KR100539403B1 - Circulation air cooling system for light illuminating apparatus - Google Patents

Abstract

SUMMARY OF THE INVENTION The present invention provides a circulating air cooling system for a light irradiator which is used in a clean room and basically does not consume clean air. The circulation cooling system of the light irradiator is an air cooling system of a light irradiator formed in the clean room, It consists of an exhaust blower which exhausts the cooling wind from an irradiator, and the cooler formed in the downstream position of the said light source lamp, The cooling wind which became high temperature through the said light source lamp is cooled by a cooler, circulates, and then returns to a light source Characterized in that supplied to the lamp. In addition, an exhaust port or an external exhaust means or an internal exhaust means is formed between the exhaust blower and the light irradiator to prevent the internal pressure of the light irradiator from being higher than the pressure of the clean room.

Description

Circulation air cooling system for light illuminating apparatus

The present invention relates to a circulating air cooling system of a light irradiator for irradiating ultraviolet light in a clean room.

Conventionally, in order to treat, dry, melt, or soften a protective film, an adhesive, a paint, an ink, a resist, or the like applied on the surface of a workpiece by curing the ultraviolet light from a light source lamp, it has been treated in each field. It is widely done.

In recent years, in the manufacturing process of display panels, such as a liquid crystal, the process by irradiation of an ultraviolet light is used for bonding a board | substrate, a filter, etc., For example, the thin film transistor (TFT) board | substrate and color filter which apply | coated the ultraviolet light curable sealing agent Bonding a board | substrate and bonding them by irradiating and hardening an ultraviolet light to a sealing agent in this state is performed.

Further, in the manufacturing process of display panels such as liquid crystals, fine processing techniques are required in accordance with the request for higher precision of the screen, and since panel elements and electric circuits for driving the panel elements are arranged at high density, If foreign matter such as contaminants or dust invades, it causes an image display defect or malfunction in the display panel. For this reason, manufacture of a display panel is normally performed in a clean room.

In a clean room, the maximum value of the amount of suspended dust per unit volume inside is prescribed | regulated to the level required for the purpose of using the said clean room, and is normally strictly controlled with environmental conditions, such as temperature and humidity. In addition, in order to prevent the external atmosphere containing a large amount of dust from entering, the air pressure in the clean room is usually maintained at a pressure level slightly higher than that of the external atmosphere.

On the other hand, in the light irradiator that emits ultraviolet light, in order to shorten the processing time, an ultraviolet light emitting lamp having a large output as a light source lamp, for example, a discharge lamp such as a high pressure mercury lamp or a metal halide lamp on a rod and a reflective mirror is used. It is used in combination.

And, for example, in the adhesive treatment step of the liquid crystal display panel, in the panel to which the sealing agent is applied, when the irradiation area which should irradiate ultraviolet light collectively is 200 mm x 200 mm in size, it is a light source lamp, for example, output is 7 kW, light emission, An ultraviolet light emitting lamp having a length of 25 cm is used. In the light irradiator provided with such a high power light source lamp, the light source lamp and the reflecting mirror while the lamp is turned on in order to prevent devitrification of the lamp valve and damage of the reflecting mirror. It is necessary to cool it.

As the cooling means of the light irradiator provided with the above-mentioned high-power ultraviolet light emitting lamp, an air cooling system using cooling wind is usually used. In this air cooling system, when the output of the light source lamp is, for example, 7 kW, For example, the air volume of about 7 m 3 / min is required.

3 is an explanatory cross-sectional view schematically showing the configuration of an air cooling system of a conventional light irradiator.

In this figure, the light irradiator 30 is comprised by the main body 36 partitioned up and down arrange | positioned in the clean room 50. As shown in FIG. Specifically, the light source lamp 31 in the shape of a rod extending in the direction perpendicular to the ground and the reflection mirror 32 having an opening for light irradiation in the lower direction are generally groove-shaped, and the lower space 36A of the main body 36 is provided. Is placed on.

