KR100539403B1 - 광 조사기의 순환 공냉 시스템 - Google Patents

광 조사기의 순환 공냉 시스템 Download PDF

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Publication number
KR100539403B1
KR100539403B1 KR10-2001-0077315A KR20010077315A KR100539403B1 KR 100539403 B1 KR100539403 B1 KR 100539403B1 KR 20010077315 A KR20010077315 A KR 20010077315A KR 100539403 B1 KR100539403 B1 KR 100539403B1
Authority
KR
South Korea
Prior art keywords
light irradiator
cooling
clean room
air
light
Prior art date
Application number
KR10-2001-0077315A
Other languages
English (en)
Korean (ko)
Other versions
KR20020046191A (ko
Inventor
요네지마구니히로
Original Assignee
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 우시오덴키 가부시키가이샤 filed Critical 우시오덴키 가부시키가이샤
Publication of KR20020046191A publication Critical patent/KR20020046191A/ko
Application granted granted Critical
Publication of KR100539403B1 publication Critical patent/KR100539403B1/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/70—Cooling arrangements characterised by passive heat-dissipating elements, e.g. heat-sinks
    • F21V29/83—Cooling arrangements characterised by passive heat-dissipating elements, e.g. heat-sinks the elements having apertures, ducts or channels, e.g. heat radiation holes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/502—Cooling arrangements characterised by the adaptation for cooling of specific components
    • F21V29/503—Cooling arrangements characterised by the adaptation for cooling of specific components of light sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Ventilation (AREA)
KR10-2001-0077315A 2000-12-08 2001-12-07 광 조사기의 순환 공냉 시스템 KR100539403B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2000-00374473 2000-12-08
JP2000374473 2000-12-08
JPJP-P-2001-00188151 2001-06-21
JP2001188151A JP3846232B2 (ja) 2000-12-08 2001-06-21 光照射器の循環空冷システム

Publications (2)

Publication Number Publication Date
KR20020046191A KR20020046191A (ko) 2002-06-20
KR100539403B1 true KR100539403B1 (ko) 2005-12-27

Family

ID=26605507

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2001-0077315A KR100539403B1 (ko) 2000-12-08 2001-12-07 광 조사기의 순환 공냉 시스템

Country Status (3)

Country Link
JP (1) JP3846232B2 (ja)
KR (1) KR100539403B1 (ja)
TW (1) TW496945B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4811000B2 (ja) * 2005-12-07 2011-11-09 ウシオ電機株式会社 光照射装置
CH700039A1 (de) * 2008-12-01 2010-06-15 Uviterno Ag Vorrichtung zum bestrahlen eines substrats
JP5056991B1 (ja) * 2012-02-02 2012-10-24 ウシオ電機株式会社 偏光光照射装置
JP2013152433A (ja) * 2012-11-30 2013-08-08 Ushio Inc 偏光光照射装置
CN105588085A (zh) * 2014-10-23 2016-05-18 北京航天长征飞行器研究所 一种闭式风冷循环系统
CN107893981B (zh) * 2017-11-14 2019-10-25 北京卫星环境工程研究所 太阳模拟器用风冷冷却系统

Also Published As

Publication number Publication date
TW496945B (en) 2002-08-01
JP3846232B2 (ja) 2006-11-15
JP2002235942A (ja) 2002-08-23
KR20020046191A (ko) 2002-06-20

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