WO2009145253A1 - 外部電極型放電灯及びこれを用いた紫外線照射装置 - Google Patents
外部電極型放電灯及びこれを用いた紫外線照射装置 Download PDFInfo
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- WO2009145253A1 WO2009145253A1 PCT/JP2009/059762 JP2009059762W WO2009145253A1 WO 2009145253 A1 WO2009145253 A1 WO 2009145253A1 JP 2009059762 W JP2009059762 W JP 2009059762W WO 2009145253 A1 WO2009145253 A1 WO 2009145253A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/067—Main electrodes for low-pressure discharge lamps
- H01J61/0672—Main electrodes for low-pressure discharge lamps characterised by the construction of the electrode
Definitions
- the present invention relates to an external electrode type discharge lamp such as an excimer lamp that emits ultraviolet light by generating discharge in a discharge tube by an external electrode and an ultraviolet irradiation apparatus using the same.
- An excimer lamp using a dielectric barrier discharge emits high-energy vacuum ultraviolet rays having a center wavelength of 172 nm when xenon gas is used as a discharge gas, and performs optical cleaning of glass substrates and semiconductor wafers of liquid crystal displays. It can be used as a light source lamp of an ultraviolet irradiation device.
- vacuum ultraviolet rays are absorbed by oxygen and the like in the air and are immediately attenuated, a cylindrical excimer lamp is stored in a lamp house filled with an inert gas, and a flat window material is provided at the lower end of the lamp house. It is common to irradiate an object to be irradiated such as a glass substrate directly therethrough with vacuum ultraviolet rays (see, for example, Patent Document 1).
- an excimer lamp having a rectangular discharge tube has been conventionally used (for example, see Patent Document 2). Since such a rectangular discharge tube has a wide flat surface, the object to be irradiated is directly irradiated with vacuum ultraviolet rays through a slight gap of 2 to 3 mm below the excimer lamp without passing through the window material of the lamp house. Therefore, the attenuation of vacuum ultraviolet rays in the air is small, and the irradiation efficiency can be increased.
- the discharge tube 1 of the excimer lamp is a rectangular sealed container made of synthetic quartz that is long on the left and right, and discharge gas such as xenon gas is sealed inside.
- the first electrode 2 is formed with a solid electrode pattern with no gap on the inner side over almost the entire surface.
- the second electrode 3 is formed in a net-like electrode pattern over almost the entire surface.
- the first electrode 2 and the second electrode 3 are made of a metal thin film in which a metal such as aluminum is formed on the surface by vapor deposition or the like.
- This excimer lamp generates a plasma inside the discharge tube 1 by applying a high-frequency high-frequency voltage between the first electrode 2 and the second electrode 3, and the net electrode of the second electrode 3. Vacuum ultraviolet light can be emitted downward through the pattern gap.
- the excimer lamp described above needs to check the intensity of the vacuum ultraviolet rays in a timely manner because the intensity of the vacuum ultraviolet rays emitted due to deterioration due to use gradually decreases and the cleaning effect of the irradiated object also decreases.
- a transport path for the irradiated object is provided below the excimer lamp, and the gap between the lower flat surface of the discharge tube 1 and the irradiated object is extremely narrow. Therefore, an ultraviolet intensity sensor is provided below the excimer lamp. It is not easy to place and directly measure the vacuum ultraviolet rays emitted below this. For this reason, conventionally, as shown in FIG.
- a window portion 2a having a net-like electrode pattern is formed at an appropriate position of the first electrode 2 formed on the upper flat surface of the discharge tube 1.
- the vacuum ultraviolet rays emitted upward from the portion 2a are measured by an ultraviolet intensity sensor (not shown) disposed above the excimer lamp.
- an ultraviolet intensity sensor not shown
- FIGS. 7 and 8 for easy understanding of the drawings, the mesh of the window 2a and the second electrode 3 is enlarged and displayed.
- the first electrode 2 also serves as a reflector that reflects the vacuum ultraviolet rays radiated upward in the discharge tube 1 and changes it downward
- the window 2a is formed here. Since vacuum ultraviolet rays escape upward from the gaps in the mesh-like electrode pattern, as shown in FIG. 9, the intensity distribution in the left-right direction of vacuum ultraviolet rays emitted downward from the excimer lamp is near this window portion 2a (near A portion). There was a problem that the irradiated object could not be irradiated with vacuum ultraviolet rays of uniform intensity. In addition, the larger the window portion 2a, the more accurately the measurement can be performed by the ultraviolet intensity sensor disposed at the upper side, but there is a problem that the degree of uniformity of the vacuum ultraviolet irradiation downward becomes worse.