Moreover, the cooling wind suction nozzle 34 which penetrates the uppermost part of the reflection mirror 32 is formed in the upper side of the light source lamp 31 so that it may extend along the longitudinal direction.

On the other hand, a window portion 33 made of, for example, quartz is formed in the lower surface portion of the main body 36 so as to face the opening of the reflective mirror 32, and the reflective mirror 32 is formed in the side wall portion of the main body 36. And a cooling air inlet 35 is formed between the window 33 and the window 33.

The space surrounded by the reflection mirror 32 is communicated with the exhaust chamber 42 formed by the upper space of the main body 36 by the cooling wind suction nozzle 34. The exhaust connection port 37 is formed in the upper part of this exhaust chamber 42, The exhaust connection port 37 is an exhaust duct 39 which communicates with the atmosphere outside the clean room 50 via the duct 38. ) Is connected, and the exhaust blower 40 is arrange | positioned in the middle.

In the air cooling system of the above-described light irradiator, when the exhaust blower 40 is driven, air in the clean room 50 is sucked from the cooling wind intake port 35, and as the cooling wind, the light source lamp 31 and the reflection mirror. It flows while contacting the surface of the 32 and cools them, and after that, it cleans from the cooling wind suction nozzle 34 through the exhaust chamber 42, the duct 38, and the exhaust duct 39. Is discharged to the outside.

In addition, the light emitted from the light source lamp 31 of the light irradiator 30 is reflected directly or indirectly by the reflection mirror 32 and indirectly emitted downward through the window 33, whereby, for example, The target object 43 supported on the conveyance belt 45 supported by the support roller 44 at the lower position of the window portion 33 is traveled for a predetermined time and light, Therefore, the target light irradiation process is performed.

However, in the air cooling system of the light irradiator 30, in order to obtain the cooling wind, the clean air in the clean room 50 is sucked and finally all of the air is discharged to the outside atmosphere. As a result of being consumed in large quantities and causing the air pressure in the clean room 50 to decrease, there is a problem that a huge cost is required to supply the clean air of the clean room 50 and to maintain the environmental conditions.

An object of the present invention is to provide a circulating air-cooling system for a light irradiator which is used in a clean room but does not consume clean air or has a low consumption.

The circulating air cooling system of the light irradiator of the present invention is a circulating air cooling system of a light irradiator that cools a light irradiator formed in a clean room by circulating cooling wind, and exhausts cooling air that has become a high temperature through the light irradiator from the light irradiator. With exhaust blower,

A cooler formed at an inlet side of the exhaust blower and cooling the cooling wind;

A return duct for supplying cooling air cooled by the cooler to the light irradiator from the exhaust blower,

The return duct is provided with external exhaust means for discharging a part of the cooling air from the exhaust blower to the outside of the clean room so that the pressure in the light irradiator becomes equal to or less than the pressure in the clean room.

In addition, the circulating air cooling system of the light irradiator of the present invention is a circulating air cooling system of the light irradiator that cools the light irradiator formed in the clean room by circulating cooling air,

An exhaust blower which exhausts cooling air that has become a high temperature through the light irradiator from the light irradiator,

A cooler formed at an inlet side of the exhaust blower and cooling the cooling wind;

A return duct for supplying cooling air cooled by the cooler to the light irradiator from the exhaust blower,

An internal exhaust means for discharging a portion of the cooling wind from the exhaust blower through the filter into the internal space of the clean room such that the pressure in the light irradiator is equal to or less than the pressure in the clean room; It features.

According to the circulating air-cooling system of the light irradiator of the present invention, since the cooling wind cooled by heating the light irradiator is cooled by the cooler, it is circulated by the circulating air passage formed by the return duct and is supplied to the light irradiator, so that it is basically clean No air consumption or low consumption

In addition, in a circulating air passage from the exhaust blower to the light irradiator, part of the cooling wind is discharged to the outside of the clean room or discharged to the interior space of the clean room through a filter, so that the pressure in the light irradiator is equal to or less than the pressure in the clean room. Since the cooling wind is kept uncontrolled from the circulation wind, it is prevented from being blown into the clean room.

