KR100592404B1 - 회로기판을 포함하는 물체 표면에의 화상형성방법 - Google Patents
회로기판을 포함하는 물체 표면에의 화상형성방법 Download PDFInfo
- Publication number
- KR100592404B1 KR100592404B1 KR1020037016249A KR20037016249A KR100592404B1 KR 100592404 B1 KR100592404 B1 KR 100592404B1 KR 1020037016249 A KR1020037016249 A KR 1020037016249A KR 20037016249 A KR20037016249 A KR 20037016249A KR 100592404 B1 KR100592404 B1 KR 100592404B1
- Authority
- KR
- South Korea
- Prior art keywords
- pattern
- photosensitive paste
- circuit
- laser beam
- paste layer
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 50
- 239000000758 substrate Substances 0.000 claims abstract description 58
- 239000000463 material Substances 0.000 claims abstract description 52
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 45
- 239000000919 ceramic Substances 0.000 claims abstract description 42
- 238000010304 firing Methods 0.000 claims abstract description 35
- 238000004519 manufacturing process Methods 0.000 claims abstract description 35
- 238000002156 mixing Methods 0.000 claims abstract description 12
- 239000000843 powder Substances 0.000 claims description 27
- 238000004040 coloring Methods 0.000 claims description 16
- 238000007493 shaping process Methods 0.000 claims description 12
- 239000011230 binding agent Substances 0.000 claims description 9
- 238000004898 kneading Methods 0.000 claims description 5
- 238000010030 laminating Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 14
- 230000008569 process Effects 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 9
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- 229910010293 ceramic material Inorganic materials 0.000 description 6
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- 238000003860 storage Methods 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 239000003999 initiator Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
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- 239000002131 composite material Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- UODXCYZDMHPIJE-UHFFFAOYSA-N menthanol Chemical compound CC1CCC(C(C)(C)O)CC1 UODXCYZDMHPIJE-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
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- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- NLGDWWCZQDIASO-UHFFFAOYSA-N 2-hydroxy-1-(7-oxabicyclo[4.1.0]hepta-1,3,5-trien-2-yl)-2-phenylethanone Chemical compound OC(C(=O)c1cccc2Oc12)c1ccccc1 NLGDWWCZQDIASO-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 1
- -1 CuMn Inorganic materials 0.000 description 1
- 229910002535 CuZn Inorganic materials 0.000 description 1
- 235000015842 Hesperis Nutrition 0.000 description 1
- 235000012633 Iberis amara Nutrition 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- 150000008062 acetophenones Chemical class 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000006103 coloring component Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical class C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229920006305 unsaturated polyester Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/08—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by electric discharge, e.g. by spark erosion
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0502—Patterning and lithography
- H05K2203/0514—Photodevelopable thick film, e.g. conductive or insulating paste
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
- H05K2203/107—Using laser light
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/146—Laser beam
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Materials For Photolithography (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2001-00275061 | 2001-09-11 | ||
JP2001275061 | 2001-09-11 | ||
PCT/JP2002/007291 WO2003026368A1 (fr) | 2001-09-11 | 2002-07-18 | Procede permettant de former une image sur la surface d'un objet, notamment un substrat de circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040012919A KR20040012919A (ko) | 2004-02-11 |
KR100592404B1 true KR100592404B1 (ko) | 2006-06-22 |
Family
ID=19099993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020037016249A KR100592404B1 (ko) | 2001-09-11 | 2002-07-18 | 회로기판을 포함하는 물체 표면에의 화상형성방법 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7008754B2 (ja) |
EP (1) | EP1427266A4 (ja) |
JP (1) | JPWO2003026368A1 (ja) |
KR (1) | KR100592404B1 (ja) |
CN (1) | CN1311720C (ja) |
WO (1) | WO2003026368A1 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040170925A1 (en) * | 2002-12-06 | 2004-09-02 | Roach David Herbert | Positive imageable thick film compositions |
