JP4428865B2 - 多ノズル配置整列センサ内のグリントを制御するために改良された方法および装置 - Google Patents
多ノズル配置整列センサ内のグリントを制御するために改良された方法および装置 Download PDFInfo
- Publication number
- JP4428865B2 JP4428865B2 JP2000579952A JP2000579952A JP4428865B2 JP 4428865 B2 JP4428865 B2 JP 4428865B2 JP 2000579952 A JP2000579952 A JP 2000579952A JP 2000579952 A JP2000579952 A JP 2000579952A JP 4428865 B2 JP4428865 B2 JP 4428865B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- glint
- detector
- plane
- shadow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 27
- 230000003287 optical effect Effects 0.000 claims description 22
- 238000003384 imaging method Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000032258 transport Effects 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
- H05K13/0812—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines the monitoring devices being integrated in the mounting machine, e.g. for monitoring components, leads, component placement
Landscapes
- Engineering & Computer Science (AREA)
- Operations Research (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Image Input (AREA)
- Optical Elements Other Than Lenses (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10628398P | 1998-10-30 | 1998-10-30 | |
| US60/106,283 | 1998-10-30 | ||
| PCT/US1999/025543 WO2000026617A1 (en) | 1998-10-30 | 1999-10-29 | Improved methods and apparatus for controlling glint in a multi-nozzle position alignment sensor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002529687A JP2002529687A (ja) | 2002-09-10 |
| JP2002529687A5 JP2002529687A5 (enExample) | 2006-10-12 |
| JP4428865B2 true JP4428865B2 (ja) | 2010-03-10 |
Family
ID=22310577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000579952A Expired - Fee Related JP4428865B2 (ja) | 1998-10-30 | 1999-10-29 | 多ノズル配置整列センサ内のグリントを制御するために改良された方法および装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6291830B1 (enExample) |
| JP (1) | JP4428865B2 (enExample) |
| KR (1) | KR100619097B1 (enExample) |
| DE (1) | DE19982294T1 (enExample) |
| GB (1) | GB2347498B (enExample) |
| WO (1) | WO2000026617A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6639239B2 (en) * | 1998-10-30 | 2003-10-28 | Cyberoptics Corporation | Angle rejection filter |
| JP2002050896A (ja) * | 2000-08-03 | 2002-02-15 | Sony Corp | 部品把持位置補正装置および補正方法 |
| US6909515B2 (en) * | 2001-01-22 | 2005-06-21 | Cyberoptics Corporation | Multiple source alignment sensor with improved optics |
| US6897463B1 (en) | 2001-07-13 | 2005-05-24 | Cyberoptics Semiconductor, Inc. | Wafer carrier mapping sensor assembly |
| AT520307B1 (de) * | 2017-11-27 | 2019-03-15 | Riegl Laser Measurement Systems Gmbh | Optische Vorrichtung zum Detektieren eines an einem Fernziel reflektierten Lichtstrahls |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4974010A (en) | 1989-06-09 | 1990-11-27 | Lc Technologies, Inc. | Focus control system |
| US5278634A (en) | 1991-02-22 | 1994-01-11 | Cyberoptics Corporation | High precision component alignment sensor system |
| US5818061A (en) * | 1992-06-24 | 1998-10-06 | Robotic Vision Systems, Inc. | Apparatus and method for obtaining three-dimensional data from objects in a contiguous array |
| US5377405A (en) | 1992-07-01 | 1995-01-03 | Yamaha Hatsudoki Kabushiki Kaisha | Method for mounting components and an apparatus therefor |
| US5559727A (en) * | 1994-02-24 | 1996-09-24 | Quad Systems Corporation | Apparatus and method for determining the position of a component prior to placement |
| WO1996005477A1 (en) * | 1994-08-11 | 1996-02-22 | Cyberoptics Corporation | High precision semiconductor component alignment systems |
| JP3109963B2 (ja) | 1994-10-12 | 2000-11-20 | ヤマハ発動機株式会社 | 表面実装機 |
| JP3337924B2 (ja) | 1995-11-28 | 2002-10-28 | ヤマハ発動機株式会社 | 実装機における部品吸着状態検出装置 |
| JP3417773B2 (ja) | 1995-11-28 | 2003-06-16 | ヤマハ発動機株式会社 | チップ部品の位置検出方法 |
-
1999
- 1999-10-29 JP JP2000579952A patent/JP4428865B2/ja not_active Expired - Fee Related
- 1999-10-29 US US09/430,713 patent/US6291830B1/en not_active Expired - Fee Related
- 1999-10-29 DE DE19982294T patent/DE19982294T1/de not_active Ceased
- 1999-10-29 GB GB0013226A patent/GB2347498B/en not_active Expired - Lifetime
- 1999-10-29 KR KR1020007007253A patent/KR100619097B1/ko not_active Expired - Fee Related
- 1999-10-29 WO PCT/US1999/025543 patent/WO2000026617A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| US6291830B1 (en) | 2001-09-18 |
| KR100619097B1 (ko) | 2006-09-04 |
| WO2000026617A1 (en) | 2000-05-11 |
| GB2347498A (en) | 2000-09-06 |
| GB2347498B (en) | 2003-06-25 |
| JP2002529687A (ja) | 2002-09-10 |
| DE19982294T1 (de) | 2001-03-08 |
| GB0013226D0 (en) | 2000-07-19 |
| KR20010033730A (ko) | 2001-04-25 |
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