<Embodiment of the invention>

EMBODIMENT OF THE INVENTION Hereinafter, this invention is demonstrated in detail.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view schematically illustrating the configuration of a circulating air cooling system of a light irradiator according to an embodiment of the present invention.

In the circulating air-cooling system of the light irradiator 10, the cooler 20 is inserted into the duct 16A connecting the main body 17 constituting the light irradiator 10 and the inlet of the exhaust blower 22, and the exhaust air is exhausted. The return duct 16B which connects the outlet of the blower 22 and the cooling wind inlet 26 of the main body 17 is provided, and the air in the clean room 18 is divided into the circulating air path formed in the independent state. It is. 21 is a cooling medium distribution pipe of the cooler 20.

The light irradiator 10 covers the main body 17, a rod-shaped light source lamp 11 extending in a direction perpendicular to the ground for emitting ultraviolet light provided therein, and an upper portion of the light source lamp 11 in the longitudinal direction thereof. It is comprised by the reflection mirror 12 which is the groove-shaped whole, and the window part 13 which consists of quartz, for example formed in the lower surface of the main body 17, which has an opening in the lower side formed so that it may extend along. Moreover, the cooling wind suction nozzle 14 which communicates with the exhaust chamber 15 is arrange | positioned so that the upper direction of the light source lamp 11 may extend along the longitudinal direction.

In addition, the cooling wind suction port is not formed in the main body 17.

The cooler 20 fitted in the duct 16A is a heat exchanger, and the cooling medium distribution pipe 21 disposed therein has, for example, a surface having a shape in which a plurality of fins are formed, and for cooling cooled to a prescribed temperature therein. The medium is distributed from the outside.

The return duct 16B, which extends from the outlet of the exhaust blower 22 to the cooling wind inlet 26 of the main body 17, branches from this to communicate with the atmosphere outside the clean room 18, and at the same time, A discharge port 25 in which an openable damper 24 is controlled is formed, and an external exhaust means is provided accordingly. Moreover, the filter 23 is provided in the return duct 16B in the upstream position rather than the discharge port 25 as needed.

Although it does not specifically limit as the said light source lamp 11, For example, the rod-shaped ultraviolet-ray radiation lamp of a large output can be used preferably, As an example of such an ultraviolet-ray radiation lamp, For example, a high pressure mercury lamp, an ultrahigh pressure mercury lamp, Xenon lamps, metal halide lamps and the like.

The temperature of the cooling medium supplied to the cooler 20, its supply amount, and the supply amount of the cooling wind supplied to the light irradiator 10 are mutually heat exchanged so as to obtain a cooling effect according to the output of the light source lamp 11 as the entire circulation air cooling system. It can be set after taking the efficiency into account.

The kind of cooling medium supplied to the cooler 20 is not specifically limited, For example, water, fluid oil, cooling gas, etc. can be used. In the case of using water as this cooling medium, the temperature of the water is, for example, 15 to 25 ° C.

In addition, the supply ratio of water as a cooling medium is not specifically limited, For example, it supplies at a ratio of 5-15 liters / minute.

The exhaust blower 22 for circulating the cooling wind can supply the cooling wind of the amount of air required for cooling the light source lamp 11, the reflection mirror 12, and the window 13 according to the output of the light source lamp 11. Is used. As an example of such an exhaust blower, cooling air is supplied by the air volume of 5-10 m <3> / min, for example.

Moreover, it is preferable to ensure the airtightness in a circulation wind path by performing a seal process in the micro clearance gap etc. which exist in the junction part of a duct, etc.

In the above structure, the ultraviolet light radiated | emitted from the light source lamp 11 is reflected directly or by the reflection mirror 12, and is radiated downward through the window part 13 of the light irradiator 10. FIG. And the ultraviolet light is irradiated to the to-be-processed object 27 picked up by the conveying means 28 to the light irradiation area | region, for example, and predetermined target time irradiation is performed. 29 is a support roller for supporting the conveying means 28.

