JP2005193088A - エキシマランプ照射装置 - Google Patents
エキシマランプ照射装置 Download PDFInfo
- Publication number
- JP2005193088A JP2005193088A JP2003435750A JP2003435750A JP2005193088A JP 2005193088 A JP2005193088 A JP 2005193088A JP 2003435750 A JP2003435750 A JP 2003435750A JP 2003435750 A JP2003435750 A JP 2003435750A JP 2005193088 A JP2005193088 A JP 2005193088A
- Authority
- JP
- Japan
- Prior art keywords
- lamp
- excimer lamp
- excimer
- irradiation apparatus
- scattered matter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 14
- 230000001678 irradiating effect Effects 0.000 claims abstract description 9
- 239000011521 glass Substances 0.000 claims abstract description 8
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 230000007423 decrease Effects 0.000 description 13
- 238000000605 extraction Methods 0.000 description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 239000010409 thin film Substances 0.000 description 9
- 230000004888 barrier function Effects 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 5
- 239000000843 powder Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052724 xenon Inorganic materials 0.000 description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 1
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 1
- 235000011130 ammonium sulphate Nutrition 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005108 dry cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000006552 photochemical reaction Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/122—Incoherent waves
- B01J19/123—Ultraviolet light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
【解決手段】ガラス窓を介することなく、被処理物に直接エキシマ光を照射するための開口を有するランプハウス内にエキシマランプを配置するエキシマランプ照射装置において、エキシマランプの表面温度を100〜180℃に設定する。また、ランプハウス内に飛散物捕捉機構を設ける。
【選択図】 図3
Description
2 電極
2’ 電極
3 発光管
5 ランプハウス
6 飛散物捕捉板
7 ランプホルダー
Claims (2)
- ガラス窓を介することなく、被処理物に直接エキシマ光を照射するための開口を有するランプハウス内にエキシマランプを配置するエキシマランプ照射装置において、前記エキシマランプの表面温度を100〜180℃に設定したことを特徴とするエキシマランプ照射装置。
- ガラス窓を介することなく、被処理物に直接エキシマ光を照射するための開口を有するランプハウス内にエキシマランプを配置するエキシマランプ照射装置において、前記ランプハウス内に飛散物捕捉機構を設けたことを特徴とするエキシマランプ照射装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003435750A JP2005193088A (ja) | 2003-12-26 | 2003-12-26 | エキシマランプ照射装置 |
TW093139767A TWI259497B (en) | 2003-12-26 | 2004-12-21 | Irradiating device of excimer lamp and method for using the same |
CNB2004800127242A CN100420512C (zh) | 2003-12-26 | 2004-12-24 | 激发式气体分子放电灯的照射装置及其使用方法 |
KR1020057004537A KR100641309B1 (ko) | 2003-12-26 | 2004-12-24 | 엑시머 램프 조사 장치 및 그 사용 방법 |
PCT/JP2004/019762 WO2005065817A1 (ja) | 2003-12-26 | 2004-12-24 | エキシマランプ照射装置及びその使用方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003435750A JP2005193088A (ja) | 2003-12-26 | 2003-12-26 | エキシマランプ照射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005193088A true JP2005193088A (ja) | 2005-07-21 |
JP2005193088A5 JP2005193088A5 (ja) | 2007-02-15 |
Family
ID=34746912
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003435750A Pending JP2005193088A (ja) | 2003-12-26 | 2003-12-26 | エキシマランプ照射装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2005193088A (ja) |
KR (1) | KR100641309B1 (ja) |
CN (1) | CN100420512C (ja) |
TW (1) | TWI259497B (ja) |
WO (1) | WO2005065817A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010022924A (ja) * | 2008-07-17 | 2010-02-04 | Ushio Inc | エキシマランプ装置 |