- the vacuum ultraviolet rays that are emitted to the lower side of the excimer lamp through the gap between the mesh electrode patterns of the second electrode 3 are also added with the vacuum ultraviolet rays reflected by the upper first electrode 2. Since the vacuum ultraviolet rays that are emitted upward through the gap between the reticulated electrode patterns 2a are hardly added with the vacuum ultraviolet rays reflected by the second electrode 3 below, the vacuum ultraviolet rays that are emitted upward from the window 2a. However, the intensity is slightly weaker than that of the vacuum ultraviolet rays emitted below the excimer lamp, and it is difficult to accurately monitor the intensity of the vacuum ultraviolet rays that actually irradiate the irradiated object. Japanese Patent Application Laid-Open No. 09-171799 JP 2000-260396 A
- a window is formed on the first electrode and a shield is formed on a region opposite to the second electrode, so that the irradiated object can be uniformly irradiated with ultraviolet rays and the window can be accurately monitored. It is an object of the present invention to provide an external electrode type discharge lamp that can be used and an ultraviolet irradiation apparatus using the same.
- the external electrode type discharge lamp according to claim 1 is a hermetically sealed container made of a dielectric material that transmits ultraviolet rays, and includes a discharge tube in which a discharge gas is sealed, and an ultraviolet transmittance formed on the upper surface of the discharge tube.
- a portion of the first electrode has an ultraviolet transmittance. Is characterized in that a locally high window portion is formed and a shielding portion having a locally low ultraviolet transmittance is formed in a region of the second electrode facing the window portion.
- the ultraviolet transmittance of the first electrode is low and the ultraviolet transmittance of the second electrode is high.
- the average ultraviolet transmittance when these electrodes are viewed as a whole is higher than that of the first electrode. It means that the electrode of 2 is higher. Therefore, these electrodes are not limited to the case where each part has a uniform ultraviolet transmittance uniformly, but for example, from an electrode pattern in which a part that transmits ultraviolet light and a part that does not transmit light, such as a net, are alternately repeated.
- the difference in the ultraviolet transmittance is caused by the difference in the aperture ratio of the portion that transmits ultraviolet rays.
- the case where the ultraviolet transmittance is low includes the case where ultraviolet rays are not transmitted at all.
- the irradiated object is irradiated with ultraviolet rays through the lower surface of the discharge tube in which the second electrode having a high ultraviolet transmittance is formed.
- the ultraviolet transmittance of the window portion is locally high because the average ultraviolet transmittance of the entire area of the window portion is the average of the entire area of the first electrode except for the window portion. This means that the ultraviolet transmittance of the shielding portion is locally low.
- the average ultraviolet transmittance of the entire region of the shielding portion is equal to the shielding portion of the second electrode. It means that it is lower than the average ultraviolet transmittance of the entire region except for.
- the upper and lower surfaces of the discharge tube mean the upper and lower surfaces on the outer surface of the sealed container.
- the ultraviolet transmittance of the window portion of the first electrode and the ultraviolet transmittance of the second electrode are the same.
- the first electrode and the second electrode are made of a metal thin film formed on a discharge tube.
- the first electrode and the second electrode are made of a metal thin film formed on a discharge tube.
- the sealed vessel of the discharge tube is a rectangular shape that is long on the left and right with the upper and lower surfaces being flat
- the first electrode is Ultraviolet transmittance is reduced by forming a solid electrode pattern
- the second electrode is formed by forming a net-like electrode pattern to increase ultraviolet transmittance
- the window portion is , Which is formed at either the left or right end of the first electrode and has an ultraviolet transmittance increased by making the electrode pattern reticulated
- the shielding portion is an end facing the window portion of the second electrode It is formed in the part, and the ultraviolet ray transmittance is lowered by making the electrode pattern a solid surface.
- the sealed vessel of the discharge tube is a rectangular shape that is long on the left and right with the upper and lower surfaces being flat
- the first electrode is Ultraviolet transmittance is reduced by forming a solid electrode pattern
- the second electrode is formed by forming a net-like electrode pattern to increase ultraviolet transmittance
- the window portion is , Which is formed at either the left or right end of the first electrode and has an ultraviolet transmittance increased by making the electrode pattern reticulated
- the shielding portion is an end facing the window portion of the second electrode It is formed in the part, and the ultraviolet ray transmittance is lowered by making the electrode pattern a solid surface.
- the sealed vessel of the discharge tube is a rectangular shape that is long on the left and right with the upper and lower surfaces being flat
- the first electrode is Ultraviolet transmittance is reduced by forming a solid electrode pattern
- the second electrode is formed by forming a net-like electrode pattern to increase ultraviolet transmittance
- the window portion is , Which is formed at either the left or right end of the first electrode and has an ultraviolet transmittance increased by making the electrode pattern reticulated
- the shielding portion is an end facing the window portion of the second electrode It is formed in the part, and the ultraviolet ray transmittance is lowered by making the electrode pattern a solid surface.
- Claim 8 is the external electrode type discharge lamp according to claim 4, wherein the discharge vessel sealed container is a rectangular shape that is long on the left and right with the upper and lower surfaces being flat, and the first electrode is Ultraviolet transmittance is reduced by forming a solid electrode pattern, and the second electrode is formed by forming a net-like electrode pattern to increase ultraviolet transmittance, and the window portion is , Which is formed at either the left or right end of the first electrode and has an ultraviolet transmittance increased by making the electrode pattern reticulated, and the shielding portion is an end facing the window portion of the second electrode It is formed in the part, and the ultraviolet ray transmittance is lowered by making the electrode pattern a solid surface.