Then, the light source lamp 11 is turned on, and the exhaust blower 22 is driven, and the cooling wind generated thereby circulates through the circulating air path.

That is, the cooling wind supplied by the exhaust blower 22 passes through the filter 23 of the return duct 16B, flows into the main body 17 from the cooling wind inlet 26, and the light source lamp 11 and the reflection. It flows while contacting the surfaces of the mirror 12 and the main body 17 and the like, and cools them. The cooling wind heated by this is sucked into the exhaust chamber 15 through the cooling wind suction nozzle 14, flows through the cooler 20 while contacting the fin, passes through the cooling air, and is cooled by the exhaust blower 22. It is supplied to the circulation furnace.

The cooling wind heated up at 70-90 degreeC in the exhaust chamber 15 is cooled in the cooler 20, for example at 25-35 degreeC.

And since the area | region L which reaches from the space | gap between the cooling wind suction nozzle 14 and the light source lamp 11 in the circulation air passage to the inlet of the exhaust blower 22 is an area | region with a large negative pressure, this area | region L is actually For example, the clean air in the clean room 18 circulates in a thread hole of the exhaust chamber 15 or the cooler 20, a joint of a joint, or a gap present at the junction of the exhaust blower 22 and the duct 16A. It will flow into the furnace.

For this reason, although the pressure in the circulation air passage and the light irradiator 10 gradually increases, when this pressure becomes higher than the pressure in the clean room 18, from the screw hole of the exterior plate of the light irradiator 10 or the joint of the junction part, The cooling wind may be blown into the clean room 18 uncontrolled.

The uncontrolled flushing of the cooling wind from the circulating air cooling system disturbs the flow of clean air near the object to be processed 27 in the clean room 18, and the operating part such as the rotating shaft of the exhaust blower 22 is used for the cooling wind. There exists a possibility that the dust resulting from this may be contained, and the to-be-processed object 27 may be contaminated by these dusts, and it may become a cause which a defect generate | occur | produces.

By the way, in the said structure, the discharge port 25 which discharges a part of cooling wind to the exterior of the clean room 18 between the exhaust blower 22 of the return duct 16B, and the cooling wind inlet 26 of the light irradiator 10. Since the external exhaust means formed by this is formed, by adjusting the opening degree in the damper 24, a part of the cooling wind returning in a controlled state can be discharged | emitted to the exterior from the return duct 16B, and the light irradiator ( It is possible to reliably prevent the pressure in 10) from being higher than the pressure in the clean room 18.

Fig. 2 is an explanatory cross-sectional view schematically showing the configuration of a circulating air cooling system of a light irradiator according to another embodiment of the present invention.

In the circulating air-cooling system of the light irradiator 10 shown in this figure, the return duct 16B extending from the outlet of the exhaust blower 22 branches from this, and the clean room ( An internal discharge duct 60 communicating with the internal space of 18) is provided. A discharge blower 61 is fitted into the internal discharge duct 60, and a filter 62 for removing dust generated in the circulation air cooling system between the discharge blower 61 and the communication port 63. Is provided, and internal exhaust means for discharging a part of the cooling wind circulating in the circulation air passage into the internal space of the clean room 18 is formed.

Here, it is preferable that the communication port 63 is disposed in the clean room 18 at a position that does not disturb the flow of clean air in the vicinity of the object to be processed 27.

The discharge blower 61 may be one capable of discharging a part of the cooling wind in the circulating air passage in a controlled state according to the pressure difference between the inside of the return duct 16B and the internal space of the clean room 18. For example, what has the ability to generate the air volume of 1/3 to 1/4 of the air volume of a cooling wind is mentioned.

As the second filter 62, for example, it is preferable to use a hefer filter according to the cleanliness of the clean room 18. For example, when the light source lamp 11 uses an ultraviolet ray emitting lamp that generates ozone, In order to remove ozone generated in the light irradiator 10 and included in the cooling wind, it is preferable to use an ozone filter alone or in combination.

