribution, e.g. interactive television or video on demand [VOD]
- H04N21/40—Client devices specifically adapted for the reception of or interaction with content, e.g. set-top-box [STB]; Operations thereof
- H04N21/41—Structure of client; Structure of client peripherals
- H04N21/426—Internal components of the client ; Characteristics thereof
- H04N21/42661—Internal components of the client ; Characteristics thereof for reading from or writing on a magnetic storage medium, e.g. hard disk drive
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N21/00—Selective content distribution, e.g. interactive television or video on demand [VOD]
- H04N21/40—Client devices specifically adapted for the reception of or interaction with content, e.g. set-top-box [STB]; Operations thereof
- H04N21/41—Structure of client; Structure of client peripherals
- H04N21/4104—Peripherals receiving signals from specially adapted client devices
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N21/00—Selective content distribution, e.g. interactive television or video on demand [VOD]
- H04N21/40—Client devices specifically adapted for the reception of or interaction with content, e.g. set-top-box [STB]; Operations thereof
- H04N21/45—Management operations performed by the client for facilitating the reception of or the interaction with the content or administrating data related to the end-user or to the client device itself, e.g. learning user preferences for recommending movies, resolving scheduling conflicts
- H04N21/462—Content or additional data management, e.g. creating a master electronic program guide from data received from the Internet and a Head-end, controlling the complexity of a video stream by scaling the resolution or bit-rate based on the client capabilities
- H04N21/4621—Controlling the complexity of the content stream or additional data, e.g. lowering the resolution or bit-rate of the video stream for a mobile client with a small screen
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Databases & Information Systems (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
- Liquid Crystal (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005020802 | 2005-01-28 | ||
| JP2005020802 | 2005-01-28 | ||
| JP2005-020802 | 2005-01-28 | ||
| JP2005325739 | 2005-11-10 | ||
| JP2005-325739 | 2005-11-10 | ||
| JP2005325739A JP2006231319A (ja) | 2005-01-28 | 2005-11-10 | 基板処理方法および基板処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1810389A CN1810389A (zh) | 2006-08-02 |
| CN1810389B true CN1810389B (zh) | 2010-07-28 |
Family
ID=37039544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006100063152A Expired - Fee Related CN1810389B (zh) | 2005-01-28 | 2006-01-18 | 基板处理方法以及基板处理装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2006231319A (enExample) |
| KR (1) | KR100670687B1 (enExample) |
| CN (1) | CN1810389B (enExample) |
| TW (1) | TW200640586A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5736615B2 (ja) * | 2011-04-26 | 2015-06-17 | 国立大学法人大阪大学 | 基板の洗浄方法 |
| CN107695040B (zh) * | 2017-10-20 | 2021-01-15 | 大族激光科技产业集团股份有限公司 | 激光清洗系统及方法 |
| CN109226107B (zh) * | 2018-11-08 | 2024-06-21 | 广东交通职业技术学院 | 一种杆件激光清洗系统及清洗方法 |
| JP7186095B2 (ja) * | 2019-01-08 | 2022-12-08 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
| CN112090821B (zh) * | 2020-07-29 | 2022-08-26 | 苏州晶洲装备科技有限公司 | 一种超高压洗净装置 |
| CN116906959A (zh) * | 2023-08-22 | 2023-10-20 | 嵊州市浙江工业大学创新研究院 | 具有辅助电力调峰功能的油烟管道清洁系统及清洁方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3380021B2 (ja) * | 1993-12-28 | 2003-02-24 | 株式会社エフティーエル | 洗浄方法 |
| JP2000031239A (ja) * | 1998-07-13 | 2000-01-28 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
| JP2002141269A (ja) * | 2000-11-01 | 2002-05-17 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
| JP2003033733A (ja) * | 2001-07-23 | 2003-02-04 | Taiyo Toyo Sanso Co Ltd | 基板洗浄システム |
| JP2003039031A (ja) * | 2001-07-27 | 2003-02-12 | Kakizaki Mamufacuturing Co Ltd | 板材洗浄方法および板材洗浄装置 |
| JP2004313827A (ja) * | 2003-04-11 | 2004-11-11 | Tokyo Kakoki Kk | 表面処理装置 |
-
2005
- 2005-11-10 JP JP2005325739A patent/JP2006231319A/ja not_active Abandoned
- 2005-12-20 TW TW094145251A patent/TW200640586A/zh not_active IP Right Cessation
-
2006
- 2006-01-18 CN CN2006100063152A patent/CN1810389B/zh not_active Expired - Fee Related
- 2006-01-19 KR KR1020060005939A patent/KR100670687B1/ko not_active Expired - Fee Related
Non-Patent Citations (2)
| Title |
|---|
| JP特开2000-77828A 2000.03.14 |
| JP特开平10-90913A 1998.04.10 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI295199B (enExample) | 2008-04-01 |
| JP2006231319A (ja) | 2006-09-07 |
| KR100670687B1 (ko) | 2007-01-17 |
| KR20060087417A (ko) | 2006-08-02 |
| CN1810389A (zh) | 2006-08-02 |
| TW200640586A (en) | 2006-12-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100728 Termination date: 20120118 |