- the electrode pattern of the window portion of the first electrode and the electrode pattern of the second electrode are in a net-like pattern.
- the electrode pattern of the window portion of the first electrode and the electrode pattern of the second electrode are in a net-like pattern.
- the eleventh aspect of the present invention is the external electrode type discharge lamp according to the seventh aspect, wherein the electrode pattern of the window portion of the first electrode and the electrode pattern of the second electrode are in a net-like pattern.
- the electrode pattern of the window portion of the first electrode and the electrode pattern of the second electrode are in a net-like pattern.
- an ultraviolet irradiation device in which the external electrode type discharge lamps of the fifth to twelfth aspects of the present invention are arranged so as to be shifted back and forth, and one of the external electrode type discharge lamps is a shielding portion for the second electrode. Is arranged on the right side, the other external electrode type discharge lamp is arranged so that the shielding part of the second electrode is on the left side, and the shielding part in the second electrode of one of the external electrode type discharge lamps One set with the left end position matched with the right end position of the shielding portion of the second electrode of the other external electrode type discharge lamp is set as one set, and one or more sets of these two external electrode type discharge lamps are arranged side by side. It is arranged.
- the external electrode type discharge lamp according to claim 14 is a hermetically sealed container made of a dielectric material that transmits ultraviolet rays, and includes a discharge tube in which a discharge gas is sealed, and an ultraviolet transmittance formed on an upper surface of the discharge tube.
- a part of the first electrode is provided with an ultraviolet ray.
- a window portion having a locally high transmittance is formed, and a shielding portion having a locally low ultraviolet transmittance is formed in a region facing the window portion in the second electrode.
- the left, right, up, down, front and back directions in these claims are merely for indicating directions orthogonal to each other, and do not necessarily coincide with the actual left, right, up, down, front and back directions.
- the lower surface of the discharge tube can be arranged upward to irradiate the upper irradiated object with ultraviolet rays.
- the shielding portion of the second electrode is formed in a region facing the window portion of the first electrode, ultraviolet rays emitted upward from the window portion of the first electrode are not affected.
- the ultraviolet rays reflected by the shielding portion of the lower second electrode are also included. Therefore, since the ultraviolet rays emitted upward from the window portion of the first electrode can be emitted under the conditions close to the ultraviolet rays emitted downward from the second electrode, the ultraviolet rays actually irradiating the irradiated object It can be monitored under conditions as close as possible to the strength.
- the ultraviolet transmittance of the window portion and the second electrode is the same, the ultraviolet ray can be emitted from the window portion under a condition closer to the ultraviolet ray emitted from the second electrode. .
- the first electrode and the second electrode are made of a metal thin film such as a vapor deposition film, the first electrode and the second electrode are in close contact with the surface of the discharge tube, which is a dielectric, without any gaps. Efficiency can be increased.
- the mesh electrode of the second electrode since the shielding portion is formed at the end of the second electrode facing the window at the end of the first electrode, the mesh electrode of the second electrode The ultraviolet rays emitted downward from the pattern do not become non-uniform due to the presence of the window portion, and the irradiated object can be irradiated with ultraviolet rays of uniform intensity from the portion excluding the shielding portion of the second electrode. it can.
- the ultraviolet rays emitted upward from the window portion of the first electrode include a lot of ultraviolet rays reflected by the solid electrode pattern in the shielding portion of the lower second electrode, the second electrode Can be released under conditions close to the ultraviolet rays emitted downward. Therefore, it is possible to monitor under conditions as close as possible to the intensity of the ultraviolet rays actually irradiating the irradiated object.
- the mesh electrode pattern of the window and the mesh electrode pattern of the second electrode are the same, it is closer to the ultraviolet ray emitted from the second electrode. Under certain conditions, ultraviolet rays can be emitted from the window.
- a plurality of external electrode type discharge lamps are made into one set, and the portions of the second electrode excluding the shielding portion are shifted so as to be continuous left and right and arranged in a staggered manner. Therefore, it is possible to uniformly irradiate ultraviolet rays over a wide range of nearly twice the left and right length of each external electrode type discharge lamp.
- the shielding portion of the second electrode since the shielding portion of the second electrode is formed in the region facing the window portion of the first electrode, the ultraviolet rays emitted upward from the window portion of the first electrode are The ultraviolet rays reflected by the shielding portion of the lower second electrode are also included. Therefore, since the ultraviolet rays emitted upward from the window portion of the first electrode can be emitted under the conditions close to the ultraviolet rays emitted downward from the second electrode, the ultraviolet rays actually irradiating the irradiated object It can be monitored under conditions as close as possible to the strength.
- the discharge tube of the external electrode type discharge lamp is preferably made of synthetic quartz. If the discharge tube is made of synthetic quartz, it is possible to provide a discharge tube having a high transmittance of short wavelength ultraviolet rays including vacuum ultraviolet rays.