The other structure is the same as the structure example shown in FIG.

In the circulating air cooling system of the light irradiator of the above structure, similarly to the circulating air cooling system of the structure of FIG. 1, cooling air is supplied by the exhaust blower 22, and this cooling wind is supplied from the cooling wind inlet 26 into the main body 17. The light source lamp 11 and the reflecting mirror 12 of the light irradiator 10 are cooled, and the cooling wind flowing through the filter 23 in the return duct 16B is partially discharged. The air is introduced into the internal discharge duct 60 by the blower 61, and again filtered by the second filter 62, and then discharged from the communication port 63 into the internal space of the clean room 18.

As a result, the pressure in the light irradiator 10 can be reliably prevented from being higher than the pressure in the clean room 18 as in the circulating air-cooling system of the example shown in FIG. Since a part of the cooling wind introduced is discharged into the interior space of the clean room 18, it is not necessary to discharge clean air as a whole as a whole, and as a result, the inside of the clean room 18 due to the cooling of the light irradiator 10 results. No need to consume clean air.

In addition, the cooling wind discharged from the communication port 63 to the internal space of the clean room 18 is satisfied by the dust removal effect by the filter 62, while satisfying the target standard of the dust content as clean air, and the filter Due to the suppression effect of (62), the air blowing force from the communication port 63 is sufficiently suppressed, and the flow of clean air in the vicinity of the object to be processed 27 is not disturbed. There is no fear that a defect will occur in the processed material 27.

As mentioned above, although demonstrated according to the specific form of this invention, this invention is not limited to the above-mentioned example, Various changes can be added.

For example, the circulating air-cooling system of the light irradiator 10 does not need to be formed in its entirety housed in the clean room 18, but is part of a circulating air path other than the light irradiator 10, for example, an exhaust blower ( 22 and the cooler 20 can be provided in the outside of the clean room 18. In this case, there is an advantage that the space in the clean room 18 can be effectively used, and the arrangement, management, and the like of the parts arranged outside are facilitated.

In addition, in the example which has the internal discharge duct 60, for example, the damper which can adjust an opening degree is arrange | positioned in the vicinity of the branch opening 64 of the internal discharge duct 60, and clean | cleans from the communication port 63 by this. The structure which can control the blowing amount of the air discharged | emitted inside the room 18 may be sufficient, and in this case, the structure which does not arrange | position the discharge blower 61 may be sufficient.

<Example>

EMBODIMENT OF THE INVENTION Hereinafter, although the Example of this invention is described, this invention is not limited to this.

<Example 1>

The circulating air-cooling system of the structure shown in FIG. 1 was comprised mainly by the light irradiator provided with the light source lamp which consists of a high-pressure mercury lamp whose rated output is 7 kW, an exhaust blower, and the cooler using water as a cooling medium.

The exhaust blower circulated the cooling wind at an air volume of 7 m 3 / min, and the water at 21 ° C. was flowed at a rate of 10 liters / minute by the cooler. The high-pressure mercury lamp was sufficiently cooled together with the reflection mirror or the quartz window. It became. Specifically, the temperature of the cooling wind of the exhaust chamber 15 was about 80 ° C, and the temperature of the cooling wind flowing into the exhaust blower 22 was 27 ° C. In addition, the air volume of the cooling air discharged from the outlet 25 through the damper 24 to the outside of the clean room 18 is 1 m 3 / min, and the clean air in the clean room is 7 m 3 / min. Compared with the case where it discharges to the outside, the consumption amount of the clean air at the time of achieving required cooling to the light irradiator 10 drastically reduced.

<Example 2>

The light irradiator provided with a light source lamp consisting of a high-pressure mercury lamp having a rated output of 7 kW, an exhaust blower, a cooler using water as a cooling medium, an internal exhaust duct, an exhaust blower, and a second filter are basically used. The circulation air cooling system of the structure shown in FIG. 2 was comprised.

The exhaust blower circulates the cooling wind at a flow rate of 7 m 3 / min, circulates 21 ° C water at a rate of 10 liters / minute, and operates the exhaust blower to clean part of the cooling wind. When discharged into the interior space of the room, clean air in the clean room was not consumed, and the high-pressure mercury lamp was sufficiently cooled with the reflecting mirror or the quartz window. Specifically, the temperature of the cooling wind of the exhaust chamber 15 was about 80 ° C, and the temperature of the cooling wind flowing into the exhaust blower 22 was 27 ° C. In addition, the air volume of the cooling air discharged into the internal space of the clean room 18 through the internal discharge duct 60 and the second filter 62 is 2 m 3 / min, and the clean room 18 as a whole does not consume clean air. Instead, the required cooling can be achieved with respect to the light irradiator 10.

According to the circulating air-cooling system of the light irradiator of the present invention, since the cooling wind cooled by heating the light irradiator is cooled by the cooler, it is circulated by the circulating air passage formed by the return duct, and is supplied to the light irradiator again, thereby basically cleaning No air consumption or low consumption

In the circulating air path from the exhaust blower to the light irradiator, part of the cooling wind is discharged to the outside of the clean room, or discharged to the interior space of the clean room through the filter, so that the pressure in the light irradiator is equal to or less than the pressure in the clean room. Since the cooling wind is kept uncontrolled in the circulating air path, it is prevented from being blown out in the clean room.

1 is a cross-sectional view schematically showing the configuration of a circulating air cooling system of a light irradiator according to an embodiment of the present invention;

2 is an explanatory cross-sectional view schematically showing the configuration of a circulating air cooling system of a light irradiator according to another embodiment of the present invention;

3 is an explanatory cross-sectional view schematically showing the configuration of a conventional light irradiator having an air cooling system.

<Description of Major Symbols in Drawing>

10 light irradiator 11: light source lamp

12: reflection mirror 13: window

14 cooling air suction nozzle 15 exhaust chamber

16A: Duct 16B: Return Duct

17: body 18: clean room

20: cooler 21: cooling medium distribution pipe

22: exhaust blower 23: filter

24: damper 25: outlet

26: cooling wind inlet 27: the workpiece

28: conveying means 29: support roller

30: light irradiator 31: light source lamp

32: reflection mirror 33: window

34 cooling air suction nozzle 35 cooling air suction port

36: body 36A: lower space

37: exhaust port 38: duct

39: exhaust duct 40: exhaust blower

42: exhaust chamber 43: the object to be processed

44 support roller 45 conveying means

50: clean room 60: internal exhaust duct

61: Exhaust Pro and 62: Filter

63: communication port 64: branch

Claims (2)

As a circulating air cooling system of the light irradiator which circulates and cools a cooling wind, the light irradiator installed in a clean room is An exhaust blower which exhausts cooling air that has become a high temperature through the light irradiator from the light irradiator, A cooler provided at an inlet side of the exhaust blower and cooling the cooling wind; A return duct for supplying cooling air cooled by the cooler to the light irradiator from the exhaust blower, The light irradiator is provided with the external exhaust means which discharges a part of cooling wind from the said exhaust blower to the exterior of the said clean room so that the pressure in the said light irradiator may be equal to or less than the pressure in the said clean room. Circulating air cooling system. As a circulating air cooling system of the light irradiator which circulates and cools a cooling wind, the light irradiator installed in a clean room is An exhaust blower which exhausts cooling air that has become a high temperature through the light irradiator from the light irradiator, A cooler provided at an inlet side of the exhaust blower and cooling the cooling wind; A return duct for supplying cooling air cooled by the cooler to the light irradiator from the exhaust blower, And in the return duct, internal exhaust means for discharging a part of the cooling air from the exhaust blower through the filter into the internal space of the clean room such that the pressure in the light irradiator becomes equal to or less than the pressure in the clean room. Circulation air cooling system of light irradiator.