US7402373B2 (en) * | 2004-02-05 | 2008-07-22 | E.I. Du Pont De Nemours And Company | UV radiation blocking protective layers compatible with thick film pastes |
JP2011171604A (ja) * | 2010-02-19 | 2011-09-01 | Oki Semiconductor Co Ltd | 電子部品製造方法、電子部品製造装置及び感光性レジスト |
CN101925257B (zh) * | 2010-05-07 | 2012-07-04 | 竞华电子(深圳)有限公司 | 印刷线路板的铜窗制作方法 |
CN102126082B (zh) * | 2010-12-24 | 2013-08-21 | 陈乃奇 | 激光曝光刀具及基于激光的立体直接曝光成像方法 |
US10622244B2 (en) | 2013-02-18 | 2020-04-14 | Orbotech Ltd. | Pulsed-mode direct-write laser metallization |
TWI636717B (zh) | 2013-02-18 | 2018-09-21 | 奧寶科技有限公司 | 兩步驟直接寫入之雷射金屬化 |
US10537027B2 (en) | 2013-08-02 | 2020-01-14 | Orbotech Ltd. | Method producing a conductive path on a substrate |
CN103433619B (zh) * | 2013-08-30 | 2015-10-21 | 大族激光科技产业集团股份有限公司 | 激光熔覆打印机及线路板的制作方法 |
US9474162B2 (en) * | 2014-01-10 | 2016-10-18 | Freescale Semiocnductor, Inc. | Circuit substrate and method of manufacturing same |
EP4380323A3 (en) | 2014-10-19 | 2024-09-25 | Orbotech Ltd. | Lift printing of conductive traces onto a semiconductor substrate |
CN107208256B (zh) | 2015-01-19 | 2020-08-11 | 奥博泰克有限公司 | 使用牺牲支持体的三维金属结构体的打印 |
IL258026B2 (en) | 2015-11-22 | 2023-03-01 | Orbotech Ltd | Control of surface properties in 3D printed structures |
CN105530763B (zh) * | 2015-12-30 | 2019-03-12 | 江西芯创光电有限公司 | Pcb板面保护的制作方法 |
TW201901887A (zh) | 2017-05-24 | 2019-01-01 | 以色列商奧寶科技股份有限公司 | 於未事先圖樣化基板上電器互連電路元件 |
WO2019032429A1 (en) * | 2017-08-09 | 2019-02-14 | Parker-Hannifin Corporation | IMPROVED PROCESS FOR PRODUCT MARKING |
EP3797026A4 (en) | 2018-05-22 | 2022-03-02 | Mantle Inc. | METHOD AND SYSTEM FOR AUTOMATIC TOOLWAY GENERATION |
CN110824844A (zh) * | 2018-08-07 | 2020-02-21 | 许铭案 | 表面具凸纹结构薄膜的曲面基板及其制造方法 |
KR102511881B1 (ko) | 2019-08-14 | 2023-03-20 | 세라믹 데이터 솔루션즈 게엠베하 | 정보의 장기 저장을 위한 방법 및 그를 위한 저장 매체 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59114856A (ja) * | 1982-12-21 | 1984-07-03 | Matsushita Electric Ind Co Ltd | 厚膜回路パタ−ンの形成方法 |
JPH05273761A (ja) * | 1992-03-25 | 1993-10-22 | Smc Corp | パターン形成装置 |
JPH10104829A (ja) * | 1996-06-19 | 1998-04-24 | Printing Dev Inc | 改良型フォトレジスト及びプリント基板を作製するための方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4148057A (en) * | 1977-10-25 | 1979-04-03 | Solution Sciences, Inc. | Direct laser printing and forming apparatus |
US4887225A (en) * | 1985-05-24 | 1989-12-12 | Danippon Screen Mfg. Co., Ltd. | Method and device for controlling exposure beams |
GB8531830D0 (en) * | 1985-12-30 | 1986-02-05 | Davies H J | Photo fabrication |
DE3629474A1 (de) * | 1986-08-29 | 1988-03-03 | Licentia Gmbh | Verfahren zum aufbringen erhabener strukturen und danach hergestellter verzoegerungsleitungstraeger einer lauffeldroehre |
JPH0645759A (ja) * | 1992-07-22 | 1994-02-18 | Fujitsu Ltd | 多層セラミック回路基板の製造方法 |
JP3360378B2 (ja) * | 1993-11-09 | 2002-12-24 | 東レ株式会社 | セラミックス・グリーンシート上にパターンを形成する方法 |
DE19517625A1 (de) * | 1995-05-13 | 1996-11-14 | Budenheim Rud A Oetker Chemie | Verfahren zum musterförmigen Bedrucken fester Substratoberflächen |
JP2000138454A (ja) * | 1998-10-29 | 2000-05-16 | Kyocera Corp | 配線基板の製造方法 |
FR2788456B1 (fr) * | 1999-01-15 | 2001-02-16 | Saint Gobain Vitrage | Procede d'obtention d'un motif sur un substrat en materiau verrier |
JP2000276945A (ja) * | 1999-03-25 | 2000-10-06 | Murata Mfg Co Ltd | 導体ペースト及びそれを用いた回路基板 |
-
2002
- 2002-07-18 US US10/489,389 patent/US7008754B2/en not_active Expired - Fee Related
- 2002-07-18 WO PCT/JP2002/007291 patent/WO2003026368A1/ja active Application Filing
- 2002-07-18 EP EP02751626A patent/EP1427266A4/en not_active Withdrawn
- 2002-07-18 KR KR1020037016249A patent/KR100592404B1/ko not_active IP Right Cessation
- 2002-07-18 CN CNB028126491A patent/CN1311720C/zh not_active Expired - Fee Related
- 2002-07-18 JP JP2003529828A patent/JPWO2003026368A1/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59114856A (ja) * | 1982-12-21 | 1984-07-03 | Matsushita Electric Ind Co Ltd | 厚膜回路パタ−ンの形成方法 |
JPH05273761A (ja) * | 1992-03-25 | 1993-10-22 | Smc Corp | パターン形成装置 |
JPH10104829A (ja) * | 1996-06-19 | 1998-04-24 | Printing Dev Inc | 改良型フォトレジスト及びプリント基板を作製するための方法 |
Also Published As
Publication number | Publication date |
---|---|
CN1311720C (zh) | 2007-04-18 |
JPWO2003026368A1 (ja) | 2005-01-06 |
EP1427266A1 (en) | 2004-06-09 |
KR20040012919A (ko) | 2004-02-11 |
US7008754B2 (en) | 2006-03-07 |
US20040241585A1 (en) | 2004-12-02 |
WO2003026368A1 (fr) | 2003-03-27 |
CN1520703A (zh) | 2004-08-11 |
EP1427266A4 (en) | 2006-10-04 |
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