- the discharge gas of the external electrode type discharge lamp is preferably xenon gas.
- xenon gas When xenon gas is used as the discharge gas, high-energy vacuum ultraviolet rays having a center wavelength of 172 nm can be emitted.
- FIG. 1 shows an embodiment of the present invention, and is a plan view (a), a side view (b), and a rear view (c) showing a configuration of an excimer lamp. It is a graph which shows the fall of the intensity
- FIG. 1 illustrates an embodiment of the present invention, and is a plan view illustrating a configuration of an ultraviolet irradiation apparatus that uses two excimer lamps as a pair.
- 1 is a partially enlarged plan view, a partially enlarged rear view, and a graph of intensity distribution of an excimer lamp for showing an intensity distribution of a vacuum ultraviolet ray of an excimer lamp that is a pair of two, showing an embodiment of the present invention.
- the other embodiment of this invention is shown, Comprising: It is a longitudinal cross-sectional front view of an external electrode type discharge lamp. It is a bird's-eye perspective view for showing a prior art example and showing the composition of an excimer lamp.
- an excimer lamp used as a light source lamp of an ultraviolet irradiation device that performs light cleaning of an object to be irradiated such as a glass substrate of a liquid crystal display will be described as in the conventional example.
- the first electrode 2 is formed on the upper flat surface of the long rectangular discharge tube 1, and the second electrode 3 is formed on the lower flat surface. Formed.
- the discharge tube 1 is a sealed container in which left and right open ends of a rectangular cylinder made of synthetic quartz are closed with a square quartz block, and xenon gas is sealed therein as a discharge gas. Since the discharge tube 1 is arranged on the left and right above the conveyance path for transferring the irradiated object in the front-rear direction, the discharge tube 1 is long on the left and right, and may exceed 1000 mm depending on the size of the irradiated object. Further, the upper and lower surfaces of the discharge tube 1 are composed of substantially flat upper and lower flat surfaces having a width of about 35 to 50 mm (37 mm in this embodiment), and the left and right surfaces also have a height of 12 to 16 mm. (In the present embodiment, it has a rounded side surface having a radius of about 12 mm (therefore, the cross-sectional shape near the center of the lamp perpendicular to the longitudinal direction is an oval shape).
- the first electrode 2 is an aluminum vapor deposition film formed in a substantially rectangular shape on almost the entire upper flat surface of the discharge tube 1, and a gap is formed inside the substantially rectangular region.
- a thin film is formed with an electrode pattern on one surface with no surface.
- a window portion 2 a is formed at the right end portion of the first electrode 2.
- the window portion 2a is formed in a rectangular region that leaves a part of the entire surface at the right end of the right end portion of the first electrode 2, and in this region, a pattern of a thin aluminum deposition film is formed on the left and right and front and rear.
- a plurality of equidistant arrangements are formed so as to intersect with each other to form a net-like electrode pattern. Therefore, the upper flat surface of the discharge tube 1 is exposed in a large number of mesh-like gaps (mesh) in the window portion 2a, and vacuum ultraviolet rays are emitted upward therefrom.
- the second electrode 3 is also an aluminum vapor deposition film formed in a substantially square shape on almost the entire lower flat surface of the discharge tube 1.
- a plurality of elongated aluminum vapor deposition films are arranged at equal intervals in the front and rear to cross each other to form a net-like electrode pattern. Therefore, the lower flat surface of the discharge tube 1 is exposed in a large number of mesh-like gaps (mesh) of the second electrode 3, from which vacuum ultraviolet rays are emitted downward to irradiate the irradiated object. ing.
- a shielding portion 3 a is formed at the right end portion of the second electrode 3.
- the shielding portion 3a is formed in a region on the right side of the second electrode 3 from the position directly below the left end of the window portion 2a of the first electrode 2, and the aluminum vapor deposition is limited to this region.
- the film is formed as a thin film on a solid electrode pattern with no gap inside.
- the net-like electrode pattern of the window portion 2a of the first electrode 2 and the net-like electrode pattern of the second electrode 3 have the same area (aperture ratio) of gaps (mesh) with respect to the respective regions of about 70%.
- the ultraviolet transmittance is also about 70%, and the vacuum ultraviolet rays are cut by about 30%.
- the shielding part 3a of the second electrode 3 only needs to be formed at least in a region immediately below the window part 2a, and vacuum ultraviolet rays emitted from the net-like part of the second electrode 3 affect the influence of the window part 2a.
- it is slightly wider in the left and right and front and rear directions than the area directly below the window part 2a. It may be formed.
- the left end of the shielding portion 3a is made to coincide with the left end of the window portion 2a, but the right end of the shielding portion 3a is formed to reach the right end of the second electrode 3. Therefore, it is wider than the right end of the window 2a.
- the second electrode 3 is also formed with a solid part at the left end, but this part is only a lead-out part for connecting a power source to the second electrode 3.
