KR100619097B1 - 다중-노즐 위치 정렬 센서 내의 반사광 제어를 위한 방법 및 장치 - Google Patents

다중-노즐 위치 정렬 센서 내의 반사광 제어를 위한 방법 및 장치 Download PDF

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Publication number
KR100619097B1
KR100619097B1 KR1020007007253A KR20007007253A KR100619097B1 KR 100619097 B1 KR100619097 B1 KR 100619097B1 KR 1020007007253 A KR1020007007253 A KR 1020007007253A KR 20007007253 A KR20007007253 A KR 20007007253A KR 100619097 B1 KR100619097 B1 KR 100619097B1
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KR
South Korea
Prior art keywords
light
detector
reflected light
alignment sensor
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020007007253A
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English (en)
Korean (ko)
Other versions
KR20010033730A (ko
Inventor
듀퀘트데이비드더블유
Original Assignee
사이버옵틱스 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 사이버옵틱스 코포레이션 filed Critical 사이버옵틱스 코포레이션
Publication of KR20010033730A publication Critical patent/KR20010033730A/ko
Application granted granted Critical
Publication of KR100619097B1 publication Critical patent/KR100619097B1/ko
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages
    • H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0812—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines the monitoring devices being integrated in the mounting machine, e.g. for monitoring components, leads, component placement

Landscapes

  • Engineering & Computer Science (AREA)
  • Operations Research (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Input (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Electron Sources, Ion Sources (AREA)
KR1020007007253A 1998-10-30 1999-10-29 다중-노즐 위치 정렬 센서 내의 반사광 제어를 위한 방법 및 장치 Expired - Fee Related KR100619097B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10628398P 1998-10-30 1998-10-30
US60/106,283 1998-10-30
PCT/US1999/025543 WO2000026617A1 (en) 1998-10-30 1999-10-29 Improved methods and apparatus for controlling glint in a multi-nozzle position alignment sensor

Publications (2)

Publication Number Publication Date
KR20010033730A KR20010033730A (ko) 2001-04-25
KR100619097B1 true KR100619097B1 (ko) 2006-09-04

Family

ID=22310577

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020007007253A Expired - Fee Related KR100619097B1 (ko) 1998-10-30 1999-10-29 다중-노즐 위치 정렬 센서 내의 반사광 제어를 위한 방법 및 장치

Country Status (6)

Country Link
US (1) US6291830B1 (enExample)
JP (1) JP4428865B2 (enExample)
KR (1) KR100619097B1 (enExample)
DE (1) DE19982294T1 (enExample)
GB (1) GB2347498B (enExample)
WO (1) WO2000026617A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6639239B2 (en) 1998-10-30 2003-10-28 Cyberoptics Corporation Angle rejection filter
JP2002050896A (ja) * 2000-08-03 2002-02-15 Sony Corp 部品把持位置補正装置および補正方法
US6909515B2 (en) * 2001-01-22 2005-06-21 Cyberoptics Corporation Multiple source alignment sensor with improved optics
US6897463B1 (en) 2001-07-13 2005-05-24 Cyberoptics Semiconductor, Inc. Wafer carrier mapping sensor assembly
AT520307B1 (de) * 2017-11-27 2019-03-15 Riegl Laser Measurement Systems Gmbh Optische Vorrichtung zum Detektieren eines an einem Fernziel reflektierten Lichtstrahls

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4974010A (en) * 1989-06-09 1990-11-27 Lc Technologies, Inc. Focus control system
US5278634A (en) 1991-02-22 1994-01-11 Cyberoptics Corporation High precision component alignment sensor system
US5818061A (en) * 1992-06-24 1998-10-06 Robotic Vision Systems, Inc. Apparatus and method for obtaining three-dimensional data from objects in a contiguous array
EP0578136B1 (en) 1992-07-01 1995-11-22 Yamaha Hatsudoki Kabushiki Kaisha Method for mounting components and an apparatus therefor
US5559727A (en) * 1994-02-24 1996-09-24 Quad Systems Corporation Apparatus and method for determining the position of a component prior to placement
WO1996005477A1 (en) * 1994-08-11 1996-02-22 Cyberoptics Corporation High precision semiconductor component alignment systems
JP3109963B2 (ja) 1994-10-12 2000-11-20 ヤマハ発動機株式会社 表面実装機
JP3417773B2 (ja) 1995-11-28 2003-06-16 ヤマハ発動機株式会社 チップ部品の位置検出方法
JP3337924B2 (ja) 1995-11-28 2002-10-28 ヤマハ発動機株式会社 実装機における部品吸着状態検出装置

Also Published As

Publication number Publication date
JP2002529687A (ja) 2002-09-10
GB0013226D0 (en) 2000-07-19
JP4428865B2 (ja) 2010-03-10
US6291830B1 (en) 2001-09-18
GB2347498A (en) 2000-09-06
GB2347498B (en) 2003-06-25
WO2000026617A1 (en) 2000-05-11
DE19982294T1 (de) 2001-03-08
KR20010033730A (ko) 2001-04-25

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