KR100641309B1 - 엑시머 램프 조사 장치 및 그 사용 방법 - Google Patents

엑시머 램프 조사 장치 및 그 사용 방법 Download PDF

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Publication number
KR100641309B1
KR100641309B1 KR1020057004537A KR20057004537A KR100641309B1 KR 100641309 B1 KR100641309 B1 KR 100641309B1 KR 1020057004537 A KR1020057004537 A KR 1020057004537A KR 20057004537 A KR20057004537 A KR 20057004537A KR 100641309 B1 KR100641309 B1 KR 100641309B1
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KR
South Korea
Prior art keywords
excimer lamp
lamp
excimer
irradiated
irradiation apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020057004537A
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English (en)
Korean (ko)
Other versions
KR20060038900A (ko
Inventor
고지 호소타니
히로미 사카모토
Original Assignee
가부시키가이샤 지에스 유아사 코포레이션
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Application filed by 가부시키가이샤 지에스 유아사 코포레이션 filed Critical 가부시키가이샤 지에스 유아사 코포레이션
Publication of KR20060038900A publication Critical patent/KR20060038900A/ko
Application granted granted Critical
Publication of KR100641309B1 publication Critical patent/KR100641309B1/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/123—Ultraviolet light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1020057004537A 2003-12-26 2004-12-24 엑시머 램프 조사 장치 및 그 사용 방법 Expired - Lifetime KR100641309B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2003-00435750 2003-12-26
JP2003435750A JP2005193088A (ja) 2003-12-26 2003-12-26 エキシマランプ照射装置

Publications (2)

Publication Number Publication Date
KR20060038900A KR20060038900A (ko) 2006-05-04
KR100641309B1 true KR100641309B1 (ko) 2006-11-01

Family

ID=34746912

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057004537A Expired - Lifetime KR100641309B1 (ko) 2003-12-26 2004-12-24 엑시머 램프 조사 장치 및 그 사용 방법

Country Status (5)

Country Link
JP (1) JP2005193088A (enExample)
KR (1) KR100641309B1 (enExample)
CN (1) CN100420512C (enExample)
TW (1) TWI259497B (enExample)
WO (1) WO2005065817A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4501830B2 (ja) 2005-09-28 2010-07-14 ウシオ電機株式会社 エキシマランプ及び紫外線照射装置
JP5146061B2 (ja) * 2008-04-10 2013-02-20 ウシオ電機株式会社 エキシマランプおよびこれを備えたランプユニット
JP5195111B2 (ja) * 2008-07-17 2013-05-08 ウシオ電機株式会社 エキシマランプ装置
TWI841791B (zh) * 2019-10-07 2024-05-11 日商牛尾電機股份有限公司 紫外線照射裝置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3653980B2 (ja) * 1998-04-09 2005-06-02 ウシオ電機株式会社 紫外線照射装置
JP4045682B2 (ja) * 1999-01-26 2008-02-13 株式会社日立ハイテクノロジーズ 紫外線照射による基板処理装置
JP2001185089A (ja) * 1999-12-28 2001-07-06 Quark Systems Co Ltd エキシマ照射装置
BR9917200A (pt) * 1999-06-04 2002-04-30 Henry Kozlowski Aparelho para tratamento de fluidos para luz ultravioleta
JP2001217216A (ja) * 1999-11-25 2001-08-10 Hoya Schott Kk 紫外線照射方法及び装置
JP2001319510A (ja) * 2000-05-11 2001-11-16 Ushio Inc 誘電体バリア放電ランプ装置
US6559460B1 (en) * 2000-10-31 2003-05-06 Nordson Corporation Ultraviolet lamp system and methods
JP3757790B2 (ja) * 2000-11-30 2006-03-22 ウシオ電機株式会社 誘電体バリア放電ランプを使った光源装置
JP4126892B2 (ja) * 2001-09-14 2008-07-30 ウシオ電機株式会社 光照射装置

Also Published As

Publication number Publication date
JP2005193088A (ja) 2005-07-21
CN1787875A (zh) 2006-06-14
TWI259497B (en) 2006-08-01
KR20060038900A (ko) 2006-05-04
TW200522127A (en) 2005-07-01
WO2005065817A1 (ja) 2005-07-21
CN100420512C (zh) 2008-09-24

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