- this part is only a lead-out part for connecting a power source to the second electrode 3.
- the front and rear edges of the second electrode 3 are widened in order to secure a current path. Therefore, the left and right and front and rear ends of the second electrode 3 are shielded.
- a solid surface may be formed.
- the region of the second electrode 3 that is directly below the window portion 2a is a solid surface portion.
- the shielding portion 3a is also used as a lead portion for connecting a power source to the second electrode 3, a solid surface portion as in the present embodiment is formed at the left end portion of the second electrode 3. There is no need.
- the excimer lamp having the above configuration generates a dielectric barrier discharge inside the discharge tube 1 made of a dielectric material by applying a high-frequency high-frequency voltage between the first electrode 2 and the second electrode 3.
- vacuum ultraviolet rays having a center wavelength of 172 nm are emitted (excimer emission).
- the vacuum ultraviolet rays are emitted directly below the discharge tube 1 through the net-like gap of the second electrode 3 or once reflected by the inner surface of the first electrode 2, It is discharged below the discharge tube 1 through a net-like gap. Therefore, if the irradiated object conveyed under the excimer lamp is irradiated with a vacuum ultraviolet ray emitted below the discharge tube 1 through a slight gap, the object can be optically cleaned.
- vacuum ultraviolet rays radiated from the discharge plasma generated inside the discharge tube 1 are emitted directly above the discharge tube 1 through the net-like gap of the window portion 2a of the first electrode 2.
- the light is once reflected by the inner surface of the shielding portion 3 a of the second electrode 3, and then emitted to the upper side of the discharge tube 1 through the net-like gap of the window portion 2 a of the first electrode 2. Therefore, if an ultraviolet intensity sensor (not shown) is disposed above the window 2a at the right end of the excimer lamp, the intensity of the vacuum ultraviolet ray emitted from the excimer lamp can be measured, thereby maintaining and managing the vacuum ultraviolet ray. Strength control and the like can be performed.
- the window portion 2a for measuring the intensity of the vacuum ultraviolet ray is located at the end portion of the first electrode 2, and the end portion of the second electrode 3 below the window portion 2a is shielded by the shielding portion 3a.
- the intensity of the vacuum ultraviolet rays emitted downward from the second electrode 3 does not become uneven due to the influence of the window portion 2a. Therefore, this excimer lamp can irradiate the irradiated object with vacuum ultraviolet rays having a uniform intensity distribution in the left-right direction.
- the vacuum ultraviolet rays radiated inside the discharge tube 1 are directly emitted from the window portion 2a, but also the vacuum ultraviolet rays emitted after being reflected by the shielding portion 3a, so that the second electrode 3 is emitted under conditions close to vacuum ultraviolet rays emitted downward. Accordingly, the intensity of the vacuum ultraviolet rays that the excimer lamp irradiates the object to be irradiated below can be accurately measured by the vacuum ultraviolet rays emitted from the window portion 2a under conditions close to this. Strength control and the like can be reliably performed.
- the excimer lamp has a lower reflectivity of the first electrode 2 and the second electrode 3 due to deterioration as the lighting time becomes longer.
- the intensity of the vacuum ultraviolet rays irradiated downward from the second electrode 3 decreases as the lighting time elapses.
- the intensity of the vacuum ultraviolet rays emitted upward from the window 2a is originally less dependent on the reflected light from the second electrode 3 and is less affected by the lowering of the reflectance. Therefore, the degree of decrease with the elapse of the lighting time becomes moderate.
- the reflectance of the shielding portion 3a is reduced due to deterioration in the same manner as the first electrode 2, so that it is emitted upward from the window portion 2a.
- the intensity of the vacuum ultraviolet rays greatly decreases with the passage of the lighting time. Therefore, in the excimer lamp of this embodiment, the intensity of the vacuum ultraviolet rays measured by the window portion 2a accurately reflects the decrease due to the deterioration with time of the intensity of the vacuum ultraviolet rays irradiated downward from the second electrode 3.
- the life of the excimer lamp can be accurately determined.
- the ultraviolet intensity sensor may directly use a light receiving element having a good sensitivity at a wavelength of 172 nm, but normally, vacuum ultraviolet light having a wavelength of 172 nm is converted into visible light by a phosphor and received by a photodiode. Many.
- An ultraviolet irradiating device can be configured simply by arranging one or a plurality of excimer lamps in the front-rear direction with the left and right positions aligned above the irradiation material transport path. In this case, only one ultraviolet intensity sensor is used, and this is sequentially moved above the window portion 2a of each excimer lamp by a robot or the like, thereby sequentially measuring the intensity of the vacuum ultraviolet rays of each excimer lamp. May be.
- an ultraviolet irradiation device in which two pairs of excimer lamps 10 are arranged in a staggered manner in the front-rear direction above the conveyance path of the irradiated object may be used.
- the conventional excimer lamp shown in FIGS. 7 to 8 is used, as shown in FIG. 9, the intensity of the vacuum ultraviolet rays decreases at the portion where the window portion 2a is provided.
- the intensity distribution in the left-right direction of the vacuum ultraviolet rays when these two excimer lamps 11 are used as a pair is also nonuniform in the portion (near part A) where the window 2a of each excimer lamp 11 is provided. .
- a portion excluding the shielding portion 3 a in the second electrode 3 of each pair of two excimer lamps 10. are arranged in a zigzag pattern so as to be continuous from side to side, so that vacuum ultraviolet rays can be uniformly irradiated over a wide range of nearly two times the left and right length of each excimer lamp 10. That is, one excimer lamp 10 of each pair is arranged so that the shielding part of the second electrode is on the right side, and the other excimer lamp 10 is arranged so that the shielding part of the second electrode is on the left side. .
- these two excimer lamps 10 are arranged so as to be shifted in the front-rear direction, and the left end position of the shielding part 3a of one excimer lamp 10 and the right end position of the shielding part 3a of the other excimer lamp 10 are matched. Let them be arranged in a staggered pattern. As a result, in the case of this embodiment, as shown in the plan views of FIGS. 3 and 5, the pair of excimer lamps 10 is positioned at the left end of the window 2 a at the right end of one excimer lamp 10. And the position of the right end of the window 2a at the left end of the other excimer lamp 10 can be matched.
- the net-like portions of the second electrodes 3 of the two excimer lamps 10 in each pair are separated from each other in the front-rear direction but are continuously connected in the left-right direction.
- the intensity of the vacuum ultraviolet rays attenuated at the boundary of the mesh portion of the second electrode 3 is supplemented to each other, and the intensity distribution in the left-right direction is uniformly connected.
- the excimer lamp 10 of the present embodiment is not affected by the window 2a because the vacuum ultraviolet rays emitted from the net-like portion of the first electrode 2 are not affected. There is no occurrence of uneven portions in the intensity distribution in the direction.
- the square discharge tube 1 long in the left and right was produced by plugging the right and left opening ends of a square cylinder with a square quartz block
- the rectangular shape that is long to the left and right refers to a square that has the longest left and right lengths compared to the front and rear width and the vertical height.
- the square shape referred to here may be any shape as long as the longitudinal cross-sectional shape of the cut surface along the front-rear direction and the up-down direction is substantially square, and the corners may be chamfered or rounded.
- the front and rear side surfaces do not necessarily have to be flat surfaces, and may be curved outward in a round shape, for example, as in the above embodiment. Furthermore, some irregularities may be formed on the outer shape of the discharge tube 1 for gas filling, excimer lamp attachment, and the like.
- the present invention can be similarly applied to discharge tubes 1 having other shapes.
- the upper and lower surfaces of the discharge tube 1 are not limited to flat surfaces.
- a dome-shaped discharge tube 1 having a substantially flat bottom surface and a semi-cylindrical top surface can be used.
- the case where xenon gas is used as the discharge gas is shown, but other rare gas capable of excimer light emission, its halogen-based gas, and other substances can also be used. Furthermore, in the above embodiment, the case of emitting vacuum ultraviolet light having a wavelength of 172 nm is shown. However, since the wavelength of ultraviolet light is determined by the substance used as the discharge gas, it is not limited to the wavelength of 172 nm. Not exclusively.
- the excimer lamp has been described.
- the present invention does not necessarily require excimer emission, and may be, for example, another external electrode type discharge lamp that emits 254 nm using the line spectrum of mercury atoms. Good.
- the window part 2a of the 1st electrode 2 and the net-like part of the 2nd electrode 3 showed the case where a plurality of elongate electrodes were orthogonally crossed and a net
- This mesh pattern is arbitrary.
- the elongated electrodes may not be orthogonal, and the mesh may be a rhombus or a parallelogram.
- the mesh may be a hexagonal honeycomb mesh.
- a single long and thin linear electrode pattern is formed as a second electrode 3 by arranging long and thin linear electrode patterns at intervals. Only a pattern may be formed.
- these 1st electrodes 2 and the shielding part 3a are also by electrode patterns, such as a mesh shape, for example. It may be one that transmits vacuum ultraviolet rays to some extent.
- the ultraviolet transmittance of the first electrode 2 is lower than the ultraviolet transmittance of the second electrode 3
- the ultraviolet transmittance of the shielding part 3a is lower than the ultraviolet transmittance of the second electrode 3, and the window portion.
- the ultraviolet transmittance of 2a must be higher than the ultraviolet transmittance of the first electrode 2.
- the second electrode 3 and the window portion 2a need only have a higher ultraviolet transmittance than the first electrode 2 and the shielding portion 3a, it is not always necessary to form a reticulated electrode pattern.
- the second electrode 3 and the window portion 2a are the same electrode pattern as the first electrode 2 and the shielding portion 3a, but ultraviolet rays are transmitted through the electrode film itself to some extent due to differences in film thickness and material. It may be what you do.
- the ultraviolet transmittance of the first electrode 2 is lower than the ultraviolet transmittance of the second electrode 3
- the ultraviolet transmittance of the shielding part 3 a is lower than the ultraviolet transmittance of the second electrode 3.
- the ultraviolet transmittance of the window portion 2a must be lower than that of the first electrode 2. Even in such a case, it is preferable that the ultraviolet transmittances of the window 2a of the first electrode 2 and the second electrode 3 are the same in order to make the conditions for emitting ultraviolet rays closer.
- the window portion 2a of the 1st electrode 2 was formed in the square area
- the window portion 2a may be formed over the entire end portion of the first electrode 2. That is, the window portion 2a is formed at the left and right end portions of the first electrode 2, but this end portion is not limited to the end of the edge, and may be an end portion closer to the center to some extent.
- the shape of the area of the window 2a is not limited to a square, and may be any shape, for example, a circle. Further, the window portion 2a and the shielding portion 3a may be formed not at the end portion but at the center, for example, depending on the application, such as when the irradiated object is small.
- the 1st electrode 2 and the 2nd electrode 3 were aluminum vapor deposition films
- metal vapor deposition films other than aluminum may be sufficient and it formed into a film by methods other than vapor deposition.
- a metal thin film may be used.
- the first electrode 2 and the second electrode 3 may be a conductive film such as a thick film other than a metal thin film, such as a metal foil attached to the surface of the discharge tube 1 or a metal disposed on the surface of the discharge tube 1. It may be formed of a conductive material such as a plate or an electric wire.
- the external electrode type discharge lamp in which the first electrode 2 and the second electrode 3 are both formed on the upper surface and the lower surface, which are the outer surfaces of the discharge tube 1, has been described.
- the same can be applied to an external electrode type discharge lamp in which either one of the second electrode 3 and the second electrode 3 is formed inside the discharge tube 1.
- the discharge tube 1 of the external electrode type discharge lamp is not a square but a sealed container made of a semicircular dome-shaped cylinder.
- the first electrode 2 is made of an aluminum vapor deposition film formed on almost the entire upper surface of the semi-cylindrical surface of the discharge tube 1, and a net-like or elongated linear electrode pattern window is formed on an end portion (not shown). Part 2a is formed.
- the second electrode 3 is formed of an electric wire made of aluminum or the like disposed on the inner lower surface, which is the lower part of the inside of the discharge tube 1, and is flattened flatly by crushing the electric wire at an end (not shown).
- the shield portion 3a is formed.
- the second electrode 3 made of an electric wire is hardly obstructed, either directly from the inside of the discharge tube 1 or one point shown in the figure. Reflected by the first electrode 2 as indicated by the chain line, the vacuum ultraviolet ray is irradiated to the irradiated object W below. Further, from the shielding part 3a at the end (not shown), it is reflected directly from the inside of the discharge tube 1 or reflected by the shielding part 3a, and the external electrode type discharge lamp is emitted upward, thereby the same as in the above embodiment. An effect can be obtained.