KR100961316B1 (ko) | 2005-09-28 | 2010-06-04 | 우시오덴키 가부시키가이샤 | 엑시머 램프 및 자외선 조사장치 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5146061B2 (ja) * | 2008-04-10 | 2013-02-20 | ウシオ電機株式会社 | エキシマランプおよびこれを備えたランプユニット |
US20220409755A1 (en) * | 2019-10-07 | 2022-12-29 | Ushio Denki Kabushiki Kaisha | Ultraviolet irradiation device |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000216128A (ja) * | 1999-01-26 | 2000-08-04 | Hitachi Electronics Eng Co Ltd | 紫外線照射による基板処理装置 |
JP2001185089A (ja) * | 1999-12-28 | 2001-07-06 | Quark Systems Co Ltd | エキシマ照射装置 |
JP2001217216A (ja) * | 1999-11-25 | 2001-08-10 | Hoya Schott Kk | 紫外線照射方法及び装置 |
JP2001319510A (ja) * | 2000-05-11 | 2001-11-16 | Ushio Inc | 誘電体バリア放電ランプ装置 |
JP2003080191A (ja) * | 2001-09-14 | 2003-03-18 | Ushio Inc | 光照射装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3653980B2 (ja) * | 1998-04-09 | 2005-06-02 | ウシオ電機株式会社 | 紫外線照射装置 |
CN1183043C (zh) * | 1999-06-04 | 2005-01-05 | 亨利·科兹罗维斯基 | 流体的紫外线处理装置 |
US6559460B1 (en) * | 2000-10-31 | 2003-05-06 | Nordson Corporation | Ultraviolet lamp system and methods |
JP3757790B2 (ja) * | 2000-11-30 | 2006-03-22 | ウシオ電機株式会社 | 誘電体バリア放電ランプを使った光源装置 |
-
2003
- 2003-12-26 JP JP2003435750A patent/JP2005193088A/ja active Pending
-
2004
- 2004-12-21 TW TW093139767A patent/TWI259497B/zh active
- 2004-12-24 WO PCT/JP2004/019762 patent/WO2005065817A1/ja active Application Filing
- 2004-12-24 CN CNB2004800127242A patent/CN100420512C/zh active Active
- 2004-12-24 KR KR1020057004537A patent/KR100641309B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000216128A (ja) * | 1999-01-26 | 2000-08-04 | Hitachi Electronics Eng Co Ltd | 紫外線照射による基板処理装置 |
JP2001217216A (ja) * | 1999-11-25 | 2001-08-10 | Hoya Schott Kk | 紫外線照射方法及び装置 |
JP2001185089A (ja) * | 1999-12-28 | 2001-07-06 | Quark Systems Co Ltd | エキシマ照射装置 |
JP2001319510A (ja) * | 2000-05-11 | 2001-11-16 | Ushio Inc | 誘電体バリア放電ランプ装置 |
JP2003080191A (ja) * | 2001-09-14 | 2003-03-18 | Ushio Inc | 光照射装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100961316B1 (ko) | 2005-09-28 | 2010-06-04 | 우시오덴키 가부시키가이샤 | 엑시머 램프 및 자외선 조사장치 |
JP2010022924A (ja) * | 2008-07-17 | 2010-02-04 | Ushio Inc | エキシマランプ装置 |
KR101237650B1 (ko) * | 2008-07-17 | 2013-02-27 | 우시오덴키 가부시키가이샤 | 엑시머 램프 장치 |
Also Published As
Publication number | Publication date |
---|---|
CN1787875A (zh) | 2006-06-14 |
TWI259497B (en) | 2006-08-01 |
KR100641309B1 (ko) | 2006-11-01 |
CN100420512C (zh) | 2008-09-24 |
TW200522127A (en) | 2005-07-01 |
WO2005065817A1 (ja) | 2005-07-21 |
KR20060038900A (ko) | 2006-05-04 |
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Legal Events
Date | Code | Title | Description |
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A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20051213 |
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A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061226 |
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A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061226 |
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A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20091117 |
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A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20100316 |