KR100392828B1 - 브러시를통한화학약품공급방법및장치 - Google Patents

브러시를통한화학약품공급방법및장치 Download PDF

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Publication number
KR100392828B1
KR100392828B1 KR10-1998-0702707A KR19980702707A KR100392828B1 KR 100392828 B1 KR100392828 B1 KR 100392828B1 KR 19980702707 A KR19980702707 A KR 19980702707A KR 100392828 B1 KR100392828 B1 KR 100392828B1
Authority
KR
South Korea
Prior art keywords
solution
brush
primary
substrate
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR10-1998-0702707A
Other languages
English (en)
Korean (ko)
Other versions
KR19990064221A (ko
Inventor
존 엠. 델라리오스
미카일 래브킨
도글라스 지. 가드너
Original Assignee
램 리서치 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 램 리서치 코포레이션 filed Critical 램 리서치 코포레이션
Publication of KR19990064221A publication Critical patent/KR19990064221A/ko
Application granted granted Critical
Publication of KR100392828B1 publication Critical patent/KR100392828B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/12—Brushes
    • H10P70/15—
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B11/00—Brushes with reservoir or other means for applying substances, e.g. paints, pastes, water
    • A46B11/06—Brushes with reservoir or other means for applying substances, e.g. paints, pastes, water connected to supply pipe or to other external supply means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B08B1/34—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members rotating about an axis parallel to the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/50—Cleaning by methods involving the use of tools involving cleaning of the cleaning members
    • B08B1/52—Cleaning by methods involving the use of tools involving cleaning of the cleaning members using fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • H10P50/283—
    • H10P72/0412—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR10-1998-0702707A 1995-10-13 1996-10-11 브러시를통한화학약품공급방법및장치 Expired - Lifetime KR100392828B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US54253195A 1995-10-13 1995-10-13
US08/542531 1995-10-13
US8/542531 1995-10-13

Publications (2)

Publication Number Publication Date
KR19990064221A KR19990064221A (ko) 1999-07-26
KR100392828B1 true KR100392828B1 (ko) 2003-10-17

Family

ID=24164230

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-1998-0702707A Expired - Lifetime KR100392828B1 (ko) 1995-10-13 1996-10-11 브러시를통한화학약품공급방법및장치

Country Status (6)

Country Link
US (5) US5868863A (cg-RX-API-DMAC10.html)
EP (2) EP1046433B1 (cg-RX-API-DMAC10.html)
KR (1) KR100392828B1 (cg-RX-API-DMAC10.html)
AU (1) AU7264596A (cg-RX-API-DMAC10.html)
DE (2) DE69631258T2 (cg-RX-API-DMAC10.html)
WO (1) WO1997013590A1 (cg-RX-API-DMAC10.html)

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Also Published As

Publication number Publication date
EP0914216A1 (en) 1999-05-12
EP1046433A1 (en) 2000-10-25
US5858109A (en) 1999-01-12
AU7264596A (en) 1997-04-30
KR19990064221A (ko) 1999-07-26
DE69631258T2 (de) 2004-11-18
DE69620037T2 (de) 2002-11-07
EP0914216A4 (cg-RX-API-DMAC10.html) 1999-05-12
US5868863A (en) 1999-02-09
DE69631258D1 (de) 2004-02-05
DE69620037D1 (de) 2002-04-25
WO1997013590A1 (en) 1997-04-17
US6145148A (en) 2000-11-14
US6324715B1 (en) 2001-12-04
US5806126A (en) 1998-09-15
EP0914216B1 (en) 2002-03-20
EP1046433B1 (en) 2004-01-02

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