- the external electrode type discharge lamp of the present invention and the ultraviolet irradiation apparatus using the same can monitor the decrease in the intensity of the ultraviolet ray of the discharge lamp due to deterioration due to use from the window portion, This is extremely useful when performing optical cleaning or the like of a semiconductor wafer.
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Abstract
Description
2 第1の電極
2a 窓部
3 第2の電極
3a 遮蔽部
10 エキシマランプ
11 従来のエキシマランプ
エキシマランプは、図1(a)~(c)に示すように、長尺方形の放電管1の上平坦面に第1の電極2を形成すると共に、下平坦面に第2の電極3を形成したものである。
上記エキシマランプは、第2の電極3の網状の部分から下方に真空紫外線を放出するので、被照射物の幅がこの第2の電極3の網状の部分の左右の長さより短ければ、この被照射物の搬送路の上方に1本又は複数本のエキシマランプを左右位置を揃えて前後方向に並べて配置するだけで紫外線照射装置を構成することができる。なお、この場合、紫外線強度センサは1個だけを用い、これをロボット等によって各エキシマランプの窓部2aの上方に順に移動させることにより、各エキシマランプの真空紫外線の強度を順次測定するようにしてもよい。
なお、上記実施形態では、放電管1に合成石英を用いる場合を示したが、放射する紫外線の波長に対する透過率が高ければ、必ずしも合成石英には限定されない。
Claims (14)
- 紫外線を透過する誘電体からなる密閉容器であって、内部に放電用ガスを封入した放電管と、この放電管の上面に形成された紫外線透過率の低い第1の電極と、この放電管の下面に形成された紫外線透過率の高い第2の電極と、を備えた外部電極型放電灯において、
前記第1の電極の一部に、紫外線透過率が局所的に高い窓部が形成されると共に、前記第2の電極における前記窓部に対向する領域に、紫外線透過率が局所的に低い遮蔽部が形成されたことを特徴とする外部電極型放電灯。 - 前記第1電極の窓部の紫外線透過率と、第2電極の紫外線透過率とが同一であることを特徴とする請求項1に記載の外部電極型放電灯。
- 前記第1の電極と第2の電極が、放電管上に形成された金属薄膜からなることを特徴とする請求項1に記載の外部電極型放電灯。
- 前記第1の電極と第2の電極が、放電管上に形成された金属薄膜からなることを特徴とする請求項2に記載の外部電極型放電灯。
- 前記放電管の密閉容器が、上面と下面を平坦面とした左右に長尺な方形のものであり、
前記第1の電極が、べた一面の電極パターンに形成することにより紫外線透過率を低くしたものであり、
前記第2の電極が、網状の電極パターンに形成することにより紫外線透過率を高くしたものであり、
前記窓部が、第1の電極の左右いずれかの端部に形成され、電極パターンを網状とすることにより紫外線透過率を高くしたものであり、
前記遮蔽部が、第2の電極における窓部に対向する端部に形成され、電極パターンをべた一面とすることにより紫外線透過率を低くしたものであることを特徴とする請求項1に記載の外部電極型放電灯。 - 前記放電管の密閉容器が、上面と下面を平坦面とした左右に長尺な方形のものであり、
前記第1の電極が、べた一面の電極パターンに形成することにより紫外線透過率を低くしたものであり、
前記第2の電極が、網状の電極パターンに形成することにより紫外線透過率を高くしたものであり、
前記窓部が、第1の電極の左右いずれかの端部に形成され、電極パターンを網状とすることにより紫外線透過率を高くしたものであり、
前記遮蔽部が、第2の電極における窓部に対向する端部に形成され、電極パターンをべた一面とすることにより紫外線透過率を低くしたものであることを特徴とする請求項2に記載の外部電極型放電灯。 - 前記放電管の密閉容器が、上面と下面を平坦面とした左右に長尺な方形のものであり、
前記第1の電極が、べた一面の電極パターンに形成することにより紫外線透過率を低くしたものであり、
前記第2の電極が、網状の電極パターンに形成することにより紫外線透過率を高くしたものであり、
前記窓部が、第1の電極の左右いずれかの端部に形成され、電極パターンを網状とすることにより紫外線透過率を高くしたものであり、
前記遮蔽部が、第2の電極における窓部に対向する端部に形成され、電極パターンをべた一面とすることにより紫外線透過率を低くしたものであることを特徴とする請求項3に記載の外部電極型放電灯。 - 前記放電管の密閉容器が、上面と下面を平坦面とした左右に長尺な方形のものであり、
前記第1の電極が、べた一面の電極パターンに形成することにより紫外線透過率を低くしたものであり、
前記第2の電極が、網状の電極パターンに形成することにより紫外線透過率を高くしたものであり、
前記窓部が、第1の電極の左右いずれかの端部に形成され、電極パターンを網状とすることにより紫外線透過率を高くしたものであり、
前記遮蔽部が、第2の電極における窓部に対向する端部に形成され、電極パターンをべた一面とすることにより紫外線透過率を低くしたものであることを特徴とする請求項4に記載の外部電極型放電灯。 - 前記第1電極の窓部の電極パターンと、第2電極の電極パターンとが、同一のパターンの網状であることを特徴とする請求項5に記載の外部電極型放電灯。
- 前記第1電極の窓部の電極パターンと、第2電極の電極パターンとが、同一のパターンの網状であることを特徴とする請求項6に記載の外部電極型放電灯。
- 前記第1電極の窓部の電極パターンと、第2電極の電極パターンとが、同一のパターンの網状であることを特徴とする請求項7に記載の外部電極型放電灯。
- 前記第1電極の窓部の電極パターンと、第2電極の電極パターンとが、同一のパターンの網状であることを特徴とする請求項8に記載の外部電極型放電灯。
- 請求項5乃至請求項12のいずれかに記載の外部電極型放電灯を2本前後にずらして配置したものであって、一方の外部電極型放電灯は第2電極の遮蔽部が右側となるように配置すると共に、他方の外部電極型放電灯は第2電極の遮蔽部が左側となるように配置し、かつ、一方の外部電極型放電灯の第2電極における遮蔽部の左端の位置を他方の外部電極型放電灯の第2電極における遮蔽部の右端の位置と一致させたものを1組とし、これら2本1組の外部電極型放電灯を1組以上前後に並べて配置したことを特徴とする紫外線照射装置。
- 紫外線を透過する誘電体からなる密閉容器であって、内部に放電用ガスを封入した放電管と、この放電管の上面に形成された紫外線透過率の低い第1の電極と、この放電管の内部の下部に形成された紫外線透過率の高い第2の電極と、を備えた外部電極型放電灯において、
前記第1の電極の一部に、紫外線透過率が局所的に高い窓部が形成されると共に、前記第2の電極における前記窓部に対向する領域に、紫外線透過率が局所的に低い遮蔽部が形成されたことを特徴とする外部電極型放電灯。
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JP7115036B2 (ja) * | 2018-05-25 | 2022-08-09 | ウシオ電機株式会社 | エキシマランプ